公开(公告)号：US09637379B2

公开(公告)日：2017-05-02

申请号：US14909105

申请日：2014-07-02

Applicant: EPCOS AG

Inventor： Marcel Giesen ,  Thomas Metzger ,  Phillip Ekkels ,  Ansgar Schäufele

IPC: B81C1/00 ,  G01L9/00 ,  H04R31/00 ,  B81C99/00

CPC classification number: B81C1/00682 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00666 ,  B81C99/004 ,  G01L9/0073 ,  H04R31/003

Abstract: A method can be used for producing a microelectromechanical transducer. A plurality of microelectromechanical transducers are produced on a single wafer. Each transducer includes a diaphragm. The wafer is divided into at least a first and a second region. The mechanical tensions of a random sample of diaphragms of the first region are established and the values are compared with a predetermined desired value. The mechanical tensions of a random sample of diaphragms of the second region are established and the values are compared with the predetermined desired value. The tensions of the diaphragms in the first region are adjusted to the predetermined desired value, and the tensions of the diaphragms in the second region are adjusted to the predetermined desired value.