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公开(公告)号：US20070068308A1
公开(公告)日：2007-03-29
申请号：US11233197
申请日：2005-09-22
Applicant: Dennis Greywall
Inventor： Dennis Greywall
IPC: G05G11/00
CPC classification number: G02B26/0841 , B81B3/004 , B81B2201/045 , B81B2203/058 , Y10T74/2036
Abstract: A rigid actuator arm is an appendage of a moveable drive plate that is coupled across at least one end of each of two deformable spring bars that are anchored at their opposite end to a support structure that keeps the end of the moveable drive plate that is not coupled to the to the deformable spring bars from touching the substrate. The moveable drive plate mates with an opposing fixed drive plate so that applying a potential difference between the moveable drive plate and the fixed drive plate causes the moveable drive plate to move toward the fixed drive plate with a rotation type motion. The rigid actuator arm likewise rotates about an axis that is through the point of attachment of the rigid actuator to the moveable drive plate. Consequently, the opposite end of the rigid actuator arm moves as well, with an amplification of the rotation motion.
Abstract translation: 刚性致动器臂是可移动驱动板的附件，其连接在两个可变形弹簧杆中的每一个的至少一端上，所述两个可变形弹簧杆的相对端固定在支撑结构上，所述支撑结构保持可移动驱动板的端部不是 耦合到可变形弹簧杆以接触基板。 可移动驱动板与相对的固定驱动板配合，使得可移动驱动板和固定驱动板之间施加电位差使得可动驱动板以旋转型运动朝向固定驱动板移动。 刚性致动器臂同样围绕通过刚性致动器的附接点到可移动驱动板的轴线旋转。 因此，刚性致动器臂的相对端也随着旋转运动的放大而移动。
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公开(公告)号：US20060220492A1
公开(公告)日：2006-10-05
申请号：US11095076
申请日：2005-03-31
Applicant: Dennis Greywall
Inventor： Dennis Greywall
CPC classification number: H02N1/008 , G02B26/0833
Abstract: A MEMS device having a movable plate supported on a substrate by a support structure that is hidden under the plate and yet which can be implemented to enable rotation of the plate with respect to the substrate about a rotation axis lying at the plate surface. As a result, the support structure does not take up any area within the plane of the plate, while enabling rotation of the plate, during which the plate does not substantially move sideways. The latter property reduces potential physical interference between neighboring plates in an arrayed MEMS device and enables implementation of a segmented mirror having relatively narrow gaps between adjacent segments and, thus, a relatively large fill factor, e.g., at least 98%.
Abstract translation: 一种MEMS器件，其具有通过隐藏在板下方的支撑结构支撑在基板上的可移动板，并且其可被实现为能够围绕位于板表面的旋转轴线相对于基板旋转板。 结果，支撑结构不会占据板的平面内的任何区域，同时能够使板的旋转不会基本上向侧面移动。 后一种性能降低了阵列MEMS器件中相邻板之间的潜在物理干扰，并且使得能够实现在相邻段之间具有相对较窄间隙的分段镜，并因此实现相对较大的填充因子，例如至少98％。
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公开(公告)号：US20060158484A1
公开(公告)日：2006-07-20
申请号：US11036264
申请日：2005-01-14
Applicant: Dennis Greywall
Inventor： Dennis Greywall
IPC: B41J2/05
Abstract: A MEMS device having a fixed-fixed flexible beam, which is adapted to produce mechanical movement in response to a change of a temperature gradient and is relatively insensitive to variations in ambient temperature. In one embodiment, the flexible beam is connected between two support structures affixed to a substrate such that thermal deformation causes the beam to produce a displacement of its middle portion, thereby generating motion of a structure connected to that portion. In one embodiment, the structure includes (i) a plate having an IR-absorbing layer, which can transfer heat from IR radiation to the flexible beam, and (ii) an electrode layer, which together with a stationary electrode attached to the substrate forms a variable capacitor. Changes in the capacitance of the variable capacitor can be detected and related to the temperature of the IR-absorbing layer and/or intensity of the IR radiation impinging upon that layer.
Abstract translation: 具有固定的柔性梁的MEMS装置，其适于响应于温度梯度的变化产生机械运动，并且对环境温度的变化相对不敏感。 在一个实施例中，柔性梁连接在固定到基板上的两个支撑结构之间，使得热变形导致梁产生其中间部分的位移，从而产生与该部分连接的结构的运动。 在一个实施例中，该结构包括（i）具有IR吸收层的板，其能够将热量从IR辐射传递到柔性梁，以及（ii）电极层，其与固定在基板上的固定电极一起形成 一个可变电容器。 可以检测可变电容器的电容的变化并且与IR吸收层的温度和/或照射在该层上的IR辐射的强度相关。
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公开(公告)号：US20050225835A1
公开(公告)日：2005-10-13
申请号：US11060870
申请日：2005-02-18
Applicant: David Bishop , Keith Goossen , Dennis Greywall , James Walker
Inventor： David Bishop , Keith Goossen , Dennis Greywall , James Walker
CPC classification number: G02B26/0825
Abstract: The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.
Abstract translation: 该规范描述了改进的移动防反射开关（MARS）器件结构，其大大消除了可移动膜上的电荷积累，并且减少了引起膜卷曲的应力。 改进的装置使用由单晶硅制成的可移动膜。
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公开(公告)号：US20050174624A1
公开(公告)日：2005-08-11
申请号：US10772847
申请日：2004-02-05
Applicant: Dennis Greywall
Inventor： Dennis Greywall
CPC classification number: G02B26/0841
Abstract: A MEMS device having a spring structure formed by two flexible beams attached between a substrate and a movable bar. When non-end sections of the beams are pulled in opposite directions, the beam ends attached to the movable bar pull that bar toward the substrate, thereby transforming in-plane motion of the non-end sections into out-of-plane motion of the movable bar. When the non-end sections are displaced symmetrically, the movable bar translates toward the substrate. Alternatively, when the non-end sections are displaced non-symmetrically, the movable bar rotates with respect to the substrate. In one embodiment, each flexible beam is attached to a comb-shaped portion of a motion actuator, which has two such portions, each portion interleaved with the other portion and adapted to move with respect to the substrate and that other portion. When a voltage differential is applied between the portions, they move substantially parallel to the substrate, thereby deforming the beams and translating/rotating the movable bar.
Abstract translation: 具有弹簧结构的MEMS装置，该弹性结构由附接在基板和可动杆之间的两个柔性梁形成。 当梁的非端部分被拉向相反方向时，附接到可移动杆的梁端将该杆拉向基板，从而将非端部分的平面内运动转变成平面内的运动 活动杆。 当非端部对称地移位时，可移动杆朝向基板平移。 或者，当非端部非对称地移位时，可移动杆相对于基板旋转。 在一个实施例中，每个柔性梁附接到运动致动器的梳状部分，其具有两个这样的部分，每个部分与另一部分交错并且适于相对于基板和另一部分移动。 当在这些部分之间施加电压差时，它们基本上平行于基板移动，从而使梁变形并平移/旋转可动杆。
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Patent Agency Ranking
公开(公告)号：US20050061969A1
公开(公告)日：2005-03-24
申请号：US10667937
申请日：2003-09-22
Applicant: Dennis Greywall
Inventor： Dennis Greywall
CPC classification number: G01J3/02 , G01J3/0202 , G01J3/0229 , G01J3/433 , G01N21/3504
Abstract: A portable spectrophotometric system for detecting one or more target substances. In a representative embodiment, a system of the invention has an optical grating, an array of photo-detectors, and a MEMS device having a movable plate positioned between the grating and the array. Light transmitted through a gaseous sample is dispersed by the grating and is imaged onto the movable plate, which has a plurality of openings corresponding to selected infrared absorption lines of the target substance. A small-amplitude oscillation is imparted onto the plate such that the openings periodically move in and out of alignment with the corresponding intensity features in the image, which modulates electrical signals generated by the corresponding photo-detectors. A lock-in signal processor analyzes the modulation pattern by comparing it to the pattern expected in the presence of the target substance. When a positive correlation between the patterns is established, the system warns the user about the presence of the target substance.
Abstract translation: 一种用于检测一种或多种目标物质的便携式分光光度测定系统。 在代表性实施例中，本发明的系统具有光栅，光电检测器阵列和具有位于光栅与阵列之间的可动板的MEMS器件。 通过气体样品透过的光被光栅分散，并被成像到具有对应于目标物质的所选红外吸收线的多个开口的可动板上。 小板振荡被施加到板上，使得开口周期性地移动到与图像中对应的强度特征对齐的位置上，该特征调制由相应光电检测器产生的电信号。 锁定信号处理器通过将调制模式与目标物质存在期望的模式进行比较来分析调制模式。 当建立模式之间的正相关性时，系统向用户警告目标物质的存在。
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公开(公告)号：US20070126300A1
公开(公告)日：2007-06-07
申请号：US11294952
申请日：2005-12-06
Applicant: Dennis Greywall
Inventor： Dennis Greywall
CPC classification number: H02K19/103 , H02K1/24 , H02K7/08 , H02K41/02 , H02K99/20 , Y10T29/49009
Abstract: A reluctance motor having a movable part that does not need a fixed mounting shaft in the motor's stationary part. In one embodiment, a motor of the invention has a stationary part that defines a cylindrical cavity into which a rotor is inserted, with an interior wall of the cavity covered by nonmagnetic lining. The stationary part has a plurality of stator poles, each defined by an electric coil having a magnetic core. The rotor has a spacer and a plurality of bearings, with each bearing at least partially confined between the spacer and the lining. The rotor is adapted to spin within the cavity in response to the excitation of one or more of the stator poles such that the bearings roll between the lining and the spacer. The motor can be implemented as a MEMS device, with the motor's stator being a substantially monolithic structure formed using a single substrate, which structure has a size on the order of 1 mm.
Abstract translation: 具有在电动机的静止部分中不需要固定的安装轴的可移动部件的磁阻电动机。 在一个实施例中，本发明的电动机具有限定一个圆柱形空腔的固定部分，转子被插入该圆柱形空腔中，空腔的内壁由非磁性衬里覆盖。 固定部分具有多个定子极，每个由具有磁芯的电线圈限定。 转子具有间隔件和多个轴承，每个轴承至少部分地限制在间隔件和衬里之间。 转子适于响应于一个或多个定子极的激励而在空腔内旋转，使得轴承在衬里和间隔件之间滚动。 电动机可以实现为MEMS装置，其中电动机的定子是使用单个衬底形成的基本上整体的结构，该结构具有大约1mm的尺寸。
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公开(公告)号：US20070058899A1
公开(公告)日：2007-03-15
申请号：US11225777
申请日：2005-09-13
Applicant: Dennis Greywall , Dan Marom
Inventor： Dennis Greywall , Dan Marom
IPC: G02B6/26
CPC classification number: G02B6/3516 , G02B6/12019 , G02B6/2931 , G02B6/29313 , G02B6/3548 , G02B6/356 , G02B6/3582 , G02B6/3586 , G02B6/3588
Abstract: A MEMS device that enables an optical subsystem (e.g., an optical switch) having an optical component optically coupled to the MEMS device via free space to achieve optical alignment between the optical component and the MEMS device without moving the optical component with respect to the stationary part of the MEMS device. In one embodiment, a MEMS device of the invention has a stationary part and a movable part movably connected to the stationary part. The movable part has a platform and a plurality of mirrors mounted on the platform, wherein (i) each mirror is adapted to move with respect to the platform independent of other mirrors and (ii) the platform is adapted to move with respect to the stationary part together with the mirrors.
Abstract translation: 一种MEMS器件，其能够使具有通过自由空间光学耦合到MEMS器件的光学部件的光学子系统（例如，光学开关）实现光学部件和MEMS器件之间的光学对准，而不使光学部件相对于静止 MEMS器件的一部分。 在一个实施例中，本发明的MEMS器件具有静止部分和可移动地连接到静止部分的可移动部分。 可移动部分具有安装在平台上的平台和多个反射镜，其中（i）每个反射镜适于相对于平台而独立于其它反射镜移动，以及（ii）平台适于相对于静止部件移动 与镜子一起。
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公开(公告)号：US20060228896A1
公开(公告)日：2006-10-12
申请号：US11095071
申请日：2005-03-31
Applicant: Dennis Greywall
Inventor： Dennis Greywall
IPC: H01L21/302 , H01L21/461
CPC classification number: B81C1/00404 , B81B2201/033
Abstract: A method of fabricating a device using a multi-layered wafer that has an embedded etch mask adapted to map a desired device structure onto an adjacent (poly)silicon layer. Due to the presence of the embedded mask, it becomes possible to delay the etching that forms the mapped structure in the (poly)silicon layer until a relatively late fabrication stage. As a result, flatness of the (poly)silicon layer is preserved for the deposition of any necessary over-layers, which substantially obviates the need for filling the voids created by the structure formation with silicon oxide.
Abstract translation: 一种使用具有适于将期望的器件结构映射到相邻（多）硅层上的嵌入式蚀刻掩模的多层晶片制造器件的方法。 由于嵌入式掩模的存在，可以延迟在（多）硅层中形成映射结构的蚀刻，直到相对较晚的制造阶段。 结果，保留了（多）硅层的平坦度，用于沉积任何必需的上层，这基本上消除了填充由氧化硅形成的结构形成的空隙的需要。
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公开(公告)号：US20060181273A1
公开(公告)日：2006-08-17
申请号：US11391538
申请日：2006-03-28
Applicant: Dennis Greywall , Bernard Yurke
Inventor： Dennis Greywall , Bernard Yurke
IPC: G01R33/02
CPC classification number: G01R33/0283 , G01R33/02 , G01R33/0286
Abstract: In one embodiment, an integrated magnetometer has a deformable, electrically conducting beam that is mounted on a substrate and adapted to oscillate with respect to the substrate. When the oscillating beam is exposed to a magnetic field, the magnetic field induces an oscillating electromotive force that generates an oscillating electrical signal along the beam. The magnetometer has a detection circuit that detects this oscillating electrical signal and, based on the results of this detection, determines the magnetic-field strength and/or the magnetic-field gradient.
Abstract translation: 在一个实施例中，集成磁力计具有可变形的导电梁，其安装在基板上并适于相对于基板振荡。 当振荡光束暴露于磁场时，磁场引起振荡电动势，其产生沿着光束的振荡电信号。 磁力计具有检测该振荡电信号的检测电路，并且基于该检测结果确定磁场强度和/或磁场梯度。
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