Convection thermocouple vacuum gauge
    1.
    发明授权
    Convection thermocouple vacuum gauge 失效
    对流热电偶真空计

    公开(公告)号:US5351551A

    公开(公告)日:1994-10-04

    申请号:US68328

    申请日:1993-05-27

    IPC分类号: G01L21/14

    CPC分类号: G01L21/14

    摘要: A thermocouple vacuum gauge includes a first thermocouple element spaced below a second thermocouple element. The two thermocouple elements are electrically connected in series in a back-to-back manner by connecting together their respective negative ends. A pulse generator supplies a pulsing on-off current only to the first thermocouple element. During the off intervals, a switch connects the positive ends of both thermocouple elements to a voltage measuring and comparing circuit which measures a thermally generated voltage signal between the positive ends of the thermocouple elements and compares the measured voltage signal to a reference signal. The result of the comparison is used to vary the output current of the pulse generator so as to supply an amount of current to the first thermocouple element sufficient to cause the measured voltage signal to approach the reference signal. The amount of current supplied sufficient to cause the measured voltage signal to approach the reference signal is proportional to the amount of pressure or vacuum in an enclosure in which the thermocouples of the vacuum gauge are placed. A method for measuring pressure at partial vacuum which employs these features is also described.

    摘要翻译: 热电偶真空计包括在第二热电偶元件下方间隔开的第一热电偶元件。 两个热电偶元件通过将它们各自的负端连接在一起而以背靠背的方式串联电连接。 脉冲发生器仅向第一热电偶元件提供脉冲开关电流。 在关闭间隔期间,开关将两个热电偶元件的正端连接到电压测量和比较电路,其测量热电偶元件的正端之间的热产生的电压信号,并将测量的电压信号与参考信号进行比较。 比较结果用于改变脉冲发生器的输出电流,以便向第一热电偶元件提供足以使测量的电压信号接近参考信号的电流量。 提供足以使测量的电压信号接近参考信号的电流量与真空计的热电偶放置在其中的外壳中的压力或真空的数量成比例。 还描述了采用这些特征的用于测量部分真空的压力的方法。

    Ionization gauge having a non-time varying magnetic field generator of
separated opposed magnets
    2.
    发明授权
    Ionization gauge having a non-time varying magnetic field generator of separated opposed magnets 失效
    电离计具有分离的相对磁体的非时变磁场发生器

    公开(公告)号:US5568053A

    公开(公告)日:1996-10-22

    申请号:US415085

    申请日:1995-03-31

    IPC分类号: G01L21/34 H01J41/06 G01L21/32

    CPC分类号: H01J41/06 G01L21/34

    摘要: A cold cathode ionization gauge includes a first and second electrode spaced apart and insulated from one another and having a common axis. A magnetic field generator surrounds the gauge and applies a non-time varying magnetic field along the common axis of the electrodes. The magnetic field generator includes at least one pair of opposed axially magnetized magnets adjacent each other. In one embodiment of the invention a non-magnetic annular spacer is placed between the opposed magnets. The magnet arrangement minimizes magnetic flux outside of the gauge while increasing the strength of the magnetic flux inside of the gauge. The magnetic arrangement also allows the gauge to be ignited in a very high vacuum, thereby extending the operating range of the gauge.

    摘要翻译: 冷阴极电离计包括间隔开并彼此绝缘并具有公共轴线的第一和第二电极。 磁场发生器围绕测量仪并且沿着电极的公共轴线施加非时变磁场。 磁场发生器包括彼此相邻的至少一对相对的轴向磁化磁体。 在本发明的一个实施例中,非磁性环形间隔件被放置在相对的磁体之间。 磁体布置使得在量规外部的磁通量最小化,同时增加了量规内的磁通量的强度。 磁性装置还允许在非常高的真空中点燃量规,从而延长量规的工作范围。

    Bayard-alpert vacuum gauge with neutralization of x-ray effect
    3.
    发明授权
    Bayard-alpert vacuum gauge with neutralization of x-ray effect 失效
    具有中和X射线效应的Bayard-alpert真空计

    公开(公告)号:US06257069B1

    公开(公告)日:2001-07-10

    申请号:US09194793

    申请日:1998-10-28

    IPC分类号: G01L900

    CPC分类号: G01L21/34 G01L21/32

    摘要: A Bayard-Alpert gas pressure measuring gauge with x-ray effect neutralization comprising collector and shield electrodes that comprise the same substantially inert electrically conductive substances. Said inert substance may be gold or another substance from the group consisting of platinum and rhodium, and mixtures thereof, and alloys comprising gold, platinum or rhodium; or said substance may be selected from the group consisting of the oxides of indium, chromium, vanadium and tin, mixtures thereof, and alloys comprising one of these. An electrical potential is applied to the shield that is more negative than the potential applied to the collector, said potential on the shield being in the range from about zero volts to about −50 volts when the collector is operated at a positive potential. Said negative potential with respect to the collector enhances the reverse x-ray effect for cancellation of the forward x-ray effect in the gauge. The gauge may also comprise a modified collector geometry to further enhance the reverse x-ray effect to achieve neutralization of the total x-ray effect. A method for neutralization of the x-ray effect by modulating the shield potential is also disclosed.

    摘要翻译: 具有x射线效应中和的Bayard-Alpert气体压力测量计包括收集器和屏蔽电极,其包含相同的基本惰性的导电物质。 所述惰性物质可以是金或来自铂和铑的其它物质及其混合物,以及包含金,铂或铑的合金; 或所述物质可以选自铟,铬,钒和锡的氧化物,其混合物和包含这些之一的合金。 电势被施加到比施加到集电极的电位更负的屏蔽上,当集电极处于正电位时,屏蔽上的电位在约零伏至约-50伏的范围内。 相对于收集器的所述负电位增强反向X射线效应以消除量规中的前X射线效应。 量规还可以包括改进的收集器几何形状,以进一步增强反向x射线效应以实现总X射线效应的中和。 还公开了通过调制屏蔽电位来中和x射线效应的方法。