公开(公告)号：US20220173670A1

公开(公告)日：2022-06-02

申请号：US17674148

申请日：2022-02-17

申请人： EN2CORE TECHNOLOGY, INC.

发明人： Yeong-Hoon SOHN ,  Se-Hong PARK ,  Sae-Hoon UHM

IPC分类号： H02M7/5387 ,  H01J37/32 ,  H02M1/42 ,  H03H7/40

摘要： A power supply includes an inverter configured to direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load; and a controller configured to adjust disposition of a powering period, in which the AC power is output, and a freewheeling period, in which the AC power is not output, to adjust a power amount of the power supplied to the load through the impedance matching circuit by the inverter.

公开(公告)号：US20240223104A1

公开(公告)日：2024-07-04

申请号：US18606916

申请日：2024-03-15

申请人： EN2CORE TECHNOLOGY, INC.

发明人： Yeong-Hoon SOHN ,  Se-Hong PARK ,  Sae-Hoon UHM

IPC分类号： H02M7/537 ,  H02M1/38 ,  H02M7/5387 ,  H03H7/38 ,  H05H1/46

CPC分类号： H02M7/537 ,  H02M1/38 ,  H02M7/5387 ,  H03H7/38 ,  H05H1/4652

摘要： A power supply includes an inverter configured to convert direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load, and a controller configured to detect a delay time of an output voltage and an output current output to the impedance matching circuit and the load and to adjust a frequency of the output voltage according to the detected delay time.

公开(公告)号：US20240146211A1

公开(公告)日：2024-05-02

申请号：US18409133

申请日：2024-01-10

申请人： EN2CORE TECHNOLOGY, INC.

发明人： Yeong-Hoon SOHN ,  Se-Hong PARK ,  Sae-Hoon UHM

IPC分类号： H02M7/5387 ,  H01J37/32 ,  H02M1/42 ,  H03H7/40

CPC分类号： H02M7/5387 ,  H01J37/32183 ,  H02M1/4233 ,  H02M7/53871 ,  H03H7/40

摘要： A power supply includes an inverter configured to direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load; and a controller configured to adjust disposition of a powering period, in which the AC power is output, and a freewheeling period, in which the AC power is not output, to adjust a power amount of the power supplied to the load through the impedance matching circuit by the inverter.

公开(公告)号：US20210226555A1

公开(公告)日：2021-07-22

申请号：US16303492

申请日：2018-06-11

申请人： EN2CORE TECHNOLOGY, INC.

发明人： Yeong-Hoon SOHN ,  Se-Hong PARK ,  Sae-Hoon UHM

IPC分类号： H02M7/48 ,  H03K5/24 ,  H03H7/30

摘要： A power supply includes an inverter configured to convert direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load, and a controller configured to detect a delay time of an output voltage and an output current output to the impedance matching circuit and the load and to adjust a frequency of the output voltage according to the detected delay time.

公开(公告)号：US20230231497A1

公开(公告)日：2023-07-20

申请号：US18185994

申请日：2023-03-17

申请人： EN2CORE TECHNOLOGY, INC.

发明人： Yeong-Hoon SOHN ,  Se-Hong PARK ,  Sae-Hoon UHM

IPC分类号： H02M7/5387

CPC分类号： H02M7/53871

摘要： A power supply includes an inverter configured to direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load; and a controller configured to adjust disposition of a powering period, in which the AC power is output, and a freewheeling period, in which the AC power is not output, to adjust a power amount of the power supplied to the load through the impedance matching circuit by the inverter.

公开(公告)号：US20210319979A1

公开(公告)日：2021-10-14

申请号：US16973994

申请日：2019-12-27

申请人： EN2CORE TECHNOLOGY, INC.

发明人： Sae-Hoon UHM ,  Yun-Seong LEE ,  Yeong-Hoon SOHN ,  Se-Hong PARK

IPC分类号： H01J37/32

摘要： A plasma generating apparatus according to an embodiment of the present invention comprises: a pair of electrodes arranged in a dielectric discharge tube; an initial discharge induction coil module; and a main discharge induction coil module. The initial discharge induction coil module and the main discharge induction coil module are connected to an RF power source, and the RF power source provides RF power having different resonance frequencies to the initial discharge induction coil module and the main discharge induction coil module, respectively.

公开(公告)号：US20230318486A1

公开(公告)日：2023-10-05

申请号：US17572918

申请日：2022-01-11

申请人： EN2CORE TECHNOLOGY, INC.

发明人： Yeong-Hoon SOHN ,  Se-Hong PARK ,  Sae-Hoon UHM

IPC分类号： H02M7/537 ,  H03H7/38

CPC分类号： H02M7/537 ,  H03H7/38 ,  H05H1/4652

摘要： A power supply includes an inverter configured to convert direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load, and a controller configured to detect a delay time of an output voltage and an output current output to the impedance matching circuit and the load and to adjust a frequency of the output voltage according to the detected delay time.

公开(公告)号：US20210226556A1

公开(公告)日：2021-07-22

申请号：US16099660

申请日：2018-06-11

申请人： EN2CORE TECHNOLOGY, INC.

发明人： Yeong-Hoon SOHN ,  Se-Hong PARK ,  Sae-Hoon UHM

IPC分类号： H02M7/5387 ,  H02M1/42 ,  H03H7/40 ,  H01J37/32

摘要： A power supply includes an inverter configured to direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load; and a controller configured to adjust disposition of a powering period, in which the AC power is output, and a freewheeling period, in which the AC power is not output, to adjust a power amount of the power supplied to the load through the impedance matching circuit by the inverter.