公开(公告)号：US08281660B2

公开(公告)日：2012-10-09

申请号：US12634579

申请日：2009-12-09

申请人： Dario Paci ,  Francesco Pieri ,  Pietro Toscano

发明人： Dario Paci ,  Francesco Pieri ,  Pietro Toscano

IPC分类号： G01H13/00

CPC分类号： H01L29/84 ,  G01H13/00 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2412 ,  G01N2291/0255 ,  G01N2291/0256

摘要： A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.

摘要翻译： 一种MEMS微量天平，其包括由具有空腔的半导体材料制成的衬底和谐振器，所述衬底悬挂在所述衬底的空腔上方并且由移动体形成，所述至少一个第一臂连接在所述衬底和所述移动体之间 ，其具有第一厚度并且能够通过连接到移动体的致动换能器来使移动体相对于衬底的振荡，以便以谐振频率产生振荡，以及通过用于检测谐振变化的检测换能器 频率，其中所述移动体具有至少一个具有小于所述第一臂的第一厚度的第二厚度的薄部分。

公开(公告)号：US08677824B2

公开(公告)日：2014-03-25

申请号：US13619649

申请日：2012-09-14

申请人： Dario Paci ,  Francesco Pieri ,  Pietro Toscano

发明人： Dario Paci ,  Francesco Pieri ,  Pietro Toscano

IPC分类号： G01H13/00

CPC分类号： H01L29/84 ,  G01H13/00 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2412 ,  G01N2291/0255 ,  G01N2291/0256

摘要： A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.

摘要翻译： 一种MEMS微量天平，其包括由具有空腔的半导体材料制成的衬底和谐振器，所述衬底悬挂在所述衬底的空腔上方并且由移动体形成，所述至少一个第一臂连接在所述衬底和所述移动体之间 ，其具有第一厚度并且能够通过连接到移动体的致动换能器来使移动体相对于衬底的振荡，以便以谐振频率产生振荡，以及通过用于检测谐振变化的检测换能器 频率，其中所述移动体具有至少一个具有小于所述第一臂的第一厚度的第二厚度的薄部分。

公开(公告)号：US20100154544A1

公开(公告)日：2010-06-24

申请号：US12634579

申请日：2009-12-09

申请人： Dario Paci ,  Francesco Pieri ,  Pietro Toscano

发明人： Dario Paci ,  Francesco Pieri ,  Pietro Toscano

IPC分类号： H01L29/84 ,  H01L21/18 ,  G01H13/00

CPC分类号： H01L29/84 ,  G01H13/00 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2412 ,  G01N2291/0255 ,  G01N2291/0256

摘要： A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.

摘要翻译： 一种MEMS微量天平，其包括由具有空腔的半导体材料制成的衬底和谐振器，所述衬底悬挂在所述衬底的空腔上方并且由移动体形成，所述至少一个第一臂连接在所述衬底和所述移动体之间 ，其具有第一厚度并且能够通过连接到移动体的致动换能器来使移动体相对于衬底的振荡，以便以谐振频率产生振荡，以及通过用于检测谐振变化的检测换能器 频率，其中所述移动体具有至少一个具有小于所述第一臂的第一厚度的第二厚度的薄部分。

公开(公告)号：US20130081467A1

公开(公告)日：2013-04-04

申请号：US13619649

申请日：2012-09-14

申请人： Dario Paci ,  Francesco Pieri ,  Pietro Toscano

发明人： Dario Paci ,  Francesco Pieri ,  Pietro Toscano

IPC分类号： H01L29/84 ,  G01H13/00

CPC分类号： H01L29/84 ,  G01H13/00 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2412 ,  G01N2291/0255 ,  G01N2291/0256

摘要： A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.

摘要翻译： 一种MEMS微量天平，其包括由具有空腔的半导体材料制成的衬底和谐振器，所述衬底悬挂在所述衬底的空腔上方并且由移动体形成，所述至少一个第一臂连接在所述衬底和所述移动体之间 ，其具有第一厚度并且能够通过连接到移动体的致动换能器来使移动体相对于衬底的振荡，以便以谐振频率产生振荡，以及通过用于检测谐振变化的检测换能器 频率，其中所述移动体具有至少一个具有小于所述第一臂的第一厚度的第二厚度的薄部分。

公开(公告)号：US09006862B2

公开(公告)日：2015-04-14

申请号：US13608880

申请日：2012-09-10

申请人： Vincenzo Palumbo ,  Dario Paci ,  Paolo Iuliano ,  Fausto Carace ,  Marco Morelli

发明人： Vincenzo Palumbo ,  Dario Paci ,  Paolo Iuliano ,  Fausto Carace ,  Marco Morelli

IPC分类号： H01L29/72 ,  H01L23/522 ,  H01L23/64 ,  H01L25/16

CPC分类号： H01L23/5227 ,  H01L23/645 ,  H01L25/16 ,  H01L2224/16 ,  H01L2224/48091 ,  H01L2224/48463 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/00014 ,  H01L2924/00

摘要： An embodiment of an electronic device includes first and second semiconductor bodies. The first semiconductor body houses a first conductive strip having a first end portion and a second end portion, and houses a first conduction terminal electrically coupled to the first end portion and facing a surface of the first semiconductor body. The second semiconductor body houses a second conductive strip having a third end portion and a fourth end portion, and houses a second conduction terminal electrically coupled to the third end portion and facing a surface of the second semiconductor body. The first and second semiconductor bodies are arranged relative to one another so that the respective surfaces face one another, and the first conduction terminal and the second conduction terminal are coupled to one another by means of a conductive element so as to form a loop of an inductor.

摘要翻译： 电子设备的实施例包括第一和第二半导体本体。 第一半导体体容纳具有第一端部和第二端部的第一导电带，并且容纳电耦合到第一端部并面向第一半导体本体的表面的第一导电端子。 第二半导体体容纳具有第三端部和第四端部的第二导电带，并且容纳与第三端部电耦合并面向第二半导体本体的表面的第二导电端子。 第一和第二半导体本体相对于彼此布置，使得各个表面彼此面对，并且第一导电端子和第二导电端子通过导电元件彼此耦合以形成环路 电感。

公开(公告)号：US20120161756A1

公开(公告)日：2012-06-28

申请号：US13333848

申请日：2011-12-21

申请人： Dario Paci ,  Sarah Zerbini

发明人： Dario Paci ,  Sarah Zerbini

IPC分类号： G01R33/12

CPC分类号： G01R33/093 ,  B82Y25/00 ,  G01R33/0011

摘要： An integrated magnetic-field sensor designed to detect an external magnetic field, comprising a first magnetoresistive structure for detecting the external magnetic field, the first magnetoresistive structure including first magnetoresistive means having a main axis of magnetization and a secondary axis of magnetization set orthogonal to one another. The magnetic-field sensor further comprises a magnetic-field generator, including a first portion configured for generating a first magnetic field having field lines in a first field direction, and a second portion, which is coplanar and is connected to the first portion, configured for generating a second magnetic field having field lines in a second field direction, the first magnetoresistive means being configured so that the main axis of magnetization extends parallel to the first field direction, and the secondary axis of magnetization extends parallel to the second field direction.

摘要翻译： 设计成检测外部磁场的集成磁场传感器，包括用于检测外部磁场的第一磁阻结构，所述第一磁阻结构包括具有主轴的磁化的第一磁阻装置和与其正交的磁化的次级轴 另一个。 磁场传感器还包括磁场发生器，包括被配置为产生具有第一场方向上的场线的第一磁场的第一部分和共面并连接到第一部分的第二部分，配置 为了产生具有第二场方向上的场线的第二磁场，第一磁阻装置构造成使得主磁化轴平行于第一场方向延伸，并且磁化的次级轴平行于第二场方向延伸。

公开(公告)号：US09442168B2

公开(公告)日：2016-09-13

申请号：US13996922

申请日：2011-12-23

申请人： Dario Paci ,  Marco Morelli ,  Caterina Riva

发明人： Dario Paci ,  Marco Morelli ,  Caterina Riva

IPC分类号： G01R33/02 ,  G01R33/00 ,  B82Y25/00 ,  G01R33/09 ,  H01L43/12

CPC分类号： G01R33/0011 ,  B82Y25/00 ,  G01R33/093 ,  H01L43/12

摘要： An integrated magnetoresistive device, where a substrate of semiconductor material is covered, on a first surface, by an insulating layer. A magnetoresistor of ferromagnetic material extends in the insulating layer and defines a sensitivity plane of the sensor. A concentrator of ferromagnetic material including at least one arm, extending in a transversal direction to the sensitivity plane and vertically offset to the magnetoresistor. In this way, magnetic flux lines directed perpendicularly to the sensitivity plane are concentrated and deflected so as to generate magnetic-field components directed in a parallel direction to the sensitivity plane.

摘要翻译： 在第一表面上由绝缘层覆盖半导体材料的衬底的集成磁阻器件。 铁磁材料的磁阻在绝缘层中延伸并限定传感器的灵敏度平面。 铁磁材料的集中器，包括至少一个臂，沿横向方向延伸到灵敏平面并垂直偏移到磁电阻。 以这种方式，垂直于灵敏度平面指向的磁通线被集中和偏转，以便产生指向与灵敏平面平行的方向的磁场分量。

公开(公告)号：US09018946B2

公开(公告)日：2015-04-28

申请号：US13333848

申请日：2011-12-21

申请人： Dario Paci ,  Sarah Zerbini

发明人： Dario Paci ,  Sarah Zerbini

IPC分类号： G01R33/12 ,  G01R33/09 ,  B82Y25/00 ,  G01R33/00

CPC分类号： G01R33/093 ,  B82Y25/00 ,  G01R33/0011

摘要： An integrated magnetic-field sensor designed to detect an external magnetic field, comprising a first magnetoresistive structure for detecting the external magnetic field, the first magnetoresistive structure including first magnetoresistive means having a main axis of magnetization and a secondary axis of magnetization set orthogonal to one another. The magnetic-field sensor further comprises a magnetic-field generator, including a first portion configured for generating a first magnetic field having field lines in a first field direction, and a second portion, which is coplanar and is connected to the first portion, configured for generating a second magnetic field having field lines in a second field direction, the first magnetoresistive means being configured so that the main axis of magnetization extends parallel to the first field direction, and the secondary axis of magnetization extends parallel to the second field direction.

摘要翻译： 设计成检测外部磁场的集成磁场传感器，包括用于检测外部磁场的第一磁阻结构，所述第一磁阻结构包括具有主轴的磁化的第一磁阻装置和与其正交的磁化的次级轴 另一个。 磁场传感器还包括磁场发生器，包括被配置为产生具有第一场方向上的场线的第一磁场的第一部分和共面并连接到第一部分的第二部分，配置 为了产生具有第二场方向上的场线的第二磁场，第一磁阻装置构造成使得主磁化轴平行于第一场方向延伸，并且磁化的次级轴平行于第二场方向延伸。

公开(公告)号：US08736262B2

公开(公告)日：2014-05-27

申请号：US13021573

申请日：2011-02-04

申请人： Dario Paci ,  Caterina Riva ,  Marco Morelli

发明人： Dario Paci ,  Caterina Riva ,  Marco Morelli

IPC分类号： G01R33/07

CPC分类号： G01R33/07

摘要： An integrated magnetic sensor formed in a body including a substrate of semiconductor material, which integrates a Hall cell. A trench is formed in the body, for example, on the back of the substrate, and is delimited by lateral surface portions that extend in a direction transverse to the main face of the body. The trench has a depth in a direction perpendicular to the main face that is much greater than its width in a direction parallel to the main face of the body, between the lateral surface portions. A concentrator made of ferromagnetic material is formed within the trench and is constituted by two ferromagnetic regions, which are set at a distance apart from one another and extend along the lateral surface portions of the trench towards the first Hall cell.

摘要翻译： 一种形成在包括半导体材料的基板的主体中的集成磁传感器，其集成了霍尔单元。 在主体中形成沟槽，例如在基板的背面，并且由横向于主体的主面的方向延伸的侧面部分限定。 所述沟槽在垂直于所述主面的方向上的深度大于在所述侧表面部分之间平行于所述主体的主面的方向上的宽度。 由铁磁材料制成的集中器形成在沟槽内并且由两个铁磁区域构成，两个铁磁区域被设置成彼此间隔开一定距离并且沿沟槽的侧表面部分朝向第一霍尔室延伸。

公开(公告)号：US20110210722A1

公开(公告)日：2011-09-01

申请号：US12957175

申请日：2010-11-30

申请人： Dario Paci ,  Paolo Iuliano ,  Caterina Riva ,  Marco Morelli

发明人： Dario Paci ,  Paolo Iuliano ,  Caterina Riva ,  Marco Morelli

IPC分类号： G01B7/30 ,  G01R33/02 ,  G01R33/06 ,  H01L21/00

CPC分类号： G01R33/04 ,  G01R33/0005 ,  G01R33/0047 ,  G01R33/0052 ,  G01R33/072

摘要： The integrated magnetic sensor for detecting an external magnetic field, is formed by a body of semiconductor material having a surface; an insulating layer covering the body of semiconductor material; a magnetically sensitive region, for example a Hall cell, extending inside the body; and a concentrator of ferromagnetic material, extending on the Hall cell and having a planar portion extending parallel to the surface of the substrate on the insulating layer. The concentrator terminates with a tip protruding peripherally from, and transversely to, the planar portion toward the Hall cell. When the magnetically sensitive region is a sensing coil of a fluxgate sensor, it is formed on the substrate, embedded in the insulating layer, and the tip of the concentrator can reach as far as the sensing coil.

摘要翻译： 用于检测外部磁场的集成磁传感器由具有表面的半导体材料体形成; 覆盖半导体材料体的绝缘层; 在身体内延伸的磁敏感区域，例如霍尔室; 以及在霍尔单元上延伸并且具有在绝缘层上平行于衬底的表面延伸的平面部分的铁磁材料的集中器。 集中器终止于朝向霍尔单元的平面部分周向地突出并且横向于平面部分突出的尖端。 当磁敏感区域是磁通门传感器的感测线圈时，它形成在衬底上，嵌入在绝缘层中，并且集中器的尖端可以达到传感线圈的距离。