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公开(公告)号：US06291908B1
公开(公告)日：2001-09-18
申请号：US09413402
申请日：1999-10-06
IPC分类号： H01H3514
CPC分类号： H01H1/0036 , H01H35/14 , Y10T307/74 , Y10T307/799
摘要： A micro-miniature switch apparatus (10) includes a substrate (12) having a surface (14) with first and second channels (16, 18) extending from the surface (14) into the substrate (12). The first and second channels (16, 18) are spaced apart from each other, with a channel axis (20) extending longitudinally through the first and second channels (16, 18). A body (68) that is movable relative to the substrate (12) includes two arms (70, 72). Each of the arms (70, 72) extends into one of the first and second channels (16, 18) to support the body (68) for movement relative to the substrate (12) between first and second electrical conditions of the switch apparatus (10).
摘要翻译： 微型开关装置（10）包括具有表面（14）的基板（12），其具有从表面（14）延伸到基板（12）中的第一和第二通道（16,18）。 第一和第二通道（16,18）彼此间隔开，通道轴线（20）纵向延伸穿过第一和第二通道（16,18）。 可相对于基板（12）移动的主体（68）包括两个臂（70,72）。 每个臂（70,72）延伸到第一和第二通道（16,18）中的一个中，以支撑主体（68）在开关装置的第一和第二电气条件之间相对于基板（12）移动 10）。
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公开(公告)号：US06365442B1
公开(公告)日：2002-04-02
申请号：US09679582
申请日：2000-10-04
IPC分类号： H01L2182
CPC分类号： B81C1/00396 , B81B2203/0315 , B81B2203/0338 , B81C2201/0107 , H01H1/0036 , H01H35/14 , H01H59/0009
摘要： A method of making a micro-miniature switch device (10), which has at least one member (68) movable relative to a substrate (12) upon which the device is provided, includes providing a layer of sacrificial non-photolithography material upon a stratum connected to the substrate. A template is provided via photolithographing step that uses a photoresist material upon a stratum connected to the substrate. A layer is provided to include at least a portion of the movable member. The photoresist material and the sacrificial non-photolithography material are removed using photoresist developer. Preferably, at least two photolithography process steps utilize a single photolithographic mask. Also preferably, substrate material is removed to create a recess and at least one channel into the substrate, wherein the channel intersects the recess. At least a portion of the movable member is provided at a location within the recess and at least a portion of the movable member is provided at a location within the channel.
摘要翻译： 一种制造微型开关装置（10）的方法，该微型开关装置（10）具有至少一个可相对于其上提供该装置的基板（12）移动的构件（68），包括在一个 层与基板连接。 通过光刻步骤提供模板，其在连接到衬底的层上使用光致抗蚀剂材料。 提供层以包括可移动构件的至少一部分。 使用光致抗蚀剂显影剂除去光致抗蚀剂材料和牺牲非光刻材料。 优选地，至少两个光刻工艺步骤使用单个光刻掩模。 还优选地，去除衬底材料以产生凹陷和至少一个通道进入衬底，其中沟道与凹部相交。 可移动部件的至少一部分设置在凹部内的位置处，并且可移动部件的至少一部分设置在通道内的位置处。
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公开(公告)号：US07403715B2
公开(公告)日：2008-07-22
申请号：US10639992
申请日：2003-08-13
CPC分类号： H04B10/801
摘要： A free space optical bus system and method are provided for connecting two units of circuitry across a free space gap. A first unit of circuitry includes a multiplexer that combines a plurality of bus signals to obtain an electronic combined signal and a laser that is driven by the electronic combined signal to transmit an optical signal. A second unit of circuitry is separated from the first unit of circuitry by a free space gap. The second unit of circuitry includes a photodetector that receives the optical signal and transforms it into an electronic composite signal and a demultiplexer that divides the composite signal into a plurality of constituent signals.
摘要翻译： 提供了一种自由空间光学总线系统和方法，用于跨自由空间间隙连接两个电路单元。 电路的第一单元包括组合多个总线信号以获得电子组合信号的多路复用器和由电子组合信号驱动以发射光信号的激光器。 电路的第二单元通过自由空间间隔与第一电路单元分离。 第二电路单元包括接收光信号并将其变换为电子复合信号的光电检测器，以及将复合信号分成多个构成信号的解复用器。
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公开(公告)号：US5710058A
公开(公告)日：1998-01-20
申请号：US552024
申请日：1995-11-02
IPC分类号： H01L21/331 , H01L29/08 , H01L29/737 , H01L21/203
CPC分类号： B82Y10/00 , H01L29/0817 , H01L29/66318 , H01L29/7371
摘要： A transistor according to the invention for simultaneously providing at least two current-voltage characteristics includes a base, a collector, and an emitter. At least one of the base, collector, and emitter includes a first layer grown using molecular beam epitaxy (MBE). The first layer includes a first strip having a first doping characteristic created using focused ion beam processing. A second strip has a second doping characteristic created by focused ion beam processing. A middle section of undoped material is located between the first and second strips. A resonant tunneling junction is grown on the first layer using MBE and includes a plurality of layers.
摘要翻译： 根据本发明的用于同时提供至少两个电流 - 电压特性的晶体管包括基极，集电极和发射极。 基极，集电极和发射极中的至少一个包括使用分子束外延（MBE）生长的第一层。 第一层包括具有由聚焦离子束处理产生的第一掺杂特性的第一条带。 第二条带具有通过聚焦离子束处理产生的第二掺杂特性。 未掺杂材料的中间部分位于第一和第二条带之间。 使用MBE在第一层上生长谐振隧道结，并且包括多个层。
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