公开(公告)号：US09637379B2

公开(公告)日：2017-05-02

申请号：US14909105

申请日：2014-07-02

Applicant: EPCOS AG

Inventor： Marcel Giesen ,  Thomas Metzger ,  Phillip Ekkels ,  Ansgar Schäufele

IPC: B81C1/00 ,  G01L9/00 ,  H04R31/00 ,  B81C99/00

CPC classification number: B81C1/00682 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00666 ,  B81C99/004 ,  G01L9/0073 ,  H04R31/003

Abstract: A method can be used for producing a microelectromechanical transducer. A plurality of microelectromechanical transducers are produced on a single wafer. Each transducer includes a diaphragm. The wafer is divided into at least a first and a second region. The mechanical tensions of a random sample of diaphragms of the first region are established and the values are compared with a predetermined desired value. The mechanical tensions of a random sample of diaphragms of the second region are established and the values are compared with the predetermined desired value. The tensions of the diaphragms in the first region are adjusted to the predetermined desired value, and the tensions of the diaphragms in the second region are adjusted to the predetermined desired value.

公开(公告)号：US20150333249A1

公开(公告)日：2015-11-19

申请号：US14654480

申请日：2012-12-21

Applicant: EPCOS AG

Inventor： Gilles Moulard ,  Paul Muralt ,  Ramin Matloub ,  Thomas Metzger

IPC: H01L41/083 ,  H01L41/27 ,  H01L41/18

CPC classification number: H01L41/083 ,  H01L41/18 ,  H01L41/27 ,  H03H3/02 ,  H03H9/02015 ,  H03H9/0576 ,  H03H9/171 ,  Y10T29/43

Abstract: A BAW component is provided. A method for manufacturing a BAW component is also provided. The component includes a bottom electrode, a top electrode and a first piezoelectric material. The first piezoelectric material is between the bottom electrode and the top electrode. The first piezoelectric material has a higher piezoelectric coefficient than AlN.

Abstract translation: 提供BAW组件。 还提供了一种制造BAW部件的方法。 该部件包括底部电极，顶部电极和第一压电材料。 第一压电材料位于底部电极和顶部电极之间。 第一压电材料具有比AlN更高的压电系数。

公开(公告)号：US20150221442A1

公开(公告)日：2015-08-06

申请号：US14424989

申请日：2013-08-01

Applicant: EPCOS AG

Inventor： Andreas Link ,  Thomas Metzger ,  Edgar Schmidhammer

IPC: H01G4/35 ,  H01G4/40 ,  H01G4/005 ,  H01G4/30

CPC classification number: H01G4/35 ,  H01G4/005 ,  H01G4/30 ,  H01G4/38 ,  H01G4/40 ,  H01G17/00 ,  H03H9/0542 ,  H03H9/0547 ,  H03H9/0561

Abstract: A capacitor having improved linear properties is provided. The capacitor is compatible with manufacturing processes of components which function using BAW. The capacitor comprises a first and a second electrode (E1, E2) in a first electrically conductive layer and a third electrode (E3) in a second electric layer. A dielectric layer (DL) is arranged between the electrically conductive layers. The first electrode (E1) and the second electrode (E2) are the terminal electrodes of the capacitor.

Abstract translation: 提供了具有改进的线性特性的电容器。 电容器与使用BAW功能的组件的制造工艺兼容。 电容器包括在第一导电层中的第一和第二电极（E1，E2）和在第二电层中的第三电极（E3）。 电介质层（DL）布置在导电层之间。 第一电极（E1）和第二电极（E2）是电容器的端子电极。