公开(公告)号：US6059567A

公开(公告)日：2000-05-09

申请号：US22057

申请日：1998-02-10

申请人： Douglas A. Bolton ,  Patrick W. Wiesen

发明人： Douglas A. Bolton ,  Patrick W. Wiesen

IPC分类号： H01L21/324 ,  H01L21/00 ,  F27D15/02

CPC分类号： H01L21/67109

摘要： In summary, the vertical rapid cooling furnace of this invention for treating semiconductor wafers with self contained gas chilling and recycling comprises a hot wall reaction tube positioned within a cylindrical array of heating coils. Space between the hot wall reaction tube and said array of heating coils provides a cooling gas passageway therebetween. The cooling gas passageway has an inlet and an outlet, a chilled gas inlet communicating with the inlet of the cooling gas passageway and a heated gas outlet communicating with the outlet of the cooling gas passageway. The furnace includes a heat exchanger having a hot gas inlet and a chilled gas outlet, the hot gas inlet thereof communicating with said heated gas outlet, and the chilled gas outlet communicating with said cooling gas passageway inlet. With this system, heated gas from the cooling gas passageway can be chilled to remove heat therefrom and returned to the cooling gas passageway to remove heat from the furnace. The furnace preferably includes a fan placed between the chilled gas outlet and the cooling gas passageway inlet and valves for isolating the heat exchanger from the furnace during its heating cycle.

摘要翻译： 总之，本发明的用于处理具有自含气体冷却和再循环的半导体晶片的立式快速冷却炉包括位于加热盘管的圆柱形阵列内的热壁反应管。 热壁反应管和所述加热线圈阵列之间的空间在它们之间提供冷却气体通路。 冷却气体通道具有入口和出口，与冷却气体通道的入口连通的冷却气体入口和与冷却气体通道的出口连通的加热气体出口。 该炉包括具有热气体入口和冷却气体出口的热交换器，其热气体入口与所述加热的气体出口连通，以及与所述冷却气体通道入口连通的冷却气体出口。 利用该系统，来自冷却气体通道的加热气体可以被冷却以从其中除去热量并返回到冷却气体通道以从炉中去除热量。 炉子优选地包括放置在冷却气体出口和冷却气体通道入口之间的风扇，以及用于在其加热循环期间将热交换器与炉隔离的阀。

公开(公告)号：US5864119A

公开(公告)日：1999-01-26

申请号：US746966

申请日：1996-11-18

申请人： Lester H. Vogt ,  Douglas A. Bolton

发明人： Lester H. Vogt ,  Douglas A. Bolton

IPC分类号： B23K1/008 ,  F27B9/06 ,  H01L21/00 ,  E27B9/24 ,  E27B9/36 ,  H01L21/02

CPC分类号： H01L21/67248 ,  B23K1/008 ,  F27B9/066 ,  H01L21/67115 ,  B23K2201/40

摘要： An infrared conveyor furnace with controllable point source radiation elements incorporating a clean room internal environment. The conveyor transports moieties in an indexed manner through multiple heating zones heated by arrays of lamps. The lamps of each array are divided into a plurality of groups which are separately controlled to maintain a constant temperature across the surface of the moiety. The control of the lamp groups is accomplished through the use of a controller utilizing data from FTIR sensors mounted in a fused quartz barrier which is permeable by infrared radiation but which seals the lamp arrays from the heating zones.

摘要翻译： 具有可控点源辐射元件的红外输送炉，结合了洁净室内部环境。 输送机以索引的方式输送通过由灯阵列加热的多个加热区域的部分。 每个阵列的灯被分成多个组，这些组被单独控制，以保持部分表面上的恒定温度。 灯组的控制是通过使用控制器来实现的，所述控制器利用安装在熔融石英屏障中的FTIR传感器的数据，所述传感器可透过红外线辐射但可将灯阵列与加热区密封。

公开(公告)号：US6018144A

公开(公告)日：2000-01-25

申请号：US197176

申请日：1998-11-20

申请人： Lester H. Vogt ,  Douglas A. Bolton

发明人： Lester H. Vogt ,  Douglas A. Bolton

IPC分类号： B23K1/008 ,  F27B9/06 ,  H01L21/00 ,  F27B9/24 ,  F27B9/36

CPC分类号： H01L21/67248 ,  B23K1/008 ,  F27B9/066 ,  H01L21/67115 ,  B23K2201/40

摘要： A method of conveying moieties through an infrared conveyor furnace with controllable point source radiation elements incorporating a clean room internal environment. The method comprises the steps of transporting moieties in an indexed manner through multiple heating zones heated by arrays of lamps; and dividing the lamps of each array into a plurality of groups which are separately controlled to maintain a constant temperature across the surface of the moiety. The method further comprises controlling the lamp groups through the use of a controller utilizing data from FTIR sensors mounted in a fused quartz barrier which is permeable by infrared radiation but which seals the lamp arrays from the heating zones.

摘要翻译： 通过包含洁净室内环境的可控点源辐射元件通过红外输送炉输送部分的方法。 该方法包括以指数方式将部分输送通过由灯阵列加热的多个加热区的步骤; 并且将每个阵列的灯分成多个组，这些组被单独控制以保持跨部分表面的恒定温度。 该方法还包括通过使用控制器来控制灯组，该控制器利用安装在通过红外辐射但可将灯阵列与加热区密封的熔融石英屏障中的FTIR传感器的数据。

公开(公告)号：US5421354A

公开(公告)日：1995-06-06

申请号：US82746

申请日：1993-06-28

申请人： Douglas A. Bolton

发明人： Douglas A. Bolton

IPC分类号： A45B13/00 ,  A45B19/02 ,  A45B25/02 ,  A45B25/18 ,  H01Q15/16

CPC分类号： A45B19/02 ,  A45B13/00 ,  A45B25/02 ,  A45B25/18 ,  H01Q15/161

摘要： A self-supporting umbrella canopy has a high strength-to-weight ratio and the ability to compactly fold flat. The umbrella canopy uses a series of collapsible, closed cross-section cells to provide its support and to provide weather protection for a person or persons below. The closed cross-section cells are attached to each other in series so that the umbrella canopy may conveniently unfurl in a radial manner. Construction of the umbrella canopy lends itself to automated processes. Due to the self-supporting nature of the collapsible, closed cross-section cells, lightweight and inexpensive waterproof materials may be used to construct the umbrella canopy.

摘要翻译： 自支撑雨伞具有高强度重量比和压扁扁平的能力。 伞冠使用一系列可折叠，封闭的横截面细胞来提供支持，并为下列人员提供天气保护。 封闭的横截面细胞彼此串联连接，从而伞形伞可以以径向方式方便地展开。 雨伞的结构适用于自动化过程。 由于可折叠，封闭的横截面电池的自支撑性质，轻质且廉价的防水材料可用于构造雨伞。