公开(公告)号：US10150120B2

公开(公告)日：2018-12-11

申请号：US15031096

申请日：2014-09-30

Applicant: Edwards Limited

Inventor： Andrew James Seeley ,  Alexander Michael Pope ,  Thomas Frank Cohn

IPC: B03C3/01 ,  B01D53/14 ,  B03C3/16 ,  B03C3/41 ,  B03C3/53

Abstract: A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.

公开(公告)号：US20160236205A1

公开(公告)日：2016-08-18

申请号：US15031096

申请日：2014-09-30

Applicant: EDWARDS LIMITED

Inventor： Andrew James Seeley ,  Alexander Michael Pope ,  Thomas Frank Cohn

IPC: B03C3/01 ,  B03C3/41

CPC classification number: B03C3/01 ,  B01D53/14 ,  B01D53/1456 ,  B01D2252/103 ,  B01D2257/2045 ,  B01D2257/2047 ,  B01D2257/553 ,  B01D2258/0216 ,  B03C3/16 ,  B03C3/41 ,  B03C3/53 ,  B03C2201/10

Abstract: A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.

Abstract translation: 气体处理包括：气体洗涤器室，其可操作以接收来自制造工艺工具的流出气体流，以在其中进行擦洗以提供洗涤气流; 以及静电沉淀室，其可操作以接收待处理的洗涤气体流以提供经处理的气流，气体洗涤室和静电沉淀室中的一个限定第一室，另一个气体洗涤室和静电沉淀室 限定第二室，所述第一室被构造成围绕所述第二室。 以这种方式，第一室和第二室可以共享相同的体积。