公开(公告)号：US20160103033A1

公开(公告)日：2016-04-14

申请号：US14890752

申请日：2014-06-04

Applicant: ENTEGRIS, INC.

Inventor： Richard A. Cooke ,  George Gonnella ,  Sung In Moon ,  Charles W. Extrand ,  John E. Pillion

IPC: G01L19/06

CPC classification number: G01L19/0645 ,  B81B7/0025

Abstract: A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85° C. and 100° C.

Abstract translation: 传感器包括包含陶瓷材料的传感器层; 包含铬的粘合层，所述粘合层粘附到所述传感器层的面向液体的表面的一个或多个部分; 以及隔离膜，其包含聚合物，所述隔离膜覆盖所述粘附层的面向液体的表面。 隔离膜可用于保护传感器免受腐蚀性和高温流体的侵害，例如保护传感器免受长时间暴露于85℃至100℃之间的热水。

公开(公告)号：US10175133B2

公开(公告)日：2019-01-08

申请号：US14890752

申请日：2014-06-04

Applicant: Entegris, Inc.

Inventor： Richard A. Cooke ,  George Gonnella ,  Sung In Moon ,  Charles W. Extrand ,  John E. Pillion

IPC: G01L19/06 ,  B81B7/00

Abstract: A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85° C. and 100° C.