公开(公告)号：US20230068384A1

公开(公告)日：2023-03-02

申请号：US17896964

申请日：2022-08-26

Applicant: ENTEGRIS, INC.

Inventor： Paolo Moreschini

IPC: C23C16/08 ,  C23C16/448

Abstract: Some embodiments relate to precursor delivery systems for producing gas precursors. The precursor delivery system may include one or more precursor supply packages containing a solid precursor material. The one or more precursor supply packages may be configured to heat the solid precursor material to a temperature sufficient to result in thermal decomposition of the solid precursor material. The thermal decomposition of the solid precursor material may produce a gas precursor. The gas precursor may be supplied to a gas precursor-utilizing process. Further embodiments relate to precursor supply packages and related methods.

公开(公告)号：US12258662B2

公开(公告)日：2025-03-25

申请号：US17896964

申请日：2022-08-26

Applicant: ENTEGRIS, INC.

Inventor： Paolo Moreschini

IPC: B01J7/00 ,  B01J4/00 ,  B01J4/02 ,  C23C16/08 ,  C23C16/448

Abstract: Some embodiments relate to precursor delivery systems for producing gas precursors. The precursor delivery system may include one or more precursor supply packages containing a solid precursor material. The one or more precursor supply packages may be configured to heat the solid precursor material to a temperature sufficient to result in thermal decomposition of the solid precursor material. The thermal decomposition of the solid precursor material may produce a gas precursor. The gas precursor may be supplied to a gas precursor-utilizing process. Further embodiments relate to precursor supply packages and related methods.