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公开(公告)号：US20090274359A1
公开(公告)日：2009-11-05
申请号：US12501822
申请日：2009-07-13
IPC分类号： G06K9/00
CPC分类号： G01N23/2252 , H01J37/222 , H01J37/226 , H01J37/228 , H01J37/256 , H01J37/28 , H01J2237/221 , H01J2237/2807
摘要： It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.
摘要翻译： 本发明的目的是提供一种样本观察方法，图像处理装置和带电粒子束装置，其优选用于基于由光学显微镜获取的图像来选择应当获取的图像区域 在带电粒子束装置中，其代表是电子显微镜。 在本发明中，为了实现上述目的，提供了一种方法和装置，用于通过对染色的光学显微镜图像和基于图像形成的基本映射图像进行比较来确定带电粒子的检测位置 通过用带电粒子束照射检测X射线。
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公开(公告)号：US20080283750A1
公开(公告)日：2008-11-20
申请号：US12119916
申请日：2008-05-13
申请人： Eiko NAKAZAWA , Hiroyuki Kobayashi
发明人： Eiko NAKAZAWA , Hiroyuki Kobayashi
IPC分类号： G01N23/04
CPC分类号： H01J37/265 , H01J2237/245 , H01J2237/282
摘要： There is provided a transmission electron microscope capable of a capturing continuous field-of-view image without having an influence of aberration. In order to obtain an electron beam image of the whole of a predetermined range of a sample, the transmission electron microscope specifies a region with little aberration in a field of view of an image pickup device, moves a sample stage in units of the specified regions, captures the whole of the predetermined range as a plurality of continuous field-of-view images.
摘要翻译： 提供了能够捕获连续视野图像而不会产生像差影响的透射电子显微镜。 为了获得样品的整个预定范围的电子束图像，透射电子显微镜在图像拾取装置的视野中指定几乎没有像差的区域，以指定区域为单位移动样品台 捕获整个预定范围作为多个连续的视野图像。
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公开(公告)号：US20120138795A1
公开(公告)日：2012-06-07
申请号：US13398451
申请日：2012-02-16
CPC分类号： G01N23/2252 , H01J37/222 , H01J37/226 , H01J37/228 , H01J37/256 , H01J37/28 , H01J2237/221 , H01J2237/2807
摘要： It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.
摘要翻译： 本发明的目的是提供一种样本观察方法，图像处理装置和带电粒子束装置，其优选用于基于由光学显微镜获取的图像来选择应当获取的图像区域 在带电粒子束装置中，其代表是电子显微镜。 在本发明中，为了实现上述目的，提供了一种方法和装置，用于通过对染色的光学显微镜图像和基于图像形成的基本映射图像进行比较来确定带电粒子的检测位置 通过用带电粒子束照射检测X射线。
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