公开(公告)号：US06910942B1

公开(公告)日：2005-06-28

申请号：US08869328

申请日：1997-06-05

申请人： David A. Dornfeld ,  Jianshe Tang

发明人： David A. Dornfeld ,  Jianshe Tang

IPC分类号： B24B37/013 ,  B24B49/00 ,  B24B49/04 ,  B24B53/007 ,  B24B53/017 ,  B24B1/00

CPC分类号： B24B37/013 ,  B24B49/003 ,  B24B49/04 ,  B24B53/017

摘要： The chemical-mechanical polishing (CMP) of products in general and semiconductor wafers in particular is controlled by monitoring the acoustic emissions generated during CMP. A signal is generated with the acoustic emissions which is reflective of the energy of the acoustic emissions. The signals are monitored and the CMP process is adjusted in response to a change in the acoustic emission energy. Changes in the acoustic emission energy signal can be used to determine the end-point for CMP, particularly when fabricating semiconductor wafers for planarizing/polishing a given surface thereof. Long-term changes in the acoustic emission energy signals resulting from process changes including, for example, wear of the polishing pad, can also be detected with the acoustic emission energy signals so that desired or necessary process adjustments, such as a reconditioning of the polishing pad, for example, can be effected or the process can be stopped or an alarm signal can be generated when unacceptable process abnormalities occur.

公开(公告)号：US07052365B2

公开(公告)日：2006-05-30

申请号：US11097779

申请日：2005-04-01

申请人： David A. Dornfeld ,  Jianshe Tang

发明人： David A. Dornfeld ,  Jianshe Tang

IPC分类号： B24B1/00

CPC分类号： B24B37/013 ,  B24B49/003 ,  B24B49/04 ,  B24B53/017

摘要： The chemical-mechanical polishing (CMP) of products in general and semiconductor wafers in particular is controlled by monitoring the acoustic emissions generated during CMP. A signal is generated with the acoustic emissions which is reflective of the energy of the acoustic emissions. The signals are monitored and the CMP process is adjusted in response to a change in the acoustic emission energy. Changes in the acoustic emission energy signal can be used to determine the end-point for CMP, particularly when fabricating semiconductor wafers for planarizing/polishing a given surface thereof. Long-term changes in the acoustic emission energy signals resulting from process changes including, for example, wear of the polishing pad, can also be detected with the acoustic emission energy signals so that desired or necessary process adjustments, such as a reconditioning of the polishing pad, for example, can be effected or the process can be stopped or an alarm signal can be generated when unacceptable process abnormalities occur.

摘要翻译： 特别是产品的化学 - 机械抛光（CMP）特别是通过监测在CMP期间产生的声发射来控制。 产生具有反映声发射能量的声发射的信号。 监测信号，并且响应于声发射能量的变化来调整CMP处理。 可以使用声发射能量信号的变化来确定CMP的终点，特别是当制造用于平坦化/抛光给定表面的半导体晶片时。 也可以利用声发射能量信号来检测由包括例如抛光垫的磨损在内的过程变化引起的声发射能量信号的长期变化，从而使所需的或必需的工艺调整，例如抛光 例如，可以实现垫或过程可以停止，或者当发生不可接受的过程异常时可以产生报警信号。

公开(公告)号：US4922754A

公开(公告)日：1990-05-08

申请号：US395193

申请日：1989-08-15

申请人： John G. Horne ,  David A. Dornfeld ,  Keith A. McMillen

发明人： John G. Horne ,  David A. Dornfeld ,  Keith A. McMillen

IPC分类号： G01N29/14 ,  G01N29/24 ,  G10K11/00

CPC分类号： G01N29/14 ,  G01N29/24 ,  G10K11/004 ,  G01N2291/0423

摘要： An acoustic emission transducer has an improved design and mounting arrangements for using it to monitor machine tool operating condition. The transducer has a hollow housing with external threads capable of making a threaded mounting connection through which acoustic emission energy generated by operation of a machine tool propagates and is then transmitted by the housing. Also, a wear plate is attached to one end of the externally-threaded housing and supports a piezoelectric detecting element in the housing. The plate is capable of transmitting acoustic emission energy and the detecting element is capable of detecting it and generating an electrical signal in response thereto. In a surface mounting arrangement of the transducer, an adapter is used in mounting the transducer to a surface of the machine tool support structure. In an integral mounting arrangement of the transducer, the housing of the transducer is threaded directly into an internally threaded cavity in the machine tool support structure. In both mounting arrangements, a contact ball is disposed in a recess formed in the machine tool support structure below the transducer plate for providing acoustic emission energy transmitting contact between the transducer plate and the machine tool support structure.

摘要翻译： 声发射换能器具有改进的设计和安装布置，用于监测机床工作状态。 换能器具有中空壳体，外壳具有能够制造螺纹安装连接的螺纹，通过该安装连接，通过机床的操作产生的声发射能量传播并由壳体传输。 此外，耐磨板附接到外螺纹壳体的一端，并且在壳体中支撑压电检测元件。 该板能够发射声发射能量，并且检测元件能够检测它并响应于此产生电信号。 在换能器的表面安装布置中，适配器用于将换能器安装到机床支撑结构的表面。 在换能器的整体安装布置中，换能器的壳体直接螺纹连接到机床支撑结构中的内螺纹空腔中。 在两个安装结构中，接触球设置在形成在换能器板下方的机床支撑结构中的凹部中，用于提供换能器板和机床支撑结构之间的声发射能量传递接触。

公开(公告)号：US4854172A

公开(公告)日：1989-08-08

申请号：US247872

申请日：1988-09-22

申请人： Richard L. Lemaster ,  David A. Dornfeld

发明人： Richard L. Lemaster ,  David A. Dornfeld

IPC分类号： G01N29/14 ,  G01N33/46

CPC分类号： G01N29/14 ,  G01N29/449 ,  G01N33/46 ,  G01N2291/0238

摘要： Method and apparatus for evaluating the density profile of a wood-derived specimen. A sample of the material is mounted on a lathe and rotated at high speed. An acoustic emission transducer is coupled to a cutting tool, brought into contact with the specimen to produce an AE signal, as the tool is moved across the thickness of the rotating sample. The acoustic emission signal is then transformed into an electrical signal and the resultant electrical signal is amplified and transmitted to a second amplifier for further amplification and analysis of the signal.

摘要翻译： 用于评估木材样品密度分布的方法和装置。 材料样品安装在车床上并以高速旋转。 声发射换能器联接到切割工具，与样品接触以产生AE信号，因为工具在旋转样品的厚度上移动。 然后将声发射信号转换成电信号，并将所得的电信号放大并传输到第二放大器，用于信号的进一步放大和分析。

公开(公告)号：US4831880A

公开(公告)日：1989-05-23

申请号：US229822

申请日：1988-08-08

申请人： Richard L. Lemaster ,  David A. Dornfeld

发明人： Richard L. Lemaster ,  David A. Dornfeld

IPC分类号： G01N29/14 ,  G01N33/46

CPC分类号： G01N29/14 ,  G01N33/46 ,  G01N2291/0238

摘要： Method and apparatus for determining vertical density profiles in wood composites. A fly cutter is rotated across the edge of a wood composite panel to produce acoustic emissions that themselves produce an RMS voltage. The changes is RMS voltage so produced are recorded and thereby the acoustic emission is recorded. The detected signal is transformed into electrical signals, amplified and transmitted to a suitable detecting transducer.

摘要翻译： 用于确定木材复合材料垂直密度分布的方法和装置。 飞刀在木材复合板的边缘旋转以产生自身产生RMS电压的声发射。 这些变化是记录所产生的RMS电压，从而记录声发射。 检测到的信号被转换成电信号，被放大并传输到合适的检测传感器。