公开(公告)号：US5763782A

公开(公告)日：1998-06-09

申请号：US794488

申请日：1997-02-04

申请人： David Frank Moore ,  Andrew Charles Frederick Hoole ,  Alan Heaver

发明人： David Frank Moore ,  Andrew Charles Frederick Hoole ,  Alan Heaver

IPC分类号： B81B3/00 ,  G01B7/00 ,  G01B7/14 ,  G01P15/08 ,  G01R33/02 ,  G01P15/125 ,  G01N27/12

CPC分类号： B81B3/0072 ,  G01B7/00 ,  G01B7/14 ,  G01P15/0802 ,  G01P15/0894

摘要： A micromechanical sensor has a plurality of sensing elements (14a-14d) which are supported at respective support regions (12a-12d). A first set of the sensing elements defines the sensing gap. In one arrangement this is defined by sensing elements supported by adjacent support regions. In another embodiment the sensing gap is defined between one sensing element and a reference beam formed by connection of the return legs of two diametrically opposed sensing elements. The sensing elements are substantially similar one to another and each sensing element comprises an outgoing elongate leg extending away from its associated support region and a return leg substantially parallel to the outgoing leg extending towards the support region. By providing sensing elements which are substantially similar in shape and arranged in this way, the effects of thin film stress are minimized.

摘要翻译： 微机械传感器具有多个感测元件（14a-14d），其被支撑在相应的支撑区域（12a-12d）处。 感测元件的第一组限定了感测间隙。 在一种布置中，这由感测由相邻支撑区域支撑的元件限定。 在另一个实施例中，感测间隙限定在一个感测元件和通过两个直径相对的传感元件的返回支腿的连接形成的参考光束之间。 感测元件基本上彼此相似，并且每个感测元件包括远离其相关联的支撑区域延伸的输出细长支腿和基本上平行于朝向支撑区域延伸的输出支腿的返回支路。 通过提供基本相似的形状并以这种方式布置的感测元件，薄膜应力的作用被最小化。