公开(公告)号：US20160103033A1

公开(公告)日：2016-04-14

申请号：US14890752

申请日：2014-06-04

Applicant: ENTEGRIS, INC.

Inventor： Richard A. Cooke ,  George Gonnella ,  Sung In Moon ,  Charles W. Extrand ,  John E. Pillion

IPC: G01L19/06

CPC classification number: G01L19/0645 ,  B81B7/0025

Abstract: A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85° C. and 100° C.

Abstract translation: 传感器包括包含陶瓷材料的传感器层; 包含铬的粘合层，所述粘合层粘附到所述传感器层的面向液体的表面的一个或多个部分; 以及隔离膜，其包含聚合物，所述隔离膜覆盖所述粘附层的面向液体的表面。 隔离膜可用于保护传感器免受腐蚀性和高温流体的侵害，例如保护传感器免受长时间暴露于85℃至100℃之间的热水。

公开(公告)号：US10175133B2

公开(公告)日：2019-01-08

申请号：US14890752

申请日：2014-06-04

Applicant: Entegris, Inc.

Inventor： Richard A. Cooke ,  George Gonnella ,  Sung In Moon ,  Charles W. Extrand ,  John E. Pillion

IPC: G01L19/06 ,  B81B7/00

Abstract: A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85° C. and 100° C.

公开(公告)号：US08603632B2

公开(公告)日：2013-12-10

申请号：US13847879

申请日：2013-03-20

Applicant: Entegris, Inc.

Inventor： Charles W. Extrand ,  Sung In Moon

IPC: B09B3/00 ,  H01L23/58

CPC classification number: C09D1/00 ,  C23C16/26 ,  G06Q30/0283 ,  G06Q99/00 ,  H05K5/069 ,  Y10T428/1379 ,  Y10T428/30 ,  Y10T428/31507

Abstract: Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

Abstract translation: 本发明的实施方案包括在塑料基材或塑料外壳的一个或多个表面上包含类金刚石碳涂层或掺杂类金刚石碳涂层的制品。 与单独的塑料的渗透性相比，DLC或掺杂的DLC涂层的实施例减少了涂覆的塑料或热塑性材料对氢或氦的气体渗透。 DLC或掺杂的DLC涂层涂层提供约107至约1014欧姆/平方的表面电阻率，并且具有比下面的塑料基底的透射率在约300范围内的约0％至约70％的透射率 nm至约1100nm。 DLC涂覆的塑料可用于环境外壳中，用于保护环境敏感的基材，如半导体晶片和标线片。

公开(公告)号：US20130280457A1

公开(公告)日：2013-10-24

申请号：US13847879

申请日：2013-03-20

Applicant: Entegris, Inc.

Inventor： Charles W. Extrand ,  Sung In Moon

IPC: C09D1/00 ,  H05K5/06

CPC classification number: C09D1/00 ,  C23C16/26 ,  G06Q30/0283 ,  G06Q99/00 ,  H05K5/069 ,  Y10T428/1379 ,  Y10T428/30 ,  Y10T428/31507

Abstract: Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.

Abstract translation: 本发明的实施方案包括在塑料基材或塑料外壳的一个或多个表面上包含类金刚石碳涂层或掺杂类金刚石碳涂层的制品。 与单独的塑料的渗透性相比，DLC或掺杂的DLC涂层的实施例减少了涂覆的塑料或热塑性材料对氢或氦的气体渗透。 DLC或掺杂的DLC涂层涂层提供约107至约1014欧姆/平方的表面电阻率，并且具有比下面的塑料基底的透射率在约300范围内的约0％至约70％的透射率 nm至约1100nm。 DLC涂覆的塑料可用于环境外壳中，用于保护环境敏感的基材，如半导体晶片和标线片。