公开(公告)号：US10446389B2

公开(公告)日：2019-10-15

申请号：US15669238

申请日：2017-08-04

Applicant: Entegris, Inc.

Inventor： Emanuel I. Cooper ,  Jeffery A. Barnes

IPC: H01L21/311 ,  H01L21/02

Abstract: Compositions and methods for removing lanthanoid-containing solids and/or species from the surface of a microelectronic device or microelectronic device fabrication hardware. Preferably, the lanthanoid-containing solids and/or species comprise cerium. The composition is preferably substantially devoid of fluoride ions.

公开(公告)号：US20170338104A1

公开(公告)日：2017-11-23

申请号：US15669238

申请日：2017-08-04

Applicant: Entegris, Inc.

Inventor： Emanuel I. Cooper ,  Jeffery A. Barnes

IPC: H01L21/02 ,  H01L21/311

CPC classification number: H01L21/02076 ,  H01L21/02057 ,  H01L21/31133

Abstract: Compositions and methods for removing lanthanoid-containing solids and/or species from the surface of a microelectronic device or microelectronic device fabrication hardware. Preferably, the lanthanoid-containing solids and/or species comprise cerium. The composition is preferably substantially devoid of fluoride ions.