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公开(公告)号:US20200088318A1
公开(公告)日:2020-03-19
申请号:US16564496
申请日:2019-09-09
Applicant: ENTEGRIS, INC. , LUXEMBOUG PATENT COMPANY SA
Inventor: Christopher SCANNELL , Joseph R. DESPRES , Pascal CHIR , Paul MUZZO
Abstract: A valve system having a valve position indicator is disclosed. The valve position indicator allows for viewing of the valve position from one or more viewing locations. In one example, the valve position indicator includes a side valve open/close indicator and a top valve open/close indicator on a valve assembly. An indicator locking mechanism securely locks the valve position indicator in alignment with a position of a control valve.
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公开(公告)号:US20200248873A1
公开(公告)日:2020-08-06
申请号:US16855684
申请日:2020-04-22
Applicant: ENTEGRIS, INC.
Inventor: Daniel ELZER , Ying TANG , Barry L. CHAMBERS , Joseph D. SWEENEY , Shaun M. WILSON , Steven E. BISHOP , Steven ULANECKI , James V. MCMANUS , Oleg BYL , Christopher SCANNELL , Edward E. JONES , Joseph R. DESPRES
Abstract: Fluid dispensing assemblies are disclosed, for use in fluid supply packages in which such fluid dispensing assemblies as coupled to fluid supply vessels, for dispensing of fluids such as semiconductor manufacturing fluids. The fluid dispensing assemblies in specific implementations are configured to prevent application of excessive force to valve elements in the fluid dispensing assemblies, and/or for avoiding inadvertent or accidental open conditions of vessels that may result in leakage of toxic or otherwise hazardous or valuable gas. Also described are alignment devices for assisting coupling of coupling elements, e.g., coupling elements of fluid supply packages of the foregoing type, so that damage to such couplings as a result of misalignment is avoided.
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公开(公告)号:US20200011482A1
公开(公告)日:2020-01-09
申请号:US16577711
申请日:2019-09-20
Applicant: ENTEGRIS, INC.
Inventor: Joseph D. SWEENEY , Edward Edmiston JONES , Joseph Robert DESPRES , Richard S. RAY , Peter C. Van Buskirk , Edward A. STURM , Christopher SCANNELL
Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.
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公开(公告)号:US20190170302A1
公开(公告)日:2019-06-06
申请号:US16271339
申请日:2019-02-08
Applicant: ENTEGRIS, INC.
Inventor: Joseph D. SWEENEY , Edward Edmiston JONES , Joseph Robert DESPRES , Richard S. RAY , Peter C. Van Buskirk , Edward A. STURM , Christopher SCANNELL
Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.
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公开(公告)号:US20180119888A1
公开(公告)日:2018-05-03
申请号:US15573020
申请日:2016-05-11
Applicant: ENTEGRIS, INC.
Inventor: Daneil ELZER , Ying TANG , Barry Lewis CHAMBERS , Joseph D. SWEENEY , Shaun M. WILSON , Steven ULANECKI , Steven E. BISHOP , James V. MCMANUS , Karl W. OLANDER , Edward E. JONES , Oleg BYL , Joseph R. DESPRES , Christopher SCANNELL
IPC: F17C13/04
CPC classification number: F17C13/04 , F17C11/00 , F17C2201/0114 , F17C2201/0119 , F17C2201/058 , F17C2203/0617 , F17C2205/0308 , F17C2205/0329 , F17C2205/0335 , F17C2205/0338 , F17C2205/0385 , F17C2205/0391
Abstract: Fluid dispensing assemblies are disclosed, for use in fluid supply packages in which such fluid dispensing assemblies as coupled to fluid supply vessels, for dispensing of fluids such as semiconductor manufacturing fluids. The fluid dispensing assemblies in specific implementations are configured to prevent application of excessive force to valve elements in the fluid dispensing assemblies, and/or for avoiding inadvertent or accidental open conditions of vessels that may result in leakage of toxic or otherwise hazardous or valuable gas. Also described are alignment devices for assisting coupling of coupling elements, e.g., coupling elements of fluid supply packages of the foregoing type, so that damage to such couplings as a result of misalignment is avoided.
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