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1.发明申请公开(公告)号：US20110162391A1
公开(公告)日：2011-07-07
申请号：US12981806
申请日：2010-12-30
IPC分类号： B01D8/00
CPC分类号： F04B37/08 , B01D8/00 , F04B37/085
摘要： Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a second function of structural support within the cryopump. Temperature control may further be achieved via the radiation shield, where the radiation shield includes a clad sheeting or coating.
摘要翻译： 使用用于温度控制的薄层加热元件或作为加热器来改进冷冻组件。 这些加热元件可以被定位并且在再生期间防止汇集。 也可以通过使用陶瓷加热元件来实现温度控制。 陶瓷加热元件还可包括低温泵内结构支撑的第二功能。 可以通过辐射屏蔽进一步实现温度控制，其中辐射屏蔽包括包层片或涂层。
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公开(公告)号：US20140130527A1
公开(公告)日：2014-05-15
申请号：US14001803
申请日：2012-03-05
申请人： Oliver J. Dumas , Maureen C. Buonpane , Doreen J. Ball-DiFazio , Ronald N. Morris , Allen J. Bartlett , Leonard A. Loranger , Joseph Chopy, JR. , Robert P. Sullivan , John J. Varone , Paul E. Amundsen
发明人： Oliver J. Dumas , Maureen C. Buonpane , Doreen J. Ball-DiFazio , Ronald N. Morris , Allen J. Bartlett , Leonard A. Loranger , Joseph Chopy, JR. , Robert P. Sullivan , John J. Varone , Paul E. Amundsen
IPC分类号： F25B49/02
CPC分类号： F25B49/022 , A01N63/02 , G01N33/5085
摘要： A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.
摘要翻译： 制冷剂管理系统控制从两个或多个可变速度和固定速度的压缩机向多个低温冰箱供应制冷剂。 该系统采用多个传感器来监测和调节整个制冷剂供应，以向每个低温冰箱输送适当的制冷剂供应。 供应的制冷剂量是基于来自多个低温冰箱的制冷剂的总需求和制冷剂校正度量。 通过调节可变速度压缩机的速度或者选择性地使压缩机打开或关闭来分配适当的制冷剂供应给每个低温冰箱。 通过确定向多个低温冰箱供应的制冷剂的量来调节变速压缩机的速度。 如果对制冷剂的总需求超过压缩机的容量，则调节多个冰箱内的冰箱的速度。
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公开(公告)号：US10113781B2
公开(公告)日：2018-10-30
申请号：US14001803
申请日：2012-03-05
申请人： Oliver J. Dumas , Maureen C. Buonpane , Doreen J. Ball-DiFazio , Ronald N. Morris , Allen J. Bartlett , Leonard A. Loranger , Joseph Chopy, Jr. , Robert P. Sullivan , John J. Varone , Paul E. Amundsen
发明人： Oliver J. Dumas , Maureen C. Buonpane , Doreen J. Ball-DiFazio , Ronald N. Morris , Allen J. Bartlett , Leonard A. Loranger , Joseph Chopy, Jr. , Robert P. Sullivan , John J. Varone , Paul E. Amundsen
摘要： A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.
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公开(公告)号：US10760562B2
公开(公告)日：2020-09-01
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
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公开(公告)号：US20080168778A1
公开(公告)日：2008-07-17
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
IPC分类号： B01D8/00
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
摘要翻译： 低温泵包括至少具有第一和第二阶段的冰箱。 辐射屏蔽围绕第二级并与第一级热接触。 辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。 低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。 第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。 挡板设置在排水孔的上方。 挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。 挡板引导气体冷凝在主冷凝表面上。
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公开(公告)号：US08874274B2
公开(公告)日：2014-10-28
申请号：US12864142
申请日：2009-01-22
申请人： Randall J. McDonald , Oliver J. Dumas , Robert P. Sullivan , John J. Varone , Joseph Chopy, Jr. , Daniel R. Jankins
发明人： Randall J. McDonald , Oliver J. Dumas , Robert P. Sullivan , John J. Varone , Joseph Chopy, Jr. , Daniel R. Jankins
IPC分类号： G05D7/00 , G05B19/18 , H04L12/403 , G05B9/02
CPC分类号： H04L12/403 , G05B9/02
摘要： A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.
摘要翻译： 真空网络控制系统包括被配置为控制系统的操作过程的多个节点。 多个节点在网络环或其他拓扑中被配置为用于控制操作过程的可选主节点。 控制可以分布在每个节点之间，并在每个节点之间传递。 网络上的每个节点监视相邻的网络连接器，以检测网络中的故障。 响应于检测到的故障，断开连接被映射到故障，并且重新配置网络拓扑以在节点之间和外部设备之间继续通信。
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公开(公告)号：US4474497A
公开(公告)日：1984-10-02
申请号：US485100
申请日：1983-04-14
申请人： Robert P. Sullivan
发明人： Robert P. Sullivan
CPC分类号： F27D99/00 , F27D1/16 , F27D2021/0057 , Y10S122/14
摘要： A maintenance platform for reaching the upper area of the furnace (10) of a steam generator that can be quickly and easily assembled during a maintenance shutdown. The grid or frame of the platform is made up of a plurality of beams (22) extending into the furnace from opposite furnace walls (19). Cables (50) from the roof (60) support one end of the beams. Planking (66, 68) that interlocks (62, 64, 70) with the beams (22) completes the platform.
摘要翻译： 一种用于到达蒸汽发生器的炉子（10）的上部区域的维护平台，其可以在维护停机期间快速且容易地组装。 平台的格栅或框架由从相对的炉壁（19）延伸到炉中的多个梁（22）构成。 来自屋顶（60）的电缆（50）支撑梁的一端。 与梁（22）互锁（62,64,70）的平板（66,68）完成平台。
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公开(公告)号：US20110245964A1
公开(公告)日：2011-10-06
申请号：US12754699
申请日：2010-04-06
IPC分类号： H01L21/677 , H01L21/683
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/68 , H01L21/68707
摘要： A semiconductor workpiece processing system comprises at least one processing tool; a transport section configured to transport carriers to and from the processing tool; and a transport vehicle movably mounted on the transport section; wherein the transport vehicle is configured to: sense a location of a transport carrier alignment feature; adjust a location of a transport vehicle gripper based on the location of the transport carrier alignment feature; sense an attitude of the gripper at a point of engagement with the transport carrier; and adjust the location of the gripper based on the attitude of the gripper.
摘要翻译： 半导体工件处理系统包括至少一个处理工具; 运送部，其构造成将运送工具运送到加工工具和从处理工具运送; 以及可移动地安装在所述运输部分上的运输车辆; 其中所述运输车辆被配置为：感测运输工具对准特征的位置; 基于运输工具对准特征的位置来调整运输车辆夹具的位置; 在与运输工具的接合点处感觉到夹具的姿态; 并且基于夹具的姿态来调整夹持器的位置。
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公开(公告)号：US20110241845A1
公开(公告)日：2011-10-06
申请号：US12754922
申请日：2010-04-06
IPC分类号： H04Q5/22
CPC分类号： H01L21/67294
摘要： Amongst other things, a material handling system comprises a controller; a transport system, the transport system comprising transport track sections and at least one transport vehicle, the at least one transport vehicle configured to move along the transport track sections and configured to transport a carrier; and at least one identification tag reader located along a particular transport track section, the at least one identification tag reader being configured to read an identification tag of the carrier being transported by the at least one transport vehicle and being further configured to send a information signal to the controller; wherein the controller is configured to verify at least a location of the carrier based on the information signal.
摘要翻译： 其中，材料处理系统包括控制器; 运输系统，所述运输系统包括运输轨道部分和至少一个运输车辆，所述至少一个运输车辆被配置成沿着所述运输轨道部分移动并且被配置成运输运输工具; 以及沿着特定传输轨道部分定位的至少一个识别标签读取器，所述至少一个识别标签读取器被配置为读取由所述至少一个传输车辆传送的所述载体的识别标签，并且还被配置为发送信息信号 给控制器 其中所述控制器被配置为基于所述信息信号来验证所述载波的至少一个位置。
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公开(公告)号：US20110016891A1
公开(公告)日：2011-01-27
申请号：US12864142
申请日：2009-01-22
申请人： Randall J. McDonald , Oliver J. Dumas , Robert P. Sullivan , John J. Varone , Joseph Chopy, JR. , Daniel R. Jankins
发明人： Randall J. McDonald , Oliver J. Dumas , Robert P. Sullivan , John J. Varone , Joseph Chopy, JR. , Daniel R. Jankins
IPC分类号： B01D8/00
CPC分类号： H04L12/403 , G05B9/02
摘要： A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.
摘要翻译： 真空网络控制系统包括被配置为控制系统的操作过程的多个节点。 多个节点在网络环或其他拓扑中被配置为用于控制操作过程的可选主节点。 控制可以分布在每个节点之间，并在每个节点之间传递。 网络上的每个节点监视相邻的网络连接器，以检测网络中的故障。 响应于检测到的故障，断开连接被映射到故障，并且重新配置网络拓扑以在节点之间和外部设备之间继续通信。
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