公开(公告)号：US09085454B2

公开(公告)日：2015-07-21

申请号：US13135424

申请日：2011-07-05

申请人： Jeffrey Paul Baugher

发明人： Jeffrey Paul Baugher

IPC分类号： H03K17/975 ,  B81B3/00 ,  H01H59/00 ,  H01H1/00

CPC分类号： H01H11/00 ,  B81B3/007 ,  B81B2203/0127 ,  H01H59/0009 ,  H01H2001/0063 ,  H01H2059/009 ,  H01H2229/034 ,  Y10T29/49105

摘要： Apparatuses and method are described to create a reduced stiffness microstructure (RSM). A RSM is made by forming a first buckled membrane along a first buckling direction and forming a second buckled membrane along a second buckling direction. The second buckling direction is opposite to the first buckling direction and the first buckled membrane is in contact with the second buckled membrane over a contact area. Within an operating zone, a stiffness of the reduced stiffness microstructure spring is less than an absolute value of a stiffness of either the first buckled membrane or the second buckled membrane when the contact area translates along either one of the buckling directions. In the operating zone the stiffness can approach or equal zero.

摘要翻译： 描述了设备和方法以创建刚度低的微结构（RSM）。 通过沿第一弯曲方向形成第一带扣膜并沿着第二弯曲方向形成第二带扣膜来制造RSM。 第二屈曲方向与第一屈曲方向相反，并且第一弯曲膜在接触区域上与第二弯曲膜接触。 在操作区域内，当接触区域沿着任一个屈曲方向平移时，刚度低刚度微结构弹簧的刚度小于第一弯曲膜片或第二弯曲膜片的刚度的绝对值。 在操作区域，刚度可接近或等于零。

公开(公告)号：US08169770B2

公开(公告)日：2012-05-01

申请号：US13011334

申请日：2011-01-21

申请人： Tamio Ikehashi ,  Hiroaki Yamazaki

发明人： Tamio Ikehashi ,  Hiroaki Yamazaki

IPC分类号： H01G5/00

CPC分类号： H01H59/0009 ,  H01H2001/0063 ,  H01H2059/0018 ,  H02N1/006

摘要： A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

摘要翻译： 半导体集成电路包括静电致动器，估计电路，存储电路和偏置电路。 静电致动器具有顶部电极，底部电极和设置在顶部电极和底部电极之间的绝缘膜。 估计电路估计在静电致动器的绝缘膜中累积的电荷的量。 存储电路通过估计电路存储对电荷量的估计结果。 偏置电路根据存储在存储电路中的估计结果，改变驱动静电致动器的驱动电压。

公开(公告)号：US07907037B2

公开(公告)日：2011-03-15

申请号：US11671130

申请日：2007-02-05

申请人： Navid Yazdi

发明人： Navid Yazdi

IPC分类号： H01H51/22

CPC分类号： H01H35/14 ,  G01D21/00 ,  G01K5/62 ,  G01P15/0888 ,  G01P15/135 ,  G01P15/18 ,  H01H1/0036 ,  H01H35/24 ,  H01H35/42 ,  H01H69/01 ,  H01H2001/0063 ,  H01H2037/008 ,  H01H2300/032 ,  Y02B90/224 ,  Y04S20/14

摘要： A MEMS module that contains at least one integrated energy storage device whose discharge is minimized and controlled, so that power is available for system operation over longer periods of time. The MEMS module includes a device electrically coupled to the energy storage device for controlling charge transfers from the energy storage device while preventing charge leakage from the energy storage device. The controlling device includes a plurality of integrated MEMS switches that define open electrical paths that prevent charge leakage from the energy storage device through the MEMS switches, and are then operable to define closed electrical paths to allow charge transfers from the energy storage device, and preferably also allow charge transfers to the energy storage device, through the MEMS switches. The charge transfer can be utilized to power electronic circuits or store data in non-volatile digital memory.

摘要翻译： MEMS模块包含至少一个集成的能量存储装置，其放电被最小化和控制，使得电力可用于较长时间的系统操作。 MEMS模块包括电耦合到能量存储装置的装置，用于控制来自能量存储装置的电荷转移，同时防止来自能量存储装置的电荷泄漏。 控制装置包括多个集成的MEMS开关，其限定开放的电路径，防止电能从能量存储装置通过MEMS开关泄漏，然后可操作地定义闭合的电路径以允许从能量存储装置的电荷转移 还允许通过MEMS开关向储能装置进行电荷转移。 电荷转移可用于为电子电路供电或将数据存储在非易失性数字存储器中。

公开(公告)号：US07885051B2

公开(公告)日：2011-02-08

申请号：US12797391

申请日：2010-06-09

申请人： Tamio Ikehashi ,  Hiroaki Yamazaki

发明人： Tamio Ikehashi ,  Hiroaki Yamazaki

IPC分类号： H01G5/01

CPC分类号： H01H59/0009 ,  H01H2001/0063 ,  H01H2059/0018 ,  H02N1/006

摘要： A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

摘要翻译： 半导体集成电路包括静电致动器，估计电路，存储电路和偏置电路。 静电致动器具有顶部电极，底部电极和设置在顶部电极和底部电极之间的绝缘膜。 估计电路估计在静电致动器的绝缘膜中累积的电荷的量。 存储电路通过估计电路存储对电荷量的估计结果。 偏置电路根据存储在存储电路中的估计结果，改变驱动静电致动器的驱动电压。

公开(公告)号：US07834722B2

公开(公告)日：2010-11-16

申请号：US11886684

申请日：2006-03-07

申请人： Olivier Millet

发明人： Olivier Millet

IPC分类号： H01H51/22

CPC分类号： H01H1/0036 ,  B81B5/00 ,  B81B2201/018 ,  H01H59/0009 ,  H01H2001/0063

摘要： The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/FIG. 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3), which is bendable under the action of the actuation means (7), and which can freely slide relatively to the support means (3) during its bending movement.

摘要翻译： RF MEMS开关包括微机械切换装置，其由基板（1）承载并且可以在两个位置之间被致动：第一位置（关闭状态/图1）和第二位置（导通状态），以及致动 用于致动切换装置的位置的装置。 微机械切换装置包括柔性膜（6），其由支撑装置（3）自由地支撑，支撑装置（3）可在致动装置（7）的作用下弯曲，并且可在相对于支撑装置（3） 它的弯曲运动。

公开(公告)号：US20080237024A1

公开(公告)日：2008-10-02

申请号：US11886684

申请日：2006-03-07

申请人： Olivier Millet

发明人： Olivier Millet

IPC分类号： H03K17/975 ,  H01H59/00

CPC分类号： H01H1/0036 ,  B81B5/00 ,  B81B2201/018 ,  H01H59/0009 ,  H01H2001/0063

摘要： The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/FIG. 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3), which is bendable under the action of the actuation means (7), and which can freely slide relatively to the support means (3) during its bending movement.

摘要翻译： RF MEMS开关包括微机械切换装置，其由基板（1）承载并且可以在两个位置之间被致动：第一位置（关闭状态/图1）和第二位置（导通状态），以及致动 用于致动切换装置的位置的装置。 微机械切换装置包括柔性膜（6），其由支撑装置（3）自由地支撑，支撑装置（3）可在致动装置（7）的作用下弯曲，并且可在相对于支撑装置（3） 它的弯曲运动。

公开(公告)号：US07038150B1

公开(公告)日：2006-05-02

申请号：US10886142

申请日：2004-07-06

申请人： Marc A. Polosky ,  Laurance L. Lukens

发明人： Marc A. Polosky ,  Laurance L. Lukens

IPC分类号： H01H35/02

CPC分类号： H01H1/0036 ,  H01H35/14 ,  H01H2001/0063 ,  H01H2001/0084

摘要： A microelectromechanical (MEM) acceleration switch is disclosed which includes a proof mass flexibly connected to a substrate, with the proof mass being moveable in a direction substantially perpendicular to the substrate in response to a sensed acceleration. An electrode on the proof mass contacts one or more electrodes located below the proof mass to provide a switch closure in response to the sensed acceleration. Electrical latching of the switch in the closed position is possible with an optional latching electrode. The MEM acceleration switch, which has applications for use as an environmental sensing device, can be fabricated using micromachining.

摘要翻译： 公开了一种微机电（MEM）加速开关，其包括柔性地连接到基板的检测质量块，其中检测物质可以响应于感测的加速度在基本上垂直于基板的方向上移动。 检测质量体上的电极接触位于检测质量下方的一个或多个电极，以响应感测到的加速度而提供开关闭合。 开关在闭合位置的电锁可以通过可选的闭锁电极进行。 可以使用微加工制造具有用作环境感测装置的应用的MEM加速开关。

公开(公告)号：US20050040484A1

公开(公告)日：2005-02-24

申请号：US10689167

申请日：2003-10-20

申请人： Heinz Busta

发明人： Heinz Busta

IPC分类号： H01H1/00 ,  H01L27/14

CPC分类号： H01H1/0036 ,  H01H2001/0063 ,  H01H2001/0084 ,  H01H2001/0089

摘要： A MEM device and method for fabricating a MEM device. A MEM device comprising a lever mechanism residing along a substrate is disclosed. A contact material is deposited on a first surface of the lever mechanism. In one arrangment, the first surface is disposed towards the substrate. A first contact region may be deposited on the substrate. The first contact region attracts the lever mechanism towards the substrate such that the contact material becomes operationally coupled to a second contact region. The MEM device may also comprise a first anchor portion and a second anchor portion. The first and second anchor portions may be integral to a top surface of the substrate. Aspects of the invention are also particularly useful in providing an encapsulated MEM switching device.

摘要翻译： 一种用于制造MEM器件的MEM器件和方法。 公开了一种MEM装置，其包括沿着基板驻留的杠杆机构。 接触材料沉积在杠杆机构的第一表面上。 在一个布置中，第一表面朝向基板设置。 第一接触区域可以沉积在基底上。 第一接触区域将杠杆机构吸引到基板，使得接触材料变得可操作地耦合到第二接触区域。 MEM装置还可以包括第一锚定部分和第二锚定部分。 第一和第二锚定部分可以与衬底的顶表面成一体。 本发明的方面在提供封装的MEM切换装置方面也特别有用。

公开(公告)号：US20030117257A1

公开(公告)日：2003-06-26

申请号：US10290807

申请日：2002-11-08

申请人： Coventor, Inc.

发明人： Shawn Jay Cunningham

IPC分类号： H01C010/50

CPC分类号： B81B3/0024 ,  B81B3/0051 ,  B81B2201/014 ,  B81B2201/018 ,  B81B2203/0118 ,  B81B2203/04 ,  B81B2207/07 ,  B81C1/0015 ,  B81C2201/0107 ,  B81C2201/0108 ,  B81C2201/0109 ,  H01H1/04 ,  H01H1/504 ,  H01H59/0009 ,  H01H61/04 ,  H01H2001/0042 ,  H01H2001/0063 ,  H01H2001/0089 ,  H01H2059/0072 ,  H01H2061/006 ,  H01L23/3735 ,  H01L23/522 ,  H01L27/1203 ,  H01L2924/0002 ,  H01L2924/09701 ,  H02N1/006 ,  H02N10/00 ,  Y10T29/49222 ,  H01L2924/00

摘要： Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch having a movable microcomponent is provided and includes a substrate having a stationary contact. The switch can also include a structural layer having a movable contact positioned for contacting the stationary contact when the structural layer moves toward the substrate. An electrothermal latch attached to the structural layer and having electrical communication with the movable contact to provide current flow between the electrothermal latch and the stationary contact when the movable contact contacts the stationary contact for maintaining the movable contact in contact with the stationary contact.

摘要翻译： 电热自锁式MEMS开关及方法。 根据一个实施例，提供具有可移动微组件的微型开关，并且包括具有固定触点的基板。 该开关还可以包括具有可移动触点的结构层，该结构层定位成当结构层向衬底移动时与固定触点接触。 一个电热锁定件，其连接到结构层并且当可动触点接触固定触点以便使可动触点与固定触点接触时，与可动触头电连通以提供电热闩和固定触点之间的电流。

公开(公告)号：US06504118B2

公开(公告)日：2003-01-07

申请号：US09984289

申请日：2001-10-29

申请人： Daniel J Hyman ,  Mark K Hyman ,  Peter D Bogdanoff

发明人： Daniel J Hyman ,  Mark K Hyman ,  Peter D Bogdanoff

IPC分类号： H01H5700

CPC分类号： H01H1/0036 ,  H01H57/00 ,  H01H61/00 ,  H01H2001/0063 ,  H01H2057/006 ,  H01H2061/006

摘要： This invention is a new type of relay that incorporates the functional combination of multimorph actuator elements with electrostatic state holding mechanisms in the development of a micromachined switching device. This combination of elements provides the benefits of high-force multimorph actuators with those of zero-power electrostatic capacitive latching in microfabricated relays with high reliability and low power consumption. The operation of the relay invention allows for several stable states for the device: a passive state using no power, an active state driving the multimorph actuator with some power, and a latched state electrostatically holding the switch state requiring essentially no power. Multimorph actuators covered by this invention include piezoelectric, thermal, and buckling multimorph actuation mechanisms. These devices use one or more sets of actuator armatures in cantilever or fixed-beam configurations, and use one or more sets of electrostatic latch electrodes for state holding.