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1.发明申请METHOD OF POLISHING A METAL SURFACE OF A BARRIER DOOR OF A GATE VALVE USED IN A SEMICONDUCTOR CLUSTER TOOL ARCHITECTURE 有权在半导体集群工具架构中使用的门阀的栅栏门的金属表面抛光方法公开(公告)号：US20130199705A1
公开(公告)日：2013-08-08
申请号：US13482278
申请日：2012-05-29
申请人： Dean J. Larson , James A. Woodward
发明人： Dean J. Larson , James A. Woodward
IPC分类号： B32B38/10
CPC分类号： F16K51/02 , B24B15/00 , B24B29/00 , F16K3/0263
摘要： The method of preserving the anodized finish of a barrier door of a process module includes bonding a seal to a metal surface, anodizing the metal surface, and then using a CNC machine to polish the metal surface without damaging the seal. The metal surface is polished by traversing a polishing path along the metal surface with a polishing head maintaining frictional contact with the metal surface. The integrity of the seal is preserved by bounding the polishing head to skirt the edge of the seal by following the polishing path.
摘要翻译： 保持处理模块的隔离门的阳极氧化处理的方法包括将密封件接合到金属表面，阳极氧化金属表面，然后使用CNC机器抛光金属表面而不损坏密封件。 通过沿着金属表面横穿抛光路径抛光金属表面，抛光头与金属表面保持摩擦接触。 通过遵循抛光路径来限制抛光头以密封密封件的边缘来保持密封的完整性。
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2.发明授权Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture 有权在半导体集群工具架构中使用的闸阀的阻挡门的金属表面的抛光方法公开(公告)号：US09151408B2
公开(公告)日：2015-10-06
申请号：US13482278
申请日：2012-05-29
申请人： Dean J. Larson , James A. Woodward
发明人： Dean J. Larson , James A. Woodward
CPC分类号： F16K51/02 , B24B15/00 , B24B29/00 , F16K3/0263
摘要： The method of preserving the anodized finish of a barrier door of a process module includes bonding a seal to a metal surface, anodizing the metal surface, and then using a CNC machine to polish the metal surface without damaging the seal. The metal surface is polished by traversing a polishing path along the metal surface with a polishing head maintaining frictional contact with the metal surface. The integrity of the seal is preserved by bounding the polishing head to skirt the edge of the seal by following the polishing path.
摘要翻译： 保持处理模块的隔离门的阳极氧化处理的方法包括将密封件接合到金属表面，阳极氧化金属表面，然后使用CNC机器抛光金属表面而不损坏密封件。 通过沿着金属表面横穿抛光路径抛光金属表面，抛光头与金属表面保持摩擦接触。 通过遵循抛光路径来限制抛光头以密封密封件的边缘来保持密封的完整性。
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