Charged particle generation device and target unit

    公开(公告)号:US10453642B2

    公开(公告)日:2019-10-22

    申请号:US16128248

    申请日:2018-09-11

    Abstract: Provided is a charged particle generation device. The charged particle generation device includes a light source unit configured to emit a laser, a target layer that receives the laser and emits charged particles, and a focusing structure disposed on the target layer to focus the laser. The focusing structure includes solid films extending on an upper surface of the target layer in a direction away from the target layer, and a pore section disposed between the solid films and having a porous structure. The focusing structure includes a material having a higher atomic number than carbon.

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