公开(公告)号：US20180090362A1

公开(公告)日：2018-03-29

申请号：US15276357

申请日：2016-09-26

申请人： Dow Corning Corporation

发明人： Peng-Fei FU ,  Sheng WANG

IPC分类号： H01L21/683 ,  C09J183/08 ,  B32B37/12 ,  H01L23/00 ,  H01L21/304 ,  H01L21/768

CPC分类号： H01L21/6836 ,  B32B37/12 ,  B32B43/006 ,  B32B2037/1253 ,  B32B2307/20 ,  B32B2383/00 ,  B32B2457/14 ,  C08G77/12 ,  C08G77/20 ,  C08G77/24 ,  C09J183/04 ,  H01L21/304 ,  H01L21/6835 ,  H01L21/76898 ,  H01L24/29 ,  H01L24/83 ,  H01L2221/68327 ,  H01L2221/68381 ,  H01L2221/68386 ,  H01L2224/29191 ,  H01L2224/83855 ,  H01L2924/0715 ,  H01L2924/07802 ,  H01L2924/0782 ,  C08K5/56 ,  C08L83/00

摘要： Fluoro-containing silicone-based storage stable temporary bonding adhesive compositions are disclosed. The adhesive compositions can be used in varied applications including, but not limited to, 3D chip integration, packaging applications, semiconductor devices, radio-frequency identification tags, chip cards, high-density memory devices, and microelectronic devices. The adhesive compositions generally comprise: a) a fluoro-containing silicone having the general formula (I); M′[DoDfpDxq]nM′ wherein M′ is a vinyl or hydrogen functionalized unit; Df unit comprises a fluoro-substituted group; Dx unit comprises a vinyl or SiH functionalized group; 1>o≧0, 1>p>0, and 1>q≧0 wherein o+p+q=1 and p is equal to or less than 20% mole percent of the sum of o+p+q; and n is an integer from 1 to 1000; b) an alkenyl functional polydimethylsiloxane fluid; c) an alkenyl functional MQ siloxane resin; d) an SiH functional siloxane crosslinker; and e) a hydrosilylation catalyst.