公开(公告)号：US09617988B2

公开(公告)日：2017-04-11

申请号：US14466115

申请日：2014-08-22

Applicant: Entegris, Inc.

Inventor： Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

IPC: F04B43/02 ,  F04B13/00 ,  F04B49/06

CPC classification number: F04B43/02 ,  F04B13/00 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2205/09

Abstract: Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

公开(公告)号：US20140361046A1

公开(公告)日：2014-12-11

申请号：US14466115

申请日：2014-08-22

Applicant: Entegris, Inc.

Inventor： Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

IPC: F04B43/02

CPC classification number: F04B43/02 ,  F04B13/00 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2205/09

Abstract: Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

Abstract translation: 本发明的实施例提供了一种用于减小泵的保持容积的系统，方法和计算机程序产品。 更具体地，本发明的实施例可以在分配流体之前确定腔室中的隔膜的位置，以减少分配泵和/或进料泵处的滞留体积。 可以基于影响分配操作的一组因素来确定隔膜的该可变原始位置。 示例因素可能包括分配量和错误量。 可以选择隔膜的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持容积的同时执行分配循环的各个步骤。 另外，可以选择隔膜的原位来优化正位移的有效范围。