公开(公告)号：US20240308018A1

公开(公告)日：2024-09-19

申请号：US18570406

申请日：2022-05-24

Applicant: EBARA CORPORATION

Inventor： Yuta SUZUKI ,  Hiroki TAKAHASHI ,  Akira NAKAMURA ,  Katsuhide WATANABE ,  Hisanori MATSUO ,  Takahito KAGOSHIMA

IPC: B24B37/005 ,  H01L21/67

CPC classification number: B24B37/005 ,  H01L21/67253 ,  H01L21/67288

Abstract: Included are: at least one sensor that detects a physical quantity of an object during polishing and/or during cleaning and/or during drying of a substrate; a conversion section that converts a sensor value during polishing and/or during cleaning and/or during drying detected by the sensor into a feature amount for each processing step with respect to a trained machine learning model; and an inference section that outputs at least one predicted value of a number of defects, a size of a defect, and a position of a defect in a target substrate by inputting target data including the feature amount to the trained machine learning model.