公开(公告)号：US06594006B1

公开(公告)日：2003-07-15

申请号：US09744122

申请日：2001-03-16

申请人： Dirk Muehlhoff ,  Guenther Rudolph ,  Stefan Schmidt ,  Gerhard Doering ,  Guenter Berthel ,  Thomas Hartmann

发明人： Dirk Muehlhoff ,  Guenther Rudolph ,  Stefan Schmidt ,  Gerhard Doering ,  Guenter Berthel ,  Thomas Hartmann

IPC分类号： G01B1126

CPC分类号： G05B19/402 ,  G05B2219/37558 ,  G05B2219/37563 ,  G05B2219/50028 ,  G05B2219/50133 ,  G05D3/12

摘要： A method and an arrangement for detecting the position of the plane XY of an object, which plane XY is to be scanned, and for its positioning in the focal plane X′Y′ of a laser scanner, preferably for a laser scanning microscope. According to the disclosure, it is provided in a method of the type described above that, after a rough orientation of the object carried out by placing on an object holder, a laser beam is directed successively in time to at least three different points P1, P2 . . . Pn located in the scan plane XY of the object and, in doing so, each of the reflections proceeding from the points P1, P2 . . . Pn is imaged on a position-sensitive detector, an actual position value is determined at the detector for each reflection and is compared with a stored reference position value, adjustment commands for changing the inclination of the object holder are obtained from the deviations of the actual position values from the reference position values, and the inclination of the object holder is changed on the basis of these adjustment commands until points P1, P2 . . . Pn are located in the focal plane X′Y′ of the laser scanner.

摘要翻译： 一种用于检测物体的平面XY的位置的方法和装置，该平面XY将被扫描平面XY，并且用于其定位在激光扫描仪的焦平面X'Y'中，优选地用于激光扫描显微镜。 根据本发明，提供了一种上述类型的方法，在通过放置在物体保持器上进行物体的粗略取向之后，将激光束在时间上连续地指向至少三个不同点P1， P2。 。 。 Pn位于物体的扫描平面XY中，并且在这样做时，每个反射从点P1，P2进行。 。 。 Pn在位置敏感检测器上成像，在检测器处为每次反射确定实际位置值，并与存储的参考位置值进行比较，从实际的偏差获得用于改变物体保持器的倾斜度的调节命令 基准位置值的位置值，并且基于这些调整指令改变对象保持器的倾斜直到点P1，P2。 。 。 Pn位于激光扫描器的焦平面X'Y'中。

公开(公告)号：US07102799B2

公开(公告)日：2006-09-05

申请号：US10110386

申请日：2001-08-07

申请人： Thomas Hartmann ,  Gerhard Doering

发明人： Thomas Hartmann ,  Gerhard Doering

IPC分类号： H04N1/04

CPC分类号： G06T5/006

摘要： In a method for electronic image rectification in pixel-by-pixel scanning of a substrate by a bundled electromagnetic beam, the pixels are read out one after the other in readout intervals of constant predetermined duration. In order to improve image quality, the deviation between a reference scanning movement and an actual scanning movement carried out on the reference substrate is initially determined in a calibration process, for example, by a reference substrate with a known geometric surface structure. Depending on this deviation, a delay interval is determined for a pixel and the start of the readout interval of this pixel or of the subsequent pixel is delayed by this delay interval. The information about the delay interval is stored. In an analysis process for examining a substrate, the stored information about the delay interval is accessed for the pixel, and the delay interval is added before or after the readout interval.

摘要翻译： 在通过捆扎电磁波束对基板进行像素像素扫描的电子图像整流方法中，像素以恒定的预定持续时间的读出间隔一个接一个读出。 为了提高图像质量，参考扫描运动和在参考基板上执行的实际扫描运动之间的偏差最初在校准过程中确定，例如通过具有已知几何表面结构的参考基板。 根据该偏差，确定像素的延迟间隔，并且该像素或后续像素的读出间隔的开始被延迟该延迟间隔。 存储有关延迟时间间隔的信息。 在用于检查基板的分析处理中，存储关于像素的关于延迟间隔的存储信息，并且在读出间隔之前或之后添加延迟间隔。

公开(公告)号：US20070159677A1

公开(公告)日：2007-07-12

申请号：US10586888

申请日：2005-02-17

申请人： Gerhard Doering ,  Tobias Kaufhold

发明人： Gerhard Doering ,  Tobias Kaufhold

IPC分类号： G02B26/02

CPC分类号： G02B26/02 ,  G02B21/06

摘要： The present invention is directed to a motor-operated optical shutter for opening and closing the illumination beam path in optical devices. The optical shutter, according to the invention, for the illumination beam path in optical devices comprises a mounting unit which is provided with a diaphragm aperture, a stepper motor which is mounted at the mounting unit, and a shutter element which is connected to the motor shaft of the stepper motor for opening and closing the diaphragm aperture. A two-phase stepper motor with a large full step angle is preferably used. The two-phase stepper motor is connected to a control unit and carries out the required movement of the shutter element at a short distance from the motor shaft. The solution according to the invention provides a very economical and simple optical shutter for optical devices. The commercially available stepper motors that are used have a greater numbers of poles and a fully enclosed magnet air gap field and enable short closing and opening times of the optical shutter. With these stepper motors, the usual disadvantage of a relatively costly control can be eliminated by a simple control method.

摘要翻译： 本发明涉及一种用于在光学装置中打开和关闭照明光束路径的电动光学快门。 根据本发明的光学快门用于光学装置中的照明光束路径包括安装单元，其设置有光阑孔，安装在安装单元处的步进电机和连接到电动机的快门元件 用于打开和关闭隔膜孔的步进电机的轴。 优选使用具有大的全步进角的两相步进电动机。 两相步进电机连接到控制单元，并且在电动机轴的短距离处执行快门元件所需的运动。 根据本发明的解决方案为光学器件提供了非常经济且简单的光学快门。 所使用的市售步进电机具有更大数量的磁极和完全封闭的磁体气隙磁场，并且能够实现光学快门的短的闭合和打开时间。 对于这些步进电机，通过简单的控制方法可以消除相对昂贵的控制的通常缺点。

公开(公告)号：US06204965B1

公开(公告)日：2001-03-20

申请号：US09309221

申请日：1999-05-10

申请人： Gerhard Doering ,  Matthias John ,  Rolf-Gero Rau

发明人： Gerhard Doering ,  Matthias John ,  Rolf-Gero Rau

IPC分类号： G02B2126

CPC分类号： G02B21/26

摘要： A microscope is disclosed with a stage which is adjustable in coordinates X, Y and/or Z, with a drive for stage adjustment and with a control circuit for presetting different adjusting speeds. In a microscope of the type mentioned above, a device is provided for showing the given adjusting speed during the adjustment of the stage in at least one of coordinates X, Y, Z. Therefore, it is advantageously possible during the adjustment and/or programming of the microscope to visually perceive the adjusting speed or to display speed gradations which are not otherwise detectable in the eyepiece.

摘要翻译： 公开了一种显示器，其具有可在坐标X，Y和/或Z中调节的平台，具有用于舞台调节的驱动器以及用于预设不同调节速度的控制电路。 在上述类型的显微镜中，提供了一种装置，用于在坐标X，Y，Z中的至少一个中调节舞台期间显示给定的调节速度。因此，有利的是在调整和/或编程期间有可能 的显微镜以目视感知调节速度或显示在目镜中无法检测到的速度等级。