公开(公告)号：US20240313503A1

公开(公告)日：2024-09-19

申请号：US18606448

申请日：2024-03-15

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Namje KIM ,  O-Kyun KWON ,  Ho Sung KIM ,  Miran PARK ,  Seungchul LEE

IPC: H01S5/026 ,  H01S5/042 ,  H01S5/12

CPC classification number: H01S5/0265 ,  H01S5/04256 ,  H01S5/12

Abstract: Provided is an electro-absorption modulated lasers with identical-active layer. The lasers include a substrate having a passive waveguide region, an LD region on one side of the passive waveguide region, and an EAM region on the other side of the passive waveguide region, an active layer provided on the substrate and extending from the LD region to the EAM region, a grating layer provided on the active layer, a clad layer provided on the grating layer, and electrodes provided in the LD region and the EAM region of the clad layer.

公开(公告)号：US20240356303A1

公开(公告)日：2024-10-24

申请号：US18638137

申请日：2024-04-17

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Seungchul LEE ,  Namje KIM ,  O-Kyun KWON ,  Miran PARK

IPC: H01S5/026 ,  H01S5/343

CPC classification number: H01S5/026 ,  H01S5/34313

Abstract: Disclosed are a photonic integrated circuit device and a fabrication method thereof, wherein the fabrication method includes forming an active layer on a substrate having a passive waveguide region, an LD region, and an EAM region, forming a grating layer, forming a first upper clad layer, forming a passivation layer, forming a mask pattern, forming a vacancy generation layer, performing a rapid thermal process to provide a first vacancy activation region in the active layer, removing the vacancy generation layer, the mask pattern, and the passivation layer, forming a second upper clad layer, and forming electrodes.