公开(公告)号：US08859316B2

公开(公告)日：2014-10-14

申请号：US12825527

申请日：2010-06-29

申请人： Dechao Guo ,  Christian Lavoie ,  Christine Ouyang Qiqing ,  Yanning Sun ,  Zhen Zhang

发明人： Dechao Guo ,  Christian Lavoie ,  Christine Ouyang Qiqing ,  Yanning Sun ,  Zhen Zhang

IPC分类号： H01L21/00 ,  H01L29/06 ,  G01N27/414

CPC分类号： G01N27/4145 ,  G01N27/4146 ,  H01L29/0673

摘要： A Schottky junction silicon nanowire field-effect biosensor/molecule detector with a nanowire thickness of 10 nanometer or less and an aligned source/drain workfunction for increased sensitivity. The nanowire channel is coated with a surface treatment to which a molecule of interest absorbs, which modulates the conductivity of the channel between the Schottky junctions sufficiently to qualitatively and quantitatively measure the presence and amount of the molecule.

摘要翻译： 肖特基结的硅纳米线场效应生物传感器/分子检测器，纳米线厚度为10纳米或更小，并具有对准的源极/漏极功能，以提高灵敏度。 纳米线通道涂覆有目标分子吸收的表面处理，其可以充分调节肖特基结之间的通道的电导率以定性和定量地测量分子的存在和量。