公开(公告)号：US20100101495A1

公开(公告)日：2010-04-29

申请号：US12651512

申请日：2010-01-04

申请人： David Todd Emerson ,  Robert Allen Garner ,  Michael John Bergmann ,  Keenan Carlyle Brown ,  Michael Allen Pennington ,  Thomas Goldthwaite Coleman

发明人： David Todd Emerson ,  Robert Allen Garner ,  Michael John Bergmann ,  Keenan Carlyle Brown ,  Michael Allen Pennington ,  Thomas Goldthwaite Coleman

IPC分类号： C23C16/00 ,  H05B3/06 ,  H05B3/12

CPC分类号： C23C16/46 ,  C30B25/105 ,  H01L21/67103

摘要： A vapor deposition reactor and associated method are disclosed that increase the lifetime and productivity of a filament-based resistive-heated vapor deposition system. The reactor and method provide for heating the filament while permitting the filament to move as it expands under the effect of increasing temperature while limiting the expanding movement of the filament to an amount that prevents the expanding movement of the filament from creating undesired contact with any portions of the reactor.

摘要翻译： 公开了一种提高长丝基电阻加热气相沉积系统的寿​​命和生产率的气相沉积反应器和相关方法。 反应器和方法提供加热细丝，同时允许细丝在温度升高的作用下膨胀时移动，同时将长丝的膨胀运动限制到防止细丝的膨胀运动与任何部分产生不期望的接触的量 的反应器。

公开(公告)号：US08888917B2

公开(公告)日：2014-11-18

申请号：US12651512

申请日：2010-01-04

申请人： David Todd Emerson ,  Robert Allen Garner ,  Michael John Bergmann ,  Keenan Carlyle Brown ,  Michael Allen Pennington ,  Thomas Goldthwaite Coleman

发明人： David Todd Emerson ,  Robert Allen Garner ,  Michael John Bergmann ,  Keenan Carlyle Brown ,  Michael Allen Pennington ,  Thomas Goldthwaite Coleman

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  C23C16/46 ,  C30B25/10 ,  H01L21/67

CPC分类号： C23C16/46 ,  C30B25/105 ,  H01L21/67103

摘要： A vapor deposition reactor and associated method are disclosed that increase the lifetime and productivity of a filament-based resistive-heated vapor deposition system. The reactor and method provide for heating the filament while permitting the filament to move as it expands under the effect of increasing temperature while limiting the expanding movement of the filament to an amount that prevents the expanding movement of the filament from creating undesired contact with any portions of the reactor.

摘要翻译： 公开了一种提高长丝基电阻加热气相沉积系统的寿​​命和生产率的气相沉积反应器和相关方法。 反应器和方法提供加热细丝，同时允许细丝在温度升高的作用下膨胀时移动，同时将长丝的膨胀运动限制到防止细丝的膨胀运动与任何部分产生不期望的接触的量 的反应器。

公开(公告)号：US07645342B2

公开(公告)日：2010-01-12

申请号：US11272909

申请日：2005-11-14

申请人： David Todd Emerson ,  Robert Allen Garner ,  Michael John Bergmann ,  Keenan Carlyle Brown ,  Michael Allen Pennington ,  Thomas Goldthwaite Coleman

发明人： David Todd Emerson ,  Robert Allen Garner ,  Michael John Bergmann ,  Keenan Carlyle Brown ,  Michael Allen Pennington ,  Thomas Goldthwaite Coleman

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/46 ,  C30B25/105 ,  H01L21/67103

摘要： A vapor deposition reactor and associated method are disclosed that increase the lifetime and productivity of a filament-based resistive-heated vapor deposition system. The reactor and method provide for heating the filament while permitting the filament to move as it expands under the effect of increasing temperature while limiting the expanding movement of the filament to an amount that prevents the expanding movement of the filament from creating undesired contact with any portions of the reactor.

摘要翻译： 公开了一种提高长丝基电阻加热气相沉积系统的寿​​命和生产率的气相沉积反应器和相关方法。 反应器和方法提供加热细丝，同时允许细丝在温度升高的作用下膨胀时移动，同时将长丝的膨胀运动限制到防止细丝的膨胀运动与任何部分产生不期望的接触的量 的反应器。