Method and Apparatus for Providing Temperature Control to a Cryopump
    1.
    发明申请
    Method and Apparatus for Providing Temperature Control to a Cryopump 审中-公开
    用于向冷冻器提供温度控制的方法和装置

    公开(公告)号:US20110162391A1

    公开(公告)日:2011-07-07

    申请号:US12981806

    申请日:2010-12-30

    IPC分类号: B01D8/00

    CPC分类号: F04B37/08 B01D8/00 F04B37/085

    摘要: Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a second function of structural support within the cryopump. Temperature control may further be achieved via the radiation shield, where the radiation shield includes a clad sheeting or coating.

    摘要翻译: 使用用于温度控制的薄层加热元件或作为加热器来改进冷冻组件。 这些加热元件可以被定位并且在再生期间防止汇集。 也可以通过使用陶瓷加热元件来实现温度控制。 陶瓷加热元件还可包括低温泵内结构支撑的第二功能。 可以通过辐射屏蔽进一步实现温度控制,其中辐射屏蔽包括包层片或涂层。

    Helium Management Control System
    2.
    发明申请
    Helium Management Control System 审中-公开
    氦管理控制系统

    公开(公告)号:US20140130527A1

    公开(公告)日:2014-05-15

    申请号:US14001803

    申请日:2012-03-05

    IPC分类号: F25B49/02

    摘要: A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.

    摘要翻译: 制冷剂管理系统控制从两个或多个可变速度和固定速度的压缩机向多个低温冰箱供应制冷剂。 该系统采用多个传感器来监测和调节整个制冷剂供应,以向每个低温冰箱输送适当的制冷剂供应。 供应的制冷剂量是基于来自多个低温冰箱的制冷剂的总需求和制冷剂校正度量。 通过调节可变速度压缩机的速度或者选择性地使压缩机打开或关闭来分配适当的制冷剂供应给每个低温冰箱。 通过确定向多个低温冰箱供应的制冷剂的量来调节变速压缩机的速度。 如果对制冷剂的总需求超过压缩机的容量,则调节多个冰箱内的冰箱的速度。

    Cryogenic refrigerator with corner seal
    5.
    发明授权
    Cryogenic refrigerator with corner seal 失效
    低密度冰箱与角密封

    公开(公告)号:US5036670A

    公开(公告)日:1991-08-06

    申请号:US466974

    申请日:1990-01-18

    申请人: Ronald N. Morris

    发明人: Ronald N. Morris

    IPC分类号: F25B9/14

    CPC分类号: F25B9/14

    摘要: In a cryogenic refrigerator, a displacer 12 and its drive piston 28 are guided by a displacer guide 32 seated within an expander body 16. An expander cap 40 enclosing a spring volume 38 extends within the expander body 16 and abuts the displacer guide 32. An indium seal 50 is positioned in the chamfer at the intersection of the cap, body and guide.

    摘要翻译: 在低温冰箱中,置换器12及其驱动活塞28由位于膨胀机本体16内的置换器引导件32引导。包围弹簧体积38的膨胀盖40在膨胀机主体16内延伸并邻接置换引导件32。 铟密封件50位于盖,主体和引导件相交处的倒角中。

    Linear drive cryogenic refrigerator
    8.
    发明授权
    Linear drive cryogenic refrigerator 有权
    线性驱动低温冰箱

    公开(公告)号:US08413452B2

    公开(公告)日:2013-04-09

    申请号:US12950080

    申请日:2010-11-19

    IPC分类号: F25B9/00

    摘要: A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.

    摘要翻译: 低温冰箱具有制冷缸和至少两个置换器。 每个置换器在制冷气瓶中往复运动,并使制冷气体通过制冷气瓶。 再生器冷却制冷气体,气体控制阀将制冷气瓶内的高压气体和来自制冷气瓶的废气进入。 冰箱还具有可操作地连接到置换器的线性电动机,并且线性电动机以往复运动驱动置换器。 提供位置传感器以在往复运动期间确定置换器的参数。 控制器可操作地连接到线性电动机以控制线性电动机。 控制器在往复运动期间控制两个置换器的参数。 该参数可以是用于低温冰箱的温度控制的置换器的行程长度,行程速度,冲程相位或另一参数。 低温冰箱还可以包括消除振动的装置。

    Linear Drive Cryogenic Refrigerator
    9.
    发明申请
    Linear Drive Cryogenic Refrigerator 有权
    线性驱动低温冰箱

    公开(公告)号:US20110126554A1

    公开(公告)日:2011-06-02

    申请号:US12950080

    申请日:2010-11-19

    IPC分类号: F25B9/00

    摘要: A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.

    摘要翻译: 低温冰箱具有制冷缸和至少两个置换器。 每个置换器在制冷气瓶中往复运动,并使制冷气体通过制冷气瓶。 再生器冷却制冷气体,气体控制阀将制冷气瓶内的高压气体和来自制冷气瓶的废气进入。 冰箱还具有可操作地连接到置换器的线性电动机,并且线性电动机以往复运动驱动置换器。 提供位置传感器以在往复运动期间确定置换器的参数。 控制器可操作地连接到线性电动机以控制线性电动机。 控制器在往复运动期间控制两个置换器的参数。 该参数可以是用于低温冰箱的温度控制的置换器的行程长度,行程速度,冲程相位或另一参数。 低温冰箱还可以包括消除振动的装置。

    Cryogenic refrigerator with a gaseous contaminant removal system
    10.
    发明授权
    Cryogenic refrigerator with a gaseous contaminant removal system 失效
    具有气态污染物去除系统的低温冰箱

    公开(公告)号:US06216467B1

    公开(公告)日:2001-04-17

    申请号:US09187380

    申请日:1998-11-06

    IPC分类号: F25B900

    摘要: A cryogenic refrigerator includes a shell having a reciprocative displacer and an adsorbent mounted within the shell. In one embodiment, the displacer contains both a regenerative media and the adsorbent, with the regenerative media placed between the adsorbent and a cold end of the displacer. In a method for removing contaminants from the reciprocative displacer, compressed and expanded helium gas is displaced through the displacer, with the adsorbent positioned to adsorb contaminant gases entrained in the helium gas. In another method, a filtering refrigerator containing an adsorbent is coupled to a helium circuit of a refrigeration system to remove contaminants from the circuit.

    摘要翻译: 低温冰箱包括具有往复式置换器和安装在壳体内的吸附剂的壳体。 在一个实施例中,置换器包含再生介质和吸附剂,再生介质置于吸附剂和置换器的冷端之间。 在从往复式置换器去除污染物的方法中,压缩和膨胀的氦气通过置换器移动,吸附剂定位成吸附夹带在氦气中的污染气体。 在另一种方法中,含有吸附剂的过滤冰箱与制冷系统的氦气回路连接,以从电路中除去污染物。