公开(公告)号：US20180130635A1

公开(公告)日：2018-05-10

申请号：US15662576

申请日：2017-07-28

Applicant: JEOL Ltd.

Inventor： Takashi Suzuki

IPC: H01J37/24 ,  H01J37/244 ,  H01J37/22 ,  H01J37/073

CPC classification number: H01J37/24 ,  H01J37/073 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/0653 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/245 ,  H01J2237/24535 ,  H01J2237/2487

Abstract: There is provided an electron microscope capable of producing good images by reducing contrast nonuniformity. The electron microscope (1) includes: an electron beam source (11) for producing an electron beam; a noise cancelling aperture (12) and an amplifier (42) for detecting a part of the electron beam; an effective value computing circuit (44) and a low frequency cut-off circuit (46) for extracting a DC component of an effective value of a detection signal emanating from the amplifier (42); an image detector (15) for detecting a signal produced in response to impingement of the beam on a sample (A); a preamplifier circuit (20) and an amplifier circuit (30); a divider circuit (54) for performing a division of the output signal (X) from the amplifier circuit (30) by the output signal (Y) from the amplifier circuit (42) and producing a quotient signal indicative of the result of the decision (X/Y); and a multiplier circuit (58) for multiplying the quotient signal by a signal (Z) extracted by the low frequency cut-off circuit (46).

公开(公告)号：US20080283750A1

公开(公告)日：2008-11-20

申请号：US12119916

申请日：2008-05-13

Applicant: Eiko NAKAZAWA ,  Hiroyuki Kobayashi

Inventor： Eiko NAKAZAWA ,  Hiroyuki Kobayashi

IPC: G01N23/04

CPC classification number: H01J37/265 ,  H01J2237/245 ,  H01J2237/282

Abstract: There is provided a transmission electron microscope capable of a capturing continuous field-of-view image without having an influence of aberration. In order to obtain an electron beam image of the whole of a predetermined range of a sample, the transmission electron microscope specifies a region with little aberration in a field of view of an image pickup device, moves a sample stage in units of the specified regions, captures the whole of the predetermined range as a plurality of continuous field-of-view images.

Abstract translation: 提供了能够捕获连续视野图像而不会产生像差影响的透射电子显微镜。 为了获得样品的整个预定范围的电子束图像，透射电子显微镜在图像拾取装置的视野中指定几乎没有像差的区域，以指定区域为单位移动样品台 捕获整个预定范围作为多个连续的视野图像。

公开(公告)号：US20130245989A1

公开(公告)日：2013-09-19

申请号：US13601303

申请日：2012-08-31

Applicant: Motoki KADOWAKI ,  Osamu NAGANO

Inventor： Motoki KADOWAKI ,  Osamu NAGANO

IPC: H01J37/26

CPC classification number: H01J37/261 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24485 ,  H01J2237/245 ,  H01J2237/2817

Abstract: In accordance with an embodiment, a signal processing method includes scanning a pattern on a substrate with a charged particle beam, detecting secondary charged particles emitted from the substrate by using a detector, outputting a signal, and filtering the signal. The detector is separated or divided into a plurality of regions, and the secondary charged particles are detected separately in each region of the detector. Intensity of the filtering is defined in dependence on a function f(θ) of an angle θ between a reference axis and a direction along which the secondary charged particles enter a detector plane. The reference axis is an arbitrary direction in a plane parallel to a surface of the substrate.

Abstract translation: 根据实施例，信号处理方法包括用带电粒子束扫描基板上的图案，通过使用检测器检测从基板发射的二次带电粒子，输出信号并对信号进行滤波。 检测器被分离或分成多个区域，并且在检测器的每个区域中分别检测次级带电粒子。 依赖于参考轴与二次带电粒子进入检测器平面的方向之间的角度θ的函数f（θ）来定义滤波强度。 参考轴是在与基板的表面平行的平面中的任意方向。

公开(公告)号：US20120261573A1

公开(公告)日：2012-10-18

申请号：US13204528

申请日：2011-08-05

Applicant: Pavel ADAMEC

Inventor： Pavel ADAMEC

IPC: H01J37/285

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2449 ,  H01J2237/245

Abstract: A charged particle beam device for inspecting a specimen includes a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; a retarding field device adapted to accelerate secondary charged particles starting from the specimen, a first detector device having a central opening, includes at least two azimuthal detector segments for detecting secondary particles, wherein the objective lens device is adapted such that particles with different starting angles from the specimen exhibit crossovers at substantially the same distance from the specimen between the objective lens and the detector device, and an aperture located between the objective lens and the crossovers, having an opening which is equal to or smaller than the central opening in the detector device.

Abstract translation: 用于检查样本的带电粒子束装置包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 适于加速从样本开始的次级带电粒子的延迟场设备，具有中心开口的第一检测器装置包括至少两个用于检测次级粒子的方位角检测器段，其中物镜装置适于使得起始角度不同的颗粒 来自该样本的物镜在与物镜和检测器装置之间的样本基本上相同的距离处展开交叉，以及位于物镜和交越器之间的孔，其具有等于或小于检测器中的中心开口的开口 设备。

公开(公告)号：US20040041095A1

公开(公告)日：2004-03-04

申请号：US10272467

申请日：2002-10-08

Applicant: KLA Tencor Technologies Corporation

Inventor： Mehran Nasser-Ghodsi ,  Michael Cull

IPC: G21K007/00 ,  G01N023/00

CPC classification number: H01J37/3056 ,  H01J37/304 ,  H01J2237/18 ,  H01J2237/244 ,  H01J2237/245 ,  H01J2237/30466

Abstract: Methods and apparatus are providing for inspecting a test sample. An electron beam is tuned to cause secondary electron emissions upon scanning a target area. Reactive substances are introduced to etch and remove materials and impurities from the scan target. Residual components are evacuated. In one example, a laser is used to irradiate and area to assist in the removal of residual components with poor vapor pressure.

Abstract translation: 方法和装置正在提供检验试样。 调整电子束以在扫描目标区域时引起二次电子发射。 引入反应性物质以从扫描靶中蚀刻和去除材料和杂质。 剩余部件被抽空。 在一个示例中，使用激光器照射和面积以帮助去除具有差的蒸汽压力的残余组分。

公开(公告)号：US09960010B2

公开(公告)日：2018-05-01

申请号：US13601303

申请日：2012-08-31

Applicant: Motoki Kadowaki ,  Osamu Nagano

Inventor： Motoki Kadowaki ,  Osamu Nagano

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28

CPC classification number: H01J37/261 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24485 ,  H01J2237/245 ,  H01J2237/2817

Abstract: In accordance with an embodiment, a signal processing method includes scanning a pattern on a substrate with a charged particle beam, detecting secondary charged particles emitted from the substrate by using a detector, outputting a signal, and filtering the signal. The detector is separated or divided into a plurality of regions, and the secondary charged particles are detected separately in each region of the detector. Intensity of the filtering is defined in dependence on a function f(θ) of an angle θ between a reference axis and a direction along which the secondary charged particles enter a detector plane. The reference axis is an arbitrary direction in a plane parallel to a surface of the substrate.

公开(公告)号：US07705305B2

公开(公告)日：2010-04-27

申请号：US12119916

申请日：2008-05-13

Applicant: Eiko Nakazawa ,  Hiroyuki Kobayashi

Inventor： Eiko Nakazawa ,  Hiroyuki Kobayashi

IPC: G01N23/04

CPC classification number: H01J37/265 ,  H01J2237/245 ,  H01J2237/282

Abstract: There is provided a transmission electron microscope capable of a capturing continuous field-of-view image without having an influence of aberration. In order to obtain an electron beam image of the whole of a predetermined range of a sample, the transmission electron microscope specifies a region with little aberration in a field of view of an image pickup device, moves a sample stage in units of the specified regions, captures the whole of the predetermined range as a plurality of continuous field-of-view images.

Abstract translation: 提供了能够捕获连续视野图像而不会产生像差影响的透射电子显微镜。 为了获得样品的整个预定范围的电子束图像，透射电子显微镜在图像拾取装置的视野中指定几乎没有像差的区域，以指定区域为单位移动样品台 捕获整个预定范围作为多个连续的视野图像。

公开(公告)号：US06943350B2

公开(公告)日：2005-09-13

申请号：US10272467

申请日：2002-10-08

Applicant: Mehran Nasser-Ghodsi ,  Michael Cull

Inventor： Mehran Nasser-Ghodsi ,  Michael Cull

IPC: B68B3/12 ,  G01N23/00 ,  G01N23/225 ,  G01Q10/00 ,  G01Q30/02 ,  G21K7/00 ,  H01L21/66 ,  C23C15/00

CPC classification number: H01J37/3056 ,  H01J37/304 ,  H01J2237/18 ,  H01J2237/244 ,  H01J2237/245 ,  H01J2237/30466

Abstract: Methods and apparatus are providing for inspecting a test sample. An electron beam is tuned to cause secondary electron emissions upon scanning a target area. Reactive substances are introduced to etch and remove materials and impurities from the scan target. Residual components are evacuated. In one example, a laser is used to irradiate and area to assist in the removal of residual components with poor vapor pressure.

Abstract translation: 方法和装置正在提供检验试样。 调整电子束以在扫描目标区域时引起二次电子发射。 引入反应性物质以从扫描靶中蚀刻和去除材料和杂质。 剩余部件被抽空。 在一个示例中，使用激光器照射和面积以帮助去除具有差的蒸汽压力的残余组分。

公开(公告)号：US08530837B2

公开(公告)日：2013-09-10

申请号：US13204528

申请日：2011-08-05

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: H01J37/285 ,  G01N23/00 ,  G21K7/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2449 ,  H01J2237/245

Abstract: A charged particle beam device for inspecting a specimen includes a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; a retarding field device adapted to accelerate secondary charged particles starting from the specimen, a first detector device having a central opening, includes at least two azimuthal detector segments for detecting secondary particles, wherein the objective lens device is adapted such that particles with different starting angles from the specimen exhibit crossovers at substantially the same distance from the specimen between the objective lens and the detector device, and an aperture located between the objective lens and the crossovers, having an opening which is equal to or smaller than the central opening in the detector device.

Abstract translation: 用于检查样本的带电粒子束装置包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 适于加速从样本开始的次级带电粒子的延迟场设备，具有中心开口的第一检测器装置包括至少两个用于检测次级粒子的方位角检测器段，其中物镜装置适于使得起始角度不同的颗粒 来自该样本的物镜在与物镜和检测器装置之间的样本基本上相同的距离处展开交叉，以及位于物镜和交越器之间的孔，其具有等于或小于检测器中的中心开口的开口 设备。

公开(公告)号：US07659506B2

公开(公告)日：2010-02-09

申请号：US11861206

申请日：2007-09-25

Applicant: Michal Avinun-Kalish ,  Jacob Levin ,  Dror Shemesh

Inventor： Michal Avinun-Kalish ,  Jacob Levin ,  Dror Shemesh

IPC: G01N23/22

CPC classification number: G01N23/2202 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/245 ,  H01J2237/2802 ,  H01J2237/2803 ,  H01J2237/31745

Abstract: A system and method for generating a thin sample, the method includes: milling an intermediate section of a thin sample such as to enable an upper portion of the thin sample to tilt in relation to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed. A system and method for inspecting a thin sample, the method includes: A method for inspecting a thin sample, the method comprising: illuminating, by a charged particle beam, a tilted upper portion of a thin sample that is connected, via a milled intermediate section, to a lower portion of the thin sample; wherein the lower portion is connected to a wafer from which the thin sample was formed; and collecting particles and photons resulting from the illumination.

Abstract translation: 一种用于产生薄样品的系统和方法，所述方法包括：铣削薄样品的中间部分，使得薄样品的上部相对于薄样品的下部倾斜; 其中下部连接到形成薄样品的晶片。 一种用于检查薄样品的系统和方法，所述方法包括：一种用于检查薄样品的方法，所述方法包括：通过带电粒子束照射经过研磨的中间体连接的薄样品的倾斜上部分 到薄样品的下部; 其中所述下部连接到形成所述薄样品的晶片; 并收集由照明产生的颗粒和光子。