公开(公告)号：US20150061455A1

公开(公告)日：2015-03-05

申请号：US14475487

申请日：2014-09-02

Applicant: Electronics and Telecommunications Research Institute

Inventor： In Bok BAEK ,  Han Young YU ,  Yark Yeon KIM ,  Young Jun KIM ,  Chang Geun AHN ,  Yong Sun YOON ,  Bong Kuk LEE ,  Ji Eun LIM ,  Won Ick JANG

IPC: B81B7/02 ,  B81C1/00 ,  B81B7/00

CPC classification number: B81B7/02 ,  B81B7/0006 ,  B81B7/0093 ,  B81B2201/0271 ,  B81B2203/0109 ,  B81B2203/0307 ,  B81C1/00142 ,  B81C1/0019 ,  B81C1/0038 ,  B81C1/00539 ,  H02N11/002 ,  H03H3/0072 ,  H03H9/08 ,  H03H9/2463

Abstract: A vibration device including a supporting portion formed to cover both ends of a vibration region, and a method of manufacturing the vibration device are provided. The vibration device may include a lower substrate on which an insulating layer is formed, an upper substrate connected onto the insulating layer, and including a vibration region that vibrates and that is separated from the lower substrate by at least a predetermined distance, and a supporting portion formed to cover both ends of the vibration region, to support the vibration region.

Abstract translation: 提供一种包括形成为覆盖振动区域的两端的支撑部分的振动装置和制造振动装置的方法。 振动装置可以包括下基板，在其上形成有绝缘层，上基板连接到绝缘层上，并且包括振动区域，其振动并且与下基板分离至少预定距离，并且支撑 形成为覆盖振动区域的两端的部分，以支撑振动区域。