公开(公告)号：US09164278B2

公开(公告)日：2015-10-20

申请号：US13461387

申请日：2012-05-01

申请人： Dong-sik Shim ,  Jong-seok Kim ,  Yong-seop Yoon ,  Hyung Choi ,  Woon-bae Kim

发明人： Dong-sik Shim ,  Jong-seok Kim ,  Yong-seop Yoon ,  Hyung Choi ,  Woon-bae Kim

IPC分类号： G02B26/02 ,  G02B26/08

CPC分类号： G02B26/0841

摘要： A micro-optical switching device, an image display apparatus including the micro-optical switching device, and a method of manufacturing the micro-optical switching device are provided. The micro-optical switching device includes a substrate; a first electrode disposed on the substrate and including a first opening array, wherein the first opening array includes a plurality of openings; and a second electrode disposed spaced apart from the first electrode and including a second opening array including a plurality of openings, wherein the plurality of openings of the second opening array do not overlap with the plurality of openings of the first opening array.

摘要翻译： 提供一种微型光开关装置，包括该微型光开关装置的图像显示装置以及该微型光开关装置的制造方法。 微光开关装置包括：基板; 第一电极，其设置在所述基板上并且包括第一开口阵列，其中所述第一开口阵列包括多个开口; 以及第二电极，与第一电极间隔开并且包括包括多个开口的第二开口阵列，其中第二开口阵列的多个开口不与第一开口阵列的多个开口重叠。

公开(公告)号：US20100051580A1

公开(公告)日：2010-03-04

申请号：US12428808

申请日：2009-04-23

申请人： Jong-Seok Kim ,  Yong-Seop Yoon ,  Moon-Chul Lee ,  Yong-Won Jeong ,  Dong-Sik Shim ,  Hyung Choi

发明人： Jong-Seok Kim ,  Yong-Seop Yoon ,  Moon-Chul Lee ,  Yong-Won Jeong ,  Dong-Sik Shim ,  Hyung Choi

IPC分类号： B44C1/22 ,  B41J2/015

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1639

摘要： A method of manufacturing an inkjet printhead includes forming a chamber layer having multiple ink chambers on a substrate. A sacrificial layer is formed and is configured to fill a space associated with the ink chambers on the chamber layer. A nozzle layer is formed on the top surfaces of the chamber layer and the sacrificial layer and having multiple nozzles. An etching mask is prepared on the bottom surface of the substrate. The etching mask has at least one linear etching pattern configured to define a portion of the substrate in which an ink feed hole is to be formed. The substrate is etched through the linear etching pattern until the sacrificial layer is exposed and a through hole is formed. The through hole defines the portion of the substrate in which the ink feed hole is to be formed. The sacrificial layer and the portion of the substrate surrounded by the through hole are removed to form the ink feed hole.

摘要翻译： 制造喷墨打印头的方法包括在基板上形成具有多个墨室的腔层。 牺牲层被形成并被配置成填充与腔室层上的墨水室相关联的空间。 喷嘴层形成在腔室层和牺牲层的顶表面上并且具有多个喷嘴。 在基板的底表面上制备蚀刻掩模。 蚀刻掩模具有至少一个线性蚀刻图案，其被配置为限定要在其中形成供墨孔的基板的一部分。 通过线性蚀刻图案蚀刻衬底，直到牺牲层被暴露并形成通孔。 通孔限定要在其中形成供墨孔的基板部分。 牺牲层和由通孔包围的基板的部分被去除以形成供墨孔。

公开(公告)号：US08216482B2

公开(公告)日：2012-07-10

申请号：US12428808

申请日：2009-04-23

申请人： Jong-Seok Kim ,  Yong-Seop Yoon ,  Moon-Chul Lee ,  Yong-Won Jeong ,  Dong-Sik Shim ,  Hyung Choi

发明人： Jong-Seok Kim ,  Yong-Seop Yoon ,  Moon-Chul Lee ,  Yong-Won Jeong ,  Dong-Sik Shim ,  Hyung Choi

IPC分类号： G01D15/00 ,  G11B5/127 ,  C23F1/00 ,  H01L21/00 ,  H01L21/311

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1639

摘要： A method of manufacturing an inkjet printhead includes forming a chamber layer having multiple ink chambers on a substrate. A sacrificial layer is formed and is configured to fill a space associated with the ink chambers on the chamber layer. A nozzle layer is formed on the top surfaces of the chamber layer and the sacrificial layer and having multiple nozzles. An etching mask is prepared on the bottom surface of the substrate. The etching mask has at least one linear etching pattern configured to define a portion of the substrate in which an ink feed hole is to be formed. The substrate is etched through the linear etching pattern until the sacrificial layer is exposed and a through hole is formed. The through hole defines the portion of the substrate in which the ink feed hole is to be formed. The sacrificial layer and the portion of the substrate surrounded by the through hole are removed to form the ink feed hole.

摘要翻译： 制造喷墨打印头的方法包括在基板上形成具有多个墨室的腔层。 牺牲层被形成并被配置成填充与腔室层上的墨水室相关联的空间。 喷嘴层形成在腔室层和牺牲层的顶表面上并且具有多个喷嘴。 在基板的底表面上制备蚀刻掩模。 蚀刻掩模具有至少一个线性蚀刻图案，其被配置为限定要在其中形成供墨孔的基板的一部分。 通过线性蚀刻图案蚀刻衬底，直到牺牲层被暴露并形成通孔。 通孔限定要在其中形成供墨孔的基板部分。 牺牲层和由通孔包围的基板的部分被去除以形成供墨孔。

公开(公告)号：US08419158B2

公开(公告)日：2013-04-16

申请号：US12139652

申请日：2008-06-16

申请人： Yong-won Jeong ,  Hyung Choi ,  Eun-bong Han ,  Yong-seop Yoon ,  Moon-chul Lee ,  Dong-sik Shim

发明人： Yong-won Jeong ,  Hyung Choi ,  Eun-bong Han ,  Yong-seop Yoon ,  Moon-chul Lee ,  Dong-sik Shim

IPC分类号： B41J29/393

CPC分类号： B41J2/04586 ,  B41J2/0454 ,  B41J2/04563

摘要： An apparatus to sense the temperature of an ink-jet head includes at least one or more CMOS (complementary metal oxide semiconductor) lateral BJTs (bipolar junction transistors) to sense the temperature of the ink-jet head, and a current supply unit to supply a current to the CMOS lateral BJTs. Minimum sized CMOS lateral BJTs are applied to an ink-jet printer head so that precise temperature control can be performed in a shuttle or array type ink-jet printer.

摘要翻译： 感测喷墨头的温度的装置包括至少一个或多个CMOS（互补金属氧化物半导体）横向BJT（双极结型晶体管），以感测喷墨头的温度，以及电流供应单元 电流到CMOS侧向BJT。 将最小尺寸的CMOS侧向BJT施加到喷墨打印机头，使得可以在梭式或阵列式喷墨打印机中进行精确的温度控制。

公开(公告)号：US20090141083A1

公开(公告)日：2009-06-04

申请号：US12114982

申请日：2008-05-05

申请人： Dong-sik SHIM ,  Yong-seop Yoon ,  Moon-chul Lee ,  Yong-won Jeong ,  Hyung Choi

发明人： Dong-sik SHIM ,  Yong-seop Yoon ,  Moon-chul Lee ,  Yong-won Jeong ,  Hyung Choi

IPC分类号： B41J2/16 ,  H01L21/00

CPC分类号： B41J2/14129 ,  B41J2/1603 ,  B41J2/1626 ,  B41J2/1639 ,  B41J2002/14387

摘要： An inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a silicon on insulator (SOI) substrate including a lower silicon substrate, a middle insulating layer, an upper silicon substrate, and an ink feed hole, the ink feed hole penetrates the SOI substrate to supply ink, an insulating layer stacked on the upper silicon substrate of the SOI substrate, a chamber layer stacked on the insulating layer in which a plurality of ink chambers filled with ink supplied from the ink feed hole is formed, a nozzle layer stacked on the chamber layer in which a plurality of nozzles is formed to correspond to the ink chambers, a plurality of heaters formed on the insulating layer which heats ink in the ink chambers to generate bubbles and eject ink through the nozzles, and a driving circuit region on which a driving circuit is formed to drive the heaters.

摘要翻译： 喷墨打印头及其制造方法。 喷墨打印头包括具有下硅衬底，中间绝缘层，上硅衬底和供墨孔的绝缘体上硅（SOI）衬底，所述供墨孔穿透所述SOI衬底以供应墨，绝缘层堆叠 在SOI衬底的上硅衬底上形成层叠在绝缘层上的室层，其中形成有从供墨孔供应的油墨的多个油墨室，堆叠在室层上的喷嘴层，其中多个 喷嘴形成为对应于墨室，形成在绝缘层上的多个加热器，其加热墨室中的墨以产生气泡并通过喷嘴喷射墨;以及驱动电路区域，驱动电路形成在其上以驱动 加热器。

公开(公告)号：US20070126772A1

公开(公告)日：2007-06-07

申请号：US11453012

申请日：2006-06-15

申请人： Dong-sik Shim ,  Hyung Choi ,  Yong-seop Yoon

发明人： Dong-sik Shim ,  Hyung Choi ,  Yong-seop Yoon

IPC分类号： B41J2/015

CPC分类号： B41J2/1603 ,  B41J2/1626 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1643

摘要： A method of fabricating inkjet print heads usable in an ink jet printer. The method of fabricating ink jet print heads includes preparing a plurality of ink jet print heads on a wafer while forming sub sidewalls around the ink jet print heads when the ink jet print heads are being prepared, attaching protection films onto the sub sidewalls of the wafer and the ink jet print heads, and dicing the ink jet print heads and detaching the individual ink jet print heads from the wafer. In the method, the ink jet print heads are diced in a wafer unit. Particularly, connect pads of the ink jet print heads can be prevented from being contaminated by the protection films.

摘要翻译： 一种制造可用于喷墨打印机的喷墨打印头的方法。 制造喷墨打印头的方法包括：当准备喷墨打印头时，在晶片上准备多个喷墨打印头，同时在喷墨打印头周围形成副侧壁，将保护膜附着在晶片的子侧壁上 和喷墨打印头，并且对喷墨打印头进行切割并将各个喷墨打印头从晶片上分离出来。 在该方法中，喷墨打印头在晶片单元中切割。 特别地，可以防止喷墨打印头的连接垫被保护膜污染。

公开(公告)号：US07758168B2

公开(公告)日：2010-07-20

申请号：US11653371

申请日：2007-01-16

申请人： Moon-chul Lee ,  Dong-sik Shim ,  Hyung Choi ,  Yong-seop Yoon

发明人： Moon-chul Lee ,  Dong-sik Shim ,  Hyung Choi ,  Yong-seop Yoon

IPC分类号： B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1639

摘要： An inkjet printhead and a method of manufacturing the inkjet printhead. The inkjet printhead includes a substrate including a trench formed to a predetermined depth in an upper portion of the substrate and an ink feed hole formed through a bottom surface of the trench to supply ink, an etch stop layer formed of a metal and formed on an inner surface of the trench, a plurality of heaters, to create bubbles by heating ink, formed on the substrate, a plurality of electrodes, to apply a current to the plurality of heaters, formed on the substrate, a chamber layer stacked on the substrate and including a plurality of ink chambers formed above respective heaters to receive ink from the ink feed hole via the trench, and a nozzle layer stacked on the chamber layer and including a plurality of nozzles to eject ink from the plurality of ink chambers.

摘要翻译： 喷墨打印头和制造喷墨打印头的方法。 喷墨打印头包括基板，该基板包括在基板的上部形成为预定深度的沟槽，以及通过沟槽的底表面形成供墨的供墨孔，由金属形成的蚀刻停止层， 沟槽的内表面，多个加热器，通过加热形成在基板上的油墨产生气泡，多个电极，以形成在基板上的多个加热器施加电流，堆叠在基板上的室层 并且包括形成在各个加热器上方的多个墨室，以经由所述沟槽从所述供墨孔接收墨;以及喷嘴层，其堆叠在所述腔室层上并且包括多个喷嘴以从所述多个墨室喷射墨。

公开(公告)号：US20090001048A1

公开(公告)日：2009-01-01

申请号：US11935063

申请日：2007-11-05

申请人： Yong-seop YOON ,  Hyung Choi ,  Moon-chul Lee ,  Yong-won Jeong ,  Dong-sik Shim

发明人： Yong-seop YOON ,  Hyung Choi ,  Moon-chul Lee ,  Yong-won Jeong ,  Dong-sik Shim

IPC分类号： G11B5/127

CPC分类号： B41J2/1404 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639

摘要： A method of manufacturing an inkjet printhead includes forming a chamber layer, in which a plurality of ink chambers is formed, on a substrate, forming trench to define an island surrounded by the trench on an upper part of the substrate by etching an upper surface of the substrate to a predetermined depth, forming a sacrifice layer on the chamber layer to fill the trenches and the ink chambers, forming a nozzle layer, in which a plurality of nozzles are formed, on the sacrifice layer and the chamber layer, forming an ink feed hole by etching a lower part of the substrate until the sacrifice layer that is filled in the trench is exposed, and removing the sacrifice layer and the island.

摘要翻译： 一种制造喷墨打印头的方法包括在衬底上形成一个腔层，其中形成有多个墨腔，形成沟槽，以在衬底的上部上刻蚀出由沟槽围绕的岛， 将所述基板设置到预定深度，在所述室层上形成牺牲层以填充所述沟槽和所述墨室，在所述牺牲层和所述室层上形成其中形成有多个喷嘴的喷嘴层，形成墨 通过蚀刻衬底的下部直到被填充在沟槽中的牺牲层被暴露并且去除牺牲层和岛，来进给孔。

公开(公告)号：US20080128386A1

公开(公告)日：2008-06-05

申请号：US11838347

申请日：2007-08-14

申请人： Yong-seop YOON ,  Hyung Choi ,  Moon-chul Lee ,  Yong-won Jeong ,  Dong-sik Shim

发明人： Yong-seop YOON ,  Hyung Choi ,  Moon-chul Lee ,  Yong-won Jeong ,  Dong-sik Shim

IPC分类号： G11B5/127

CPC分类号： B41J2/14129 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1639

摘要： A method of manufacturing an inkjet printhead includes forming an insulating layer, heaters, and electrodes sequentially on a substrate, depositing a chamber layer having a plurality of ink chambers on the insulating layer, forming an ink feed hole in the substrate and the insulating layer to supply ink to the ink chambers, preparing a nozzle layer having a plurality of nozzles and an adhesive layer formed on a lower surface of the nozzle layer, and bonding the nozzle layer to the chamber layer.

摘要翻译： 一种喷墨打印头的制造方法，包括在基板上依次形成绝缘层，加热器和电极，在绝缘层上淀积具有多个墨室的腔室层，在基板和绝缘层上形成墨水供给孔 向油墨室供给油墨，制备具有多个喷嘴的喷嘴层和形成在喷嘴层的下表面上的粘合层，并将喷嘴层粘合到室层。

公开(公告)号：US20080106578A1

公开(公告)日：2008-05-08

申请号：US11742816

申请日：2007-05-01

申请人： Dong-sik SHIM ,  Yong-seop Yoon ,  Moon-chul Lee ,  Yong-won Jeong ,  Hyung Choi

发明人： Dong-sik SHIM ,  Yong-seop Yoon ,  Moon-chul Lee ,  Yong-won Jeong ,  Hyung Choi

IPC分类号： B41J2/05

CPC分类号： B41J2/14129 ,  B41J2/14072

摘要： A thermal inkjet printhead includes a plurality of bonding pads to which an external voltage is applied, a plurality of common wires connected to the each of the bonding pads, respectively, a plurality of individual wires connected to each of the common wires, respectively, and heaters connected to each of the individual wires, respectively, to generate ink bubbles by heating ink, wherein each of the common wires includes a first metal layer and a first metal bump which are formed on the first metal layer.

摘要翻译： 热喷墨打印头包括分别施加有外部电压的多个接合焊盘，分别连接到每个接合焊盘的多个公共电线，分别连接到每个公共电线的多个单独电线，以及 加热器分别连接到各个电线，以通过加热墨水来产生墨水气泡，其中每个公共电线包括形成在第一金属层上的第一金属层和第一金属凸块。