公开(公告)号：US20240111222A1

公开(公告)日：2024-04-04

申请号：US18375290

申请日：2023-09-29

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Tyler Monforton

IPC: G03F7/00

CPC classification number: G03F7/70741

Abstract: An apparatus includes an inner container having a baseplate and a cover, an outer container having a pod dome and a pod door, and a first set of pins and a second set of pins disposed on the pod door. The pod door has a locked state and an unlocked state. The first set of pins and the second set of pins are configured to support the baseplate. When the pod door is in the unlocked state and the first set of pins contacts the baseplate, a clearance is formed between the second set of pins and the baseplate. When the pod door is in the locked state, the first set of pins and the second set of pins contact the baseplate.

公开(公告)号：US20250108972A1

公开(公告)日：2025-04-03

申请号：US18900607

申请日：2024-09-27

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Anthony M. Tieben ,  Russ V. Raschke ,  Brian Wiseman ,  Tyler Monforton

IPC: B65D85/68 ,  B65D25/10 ,  B65D77/04

Abstract: A substrate container is provided including an inner pod configured to accommodate a large format reticle, and an outer pod configured to contain and secure the inner pod. The inner pod can be clamped together using a clip or features provided on the outer pod. Features of the outer pod that can clamp the inner pod include flanges, grooves, angled clamping surfaces, other clamping features, or clamping mechanisms. Clamping mechanisms can be actuated by physical, electrical, and/or magnetic features, such as placement of a door in an opening of a shell, operation of a door latch, or interaction of a tool to release the clamping mechanism using mechanical, electrical, and/or magnetic force.