Method for improved planarization in semiconductor devices
    1.
    发明授权
    Method for improved planarization in semiconductor devices 有权
    改进半导体器件平面化的方法

    公开(公告)号:US07696094B2

    公开(公告)日:2010-04-13

    申请号:US11616563

    申请日:2006-12-27

    IPC分类号: H01L21/302

    摘要: A method for forming a semiconductor device may include forming a silicon oxynitride mask layer over a first layer. The first layer may be etched using the silicon oxynitride mask layer, to form a pattern in the first layer. The pattern may be filled with a dielectric material. The dielectric material may be planarized using a ceria-based slurry and using the silicon oxynitride mask layer as a stop layer.

    摘要翻译: 形成半导体器件的方法可以包括在第一层上形成氮氧化硅掩模层。 可以使用氮氧化硅掩模层来蚀刻第一层,以在第一层中形成图案。 图案可以用电介质材料填充。 介电材料可以使用二氧化铈基浆料并使用氧氮化硅掩模层作为停止层进行平面化。

    Planarization method using hybrid oxide and polysilicon CMP
    2.
    发明授权
    Planarization method using hybrid oxide and polysilicon CMP 有权
    使用混合氧化物和多晶硅CMP的平面化方法

    公开(公告)号:US07829464B2

    公开(公告)日:2010-11-09

    申请号:US11551390

    申请日:2006-10-20

    IPC分类号: H01L21/461 H01L21/302

    摘要: A method of planarizing a semiconductor device is provided. The semiconductor device includes a substrate, first and second components provided on the surface of the substrate, and a first material provided between and above the first and second components. The first component has a height greater than a height of the second component. The method includes performing a first polishing step on the semiconductor device to remove the first material above a top surface of the first component, to remove the first material above a top surface of the second component, and to level the top surface of the first component. The method also includes performing a second polishing step on the semiconductor device to planarize the top surfaces of the first and second components.

    摘要翻译: 提供了一种平面化半导体器件的方法。 半导体器件包括衬底,设置在衬底的表面上的第一和第二组件以及设置在第一和第二组件之间和之上的第一材料。 第一部件的高度大于第二部件的高度。 该方法包括在半导体器件上执行第一抛光步骤以去除第一部件的顶表面上方的第一材料,以去除第二部件的顶表面上方的第一材料,并且使第一部件的顶表面平整 。 该方法还包括在半导体器件上执行第二抛光步骤以平坦化第一和第二部件的顶表面。

    PLANARIZATION METHOD USING HYBRID OXIDE AND POLYSILICON CMP
    3.
    发明申请
    PLANARIZATION METHOD USING HYBRID OXIDE AND POLYSILICON CMP 有权
    使用混合氧化物和多晶硅CMP的平面化方法

    公开(公告)号:US20080096388A1

    公开(公告)日:2008-04-24

    申请号:US11551390

    申请日:2006-10-20

    IPC分类号: H01L21/302

    摘要: A method of planarizing a semiconductor device is provided. The semiconductor device includes a substrate, first and second components provided on the surface of the substrate, and a first material provided between and above the first and second components. The first component has a height greater than a height of the second component. The method includes performing a first polishing step on the semiconductor device to remove the first material above a top surface of the first component, to remove the first material above a top surface of the second component, and to level the top surface of the first component. The method also includes performing a second polishing step on the semiconductor device to planarize the top surfaces of the first and second components.

    摘要翻译: 提供了一种平面化半导体器件的方法。 半导体器件包括衬底,设置在衬底的表面上的第一和第二组件以及设置在第一和第二组件之间和之上的第一材料。 第一部件的高度大于第二部件的高度。 该方法包括在半导体器件上执行第一抛光步骤以去除第一部件的顶表面上方的第一材料,以去除第二部件的顶表面上方的第一材料,并且使第一部件的顶表面平整 。 该方法还包括在半导体器件上执行第二抛光步骤以平坦化第一和第二部件的顶表面。

    Planarization method using hybrid oxide and polysilicon CMP
    4.
    发明授权
    Planarization method using hybrid oxide and polysilicon CMP 有权
    使用混合氧化物和多晶硅CMP的平面化方法

    公开(公告)号:US07972962B2

    公开(公告)日:2011-07-05

    申请号:US12887182

    申请日:2010-09-21

    IPC分类号: H01L21/461 H01L21/302

    摘要: A method of planarizing a semiconductor device is provided. The semiconductor device includes a substrate, first and second components provided on the surface of the substrate, and a first material provided between and above the first and second components. The first component has a height greater than a height of the second component. The method includes performing a first polishing step on the semiconductor device to remove the first material above a top surface of the first component, to remove the first material above a top surface of the second component, and to level the top surface of the first component. The method also includes performing a second polishing step on the semiconductor device to planarize the top surfaces of the first and second components.

    摘要翻译: 提供了一种平面化半导体器件的方法。 半导体器件包括衬底,设置在衬底的表面上的第一和第二组件以及设置在第一和第二组件之间和之上的第一材料。 第一部件的高度大于第二部件的高度。 该方法包括在半导体器件上执行第一抛光步骤以去除第一部件的顶表面上方的第一材料,以去除第二部件的顶表面上方的第一材料,并且使第一部件的顶表面平整 。 该方法还包括在半导体器件上执行第二抛光步骤以平坦化第一和第二部件的顶表面。

    SYSTEMS AND METHODS FOR ANALYZING FACIAL EXPRESSIONS, IDENTIFYING INTENT AND TRANSFORMING IMAGES THROUGH REVIEW OF FACIAL EXPRESSIONS
    6.
    发明申请
    SYSTEMS AND METHODS FOR ANALYZING FACIAL EXPRESSIONS, IDENTIFYING INTENT AND TRANSFORMING IMAGES THROUGH REVIEW OF FACIAL EXPRESSIONS 有权
    用于分析FACIAL表达的系统和方法,通过对FACIAL表达的评估来识别INTENT和变换图像

    公开(公告)号:US20110026779A1

    公开(公告)日:2011-02-03

    申请号:US12646211

    申请日:2009-12-23

    IPC分类号: G06K9/00

    摘要: Methods of analyzing a plurality of facial expressions are disclosed that include: identifying a subject person, utilizing the subject person to create an image of a known target, removing at least one distracter expression from the target image to form a revised target image, and reviewing the revised target image with at least one third party participant to form a final target image. Additional methods of analyzing a plurality of facial expressions include: identifying a subject person, utilizing the subject person to create an image of a known target, digitizing the target image, removing at least one distracter expression from the target image to transform the target image to a revised target image, and reviewing the revised target image with at least one third party participant to transform the revised target image to a final target image. Software for implementing contemplated methods include: a set speed function, a pre-test phase function, an instruction phase function, a practice phase function, and a post-test phase function.

    摘要翻译: 公开了分析多个面部表情的方法,包括:识别对象人,利用对象人创建已知目标的图像,从目标图像中移除至少一个分离符表达以形成修订的目标图像,以及查看 修改的目标图像与至少一个第三方参与者形成最终目标图像。 分析多个面部表情的附加方法包括:识别被摄体人,利用对象人创建已知目标的图像,数字化目标图像,从目标图像中移除至少一个分离符表达,以将目标图像转换为 修改的目标图像,并且与至少一个第三方参与者一起检查修改的目标图像以将修正的目标图像变换为最终目标图像。 用于实现预期方法的软件包括:设定速度功能,预测相位功能,指令相位功能,练习相位功能和测试后相位功能。

    System and method for error recovery
    7.
    发明申请
    System and method for error recovery 有权
    用于错误恢复的系统和方法

    公开(公告)号:US20070174654A1

    公开(公告)日:2007-07-26

    申请号:US11332011

    申请日:2006-01-13

    IPC分类号: G06F11/00

    摘要: An automated laboratory device that comprises a mechanism that performs operations on laboratory samples, a scheduler that causes the mechanism to process laboratory samples in accordance with programmed processes, logic that detects an error occurring in a process controlled by the scheduler, logic that accepts a user-defined error handling routine for the error, and logic that executes the error handling routine when the error is encountered. Also described is an embodiment of the invention directed to a laboratory automation system, a method of laboratory automation, a computer implemented software program product, a method of doing business, and a laboratory automation network.

    摘要翻译: 一种自动化实验室设备,包括对实验室样品执行操作的机构,调度器,其使机构根据编程过程处理实验室样品,检测由调度器控制的过程中发生的错误的逻辑,接受用户的逻辑 用于错误的定义错误处理例程,以及遇到错误时执行错误处理例程的逻辑。 还描述了本发明的实施例,其涉及实验室自动化系统,实验室自动化方法,计算机实现的软件程序产品,业务方法和实验室自动化网络。

    Distributed system and method for error recovery
    8.
    发明申请
    Distributed system and method for error recovery 有权
    分布式系统和错误恢复方法

    公开(公告)号:US20070174653A1

    公开(公告)日:2007-07-26

    申请号:US11331765

    申请日:2006-01-13

    IPC分类号: G06F11/00

    CPC分类号: G01N35/00623

    摘要: An automated laboratory device that comprises a mechanism that performs operations on laboratory samples, a scheduler that causes the mechanism to process laboratory samples in accordance with programmed processes, logic that detects an error occurring in a process controlled by the scheduler, logic that accepts a user-defined error handling routine for the error, and logic that executes the error handling routine when the error is encountered. Also described is an embodiment of the invention directed to a laboratory automation system, a method of laboratory automation, a computer implemented software program product, a method of doing business, and a laboratory automation network.

    摘要翻译: 一种自动化实验室设备,包括对实验室样品执行操作的机构,调度器,其使机构根据编程过程处理实验室样品,检测由调度器控制的过程中发生的错误的逻辑,接受用户的逻辑 用于错误的定义错误处理例程,以及遇到错误时执行错误处理例程的逻辑。 还描述了本发明的实施例,其涉及实验室自动化系统,实验室自动化方法,计算机实现的软件程序产品,业务方法和实验室自动化网络。

    Systems and methods for analyzing facial expressions, identifying intent and transforming images through review of facial expressions
    10.
    发明授权
    Systems and methods for analyzing facial expressions, identifying intent and transforming images through review of facial expressions 有权
    用于分析面部表情的系统和方法,通过审视面部表情来识别意图和转换图像

    公开(公告)号:US08416988B2

    公开(公告)日:2013-04-09

    申请号:US12646211

    申请日:2009-12-23

    IPC分类号: G06K9/00 G08B29/00

    摘要: Methods of analyzing a plurality of facial expressions are disclosed that include: identifying a subject person, utilizing the subject person to create an image of a known target, removing at least one distracter expression from the target image to form a revised target image, and reviewing the revised target image with at least one third party participant to form a final target image. Additional methods of analyzing a plurality of facial expressions include: identifying a subject person, utilizing the subject person to create an image of a known target, digitizing the target image, removing at least one distracter expression from the target image to transform the target image to a revised target image, and reviewing the revised target image with at least one third party participant to transform the revised target image to a final target image. Software for implementing contemplated methods include: a set speed function, a pre-test phase function, an instruction phase function, a practice phase function, and a post-test phase function.

    摘要翻译: 公开了分析多个面部表情的方法,包括:识别对象人,利用对象人创建已知目标的图像,从目标图像中移除至少一个分离符表达以形成修订的目标图像,以及查看 修改的目标图像与至少一个第三方参与者形成最终目标图像。 分析多个面部表情的附加方法包括:识别被摄体人,利用对象人创建已知目标的图像,数字化目标图像,从目标图像中移除至少一个分离符表达,以将目标图像转换为 修改的目标图像,并且与至少一个第三方参与者一起检查修改的目标图像以将修正的目标图像变换为最终目标图像。 用于实现预期方法的软件包括:设定速度功能,预测相位功能,指令相位功能,练习相位功能和测试后相位功能。