Method and apparatus for simulating a surface photo-voltage in a substrate
    1.
    发明授权
    Method and apparatus for simulating a surface photo-voltage in a substrate 有权
    用于模拟衬底中表面光电压的方法和装置

    公开(公告)号:US06388455B1

    公开(公告)日:2002-05-14

    申请号:US09483138

    申请日:2000-01-13

    IPC分类号: G01R31302

    CPC分类号: G01R31/2656 G01R31/308

    摘要: This invention relates to a method and apparatus for simulating a surface photo-voltage, more particularly with a photodiode on a process sized disk for calibrating surface photo-voltage measurement devices. The device for simulating a surface photo-voltage includes the photodiode, the disk, a resistor, and may further include an operational amplifier. The apparatus for simulating a surface photo-voltage of the current invention facilitates calibration of surface photo-voltage measurement devices by using a process sized disk to fit directly on a surface photo-voltage measurement chuck.

    摘要翻译: 本发明涉及用于模拟表面光电压的方法和装置,更具体地说,涉及用于校准表面光电压测量装置的工艺尺寸盘上的光电二极管。 用于模拟表面光电压的装置包括光电二极管,盘,电阻器,还可以包括运算放大器。 用于模拟本发明的表面光电压的装置有助于通过使用工艺尺寸的盘直接配合在表面光电压测量卡盘上来校准表面光电压测量装置。

    Digital autozero circuit operable in a plurality of modes with separate
storage for offset corrections for each mode
    2.
    发明授权
    Digital autozero circuit operable in a plurality of modes with separate storage for offset corrections for each mode 失效
    数字自动调零电路可以以多种模式工作,具有用于每种模式的偏移校正的单独存储器

    公开(公告)号:US5053770A

    公开(公告)日:1991-10-01

    申请号:US526067

    申请日:1990-05-18

    摘要: An autozero compensation system for autozeroing the output of a data conversion circuit comprising a floating point amplifier and an analog-to-digital converter. The autozero compensation system comprises a source for generating a desired offset voltage, a plurality of digital counters, one for each gain setting of the amplifier, for storing values which are functions of the offset voltages for the gain settings, and a comparator for comparing the output of the A/D converter with the desired offset. Periodically, each of the counters in the autozero circuit is updated for each gain setting by setting the analog input of the amplifier to system ground and the gain of the amplifier set to each of the gain settings, so that the output of the comparator is used to update each of the counters. The outputs of the counters are each converted to analog form by a D/A converter and used to provide the offset correction voltage to the floating point amplifier.

    摘要翻译: 一种用于对包括浮点放大器和模数转换器的数据转换电路的输出进行自动调零的自动调零补偿系统。 自动归零补偿系统包括用于产生期望的偏移电压的源,多个数字计数器,一个用于放大器的每个增益设置,用于存储作为增益设置的偏移电压的函数的值,以及比较器 输出具有所需偏移的A / D转换器。 周期性地,通过将​​放大器的模拟输入设置为系统地,并且将放大器的增益设置为每个增益设置,对于每个增益设置来更新每个增益设置中的每个计数器,使得使用比较器的输出 更新每个计数器。 计数器的输出各自由D / A转换器转换为模拟形式,用于向浮点放大器提供偏移校正电压。