Acoustic sensor and method of manufacturing the same
    7.
    发明授权
    Acoustic sensor and method of manufacturing the same 有权
    声传感器及其制造方法

    公开(公告)号:US08722446B2

    公开(公告)日:2014-05-13

    申请号:US13796018

    申请日:2013-03-12

    IPC分类号: H01L21/00

    摘要: Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode.

    摘要翻译: 提供了一种声学传感器。 声学传感器包括:基底,其包括侧壁部分和从侧壁部分的底部延伸的底部部分; 固定在所述基板上的下部电极,具有凹部和凸部,所述凹部包括在所述底部的中间区域的第一孔,所述凸部包括在所述底部的边缘区域上的第二孔; 隔膜面向下电极的凹部,其间具有振动空间; 隔膜支撑体设置在隔膜侧面的下电极上,具有与隔膜相同高度的顶表面; 以及设置在下部电极下方的底部和侧壁部之间的空间中的声学室。

    Device for measuring thermoelectric performance

    公开(公告)号:US10928255B2

    公开(公告)日:2021-02-23

    申请号:US15708297

    申请日:2017-09-19

    IPC分类号: G01K7/02 G01N25/32 H01L35/34

    摘要: The present disclosure herein relates to a device for measuring a thermoelectric performance. The device for measuring a thermoelectric performance of a thermoelectric material, which includes a support module configured to generate temperature difference between both ends of the thermoelectric material, a fixing module detachably coupled to the support module to support the thermoelectric material, a temperature measuring unit electrically connected to the fixing module to measure temperature of each of the both ends of the thermoelectric material, and an electromotive force measuring unit electrically connected to the fixing module to measure thermoelectromotive force generated between the both ends of the thermoelectric material. Here, the fixing module includes a first heat sink part and a second heat sink part, which respectively support the both ends of the thermoelectric material.