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    FLOWMETER
    2.
    发明申请
    FLOWMETER 有权
    流量计

    公开(公告)号：US20090308177A1

    公开(公告)日：2009-12-17

    申请号：US12335045

    申请日：2008-12-15

    申请人： Theodorus Simon Josef LAMMERINK ,  Marcel DIJKSTRA ,  Jeroen HANEVELD ,  Remco John WIEGERINK

    发明人： Theodorus Simon Josef LAMMERINK ,  Marcel DIJKSTRA ,  Jeroen HANEVELD ,  Remco John WIEGERINK

    IPC分类号： G01F1/692 ,  G01F1/84

    CPC分类号： G01F1/8472 ,  G01F1/6845 ,  G01F1/6847 ,  G01F1/6888 ,  G01F1/8445

    摘要： A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.

    摘要翻译： 一种流量计，其包括设置在载体上的硅基板的系统芯片，在其中设置有至少一个硅流管的开口，用于输送要测量流量的介质，所述管具有经由壁的两端发出的两端 在硅衬底中开口形成涂有氮化硅的通道，其中流管形成科里奥利流量传感器和/或热流传感器的一部分，并且其中通道优选地通过载体与连接线连接到外部世界 。

    PROCESS OF FABRICATING MICROFLUIDIC DEVICE CHIPS AND CHIPS FORMED THEREBY
    3.
    发明申请
    PROCESS OF FABRICATING MICROFLUIDIC DEVICE CHIPS AND CHIPS FORMED THEREBY 有权
    制造微流化器件的方法及其形成的CHIP

    公开(公告)号：US20090283844A1

    公开(公告)日：2009-11-19

    申请号：US12464426

    申请日：2009-05-12

    申请人： Douglas Ray Sparks

    发明人： Douglas Ray Sparks

    IPC分类号： H01L23/02 ,  H01L21/50

    CPC分类号： B81C1/00119 ,  B01L3/502707 ,  B81B2201/0214 ,  B81B2201/0278 ,  B81B2201/058 ,  G01F1/8445 ,  H01L24/94 ,  H01L2224/48091 ,  H01L2924/01322 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2924/16152 ,  H01L2924/3025 ,  Y10T137/2191 ,  Y10T137/2224 ,  H01L2924/00014 ,  H01L2924/00

    摘要： A process for fabricating multiple microfluidic device chips. The process includes fabricating multiple micromachined tubes in a semiconductor device wafer. The tubes are fabricated so that each tube has an internal fluidic passage and an inlet and outlet thereto defined in a surface of the device wafer. The device wafer is then bonded to a glass wafer to form a device wafer stack, and so that through-holes in the glass wafer are individually fluidically coupled with the inlets and outlets of the tubes. The glass wafer is then bonded to a metallic wafer to form a package wafer stack, so that through-holes in the metallic wafer are individually fluidically coupled with the through-holes of the glass wafer. Multiple microfluidic device chips are then singulated from the package wafer stack. Each device chip has a continuous flow path for a fluid therethrough that is preferably free of organic materials.

    摘要翻译： 一种用于制造多个微流体装置芯片的方法。 该方法包括在半导体器件晶片中制造多个微加工管。 管被制造成使得每个管具有内部流体通道以及限定在器件晶片的表面中的入口和出口。 然后将器件晶片接合到玻璃晶片以形成器件晶片叠层，并且使得玻璃晶片中的通孔与管的入口和出口分别流体耦合。 然后将玻璃晶片接合到金属晶片以形成封装晶片堆叠，使得金属晶片中的通孔与玻璃晶片的通孔独立地流体耦合。 然后从封装晶片堆叠单个多个微流体器件芯片。 每个装置芯片具有用于流过其中的流体的连续流动路径，其优选不含有机材料。

    MICROMECHANICAL SENSOR FOR MEASURING THE MASS FLOW RATE IN ACCORDANCE WITH THE CORIOLIS PRINCIPLE
    4.
    发明申请
    MICROMECHANICAL SENSOR FOR MEASURING THE MASS FLOW RATE IN ACCORDANCE WITH THE CORIOLIS PRINCIPLE 失效
    用于根据CORIOLIS原理测量质量流量的微观传感器

    公开(公告)号：US20090272200A1

    公开(公告)日：2009-11-05

    申请号：US12306012

    申请日：2007-06-15

    申请人： Roman Frahnow ,  Arno Steckenborn

    发明人： Roman Frahnow ,  Arno Steckenborn

    IPC分类号： G01F1/80

    CPC分类号： G01F1/8495 ,  B81B3/0032 ,  B81B2201/0292 ,  B81B2201/058 ,  G01F1/8445 ,  G01F1/8477

    摘要： In a micromechanical sensor (11) for measuring a mass flow rate in accordance with the Coriolis principle, two line sections (13) are mounted in a suspension means (24) such that they can oscillate, as a result of which they can be caused to oscillate in phase opposition (essential for the measuring principle). A spacer layer (18) is provided between the layers (12a, 12b) forming the line sections (13), the spacer layer ensuring that there is a space between the line sections (13) in the quiescent state. Oscillation of the line sections in phase opposition only becomes possible at all as a result of this since this prevents collision of the line sections (13) as they approach one another.

    摘要翻译： 在用于根据科里奥利原理测量质量流量的微机械传感器（11）中，两个线段（13）安装在悬挂装置（24）中，使得它们可以振荡，结果可能导致它们 以相反的方式振荡（对测量原理至关重要）。 间隔层（18）设置在形成线路段（13）的层（12a，12b）之间，间隔层确保在静止状态下的线段（13）之间存在空间。 因此，由于这样可以防止线路部分（13）在彼此接近时发生碰撞，所以相位相反的线路部分的振荡完全是可能的。

    Ultrasonic-densiometer mass flow sensor for use in flow metering units
    5.
    发明授权
    Ultrasonic-densiometer mass flow sensor for use in flow metering units 有权
    用于流量计的超声波密度计质量流量传感器

    公开(公告)号：US07600417B2

    公开(公告)日：2009-10-13

    申请号：US11304273

    申请日：2005-12-15

    申请人： Bruce Paradise

    发明人： Bruce Paradise

    IPC分类号： G01M15/04

    CPC分类号： G01F1/8445 ,  F01D17/08 ,  F02C9/26 ,  F05D2270/30 ,  F05D2270/303 ,  G01F1/667 ,  G01F1/86

    摘要： A fuel delivery system uses a volumetric flow sensor and a densiometer to measure a mass flow rate of the fuel. A densiometer may be a coriolis mass flow sensor etched into a small circuit chip. As fuel flows past the densiometer a density of the fuel and characteristic slope as a function of temperature is determined. At least one temperature sensor is also located on the circuit chip to provide accurate temperature of the fuel to correspond to the fuel density reading. Piezoelectric crystals in the volumetric flow sensor generate and receive a sound wave. By analyzing the sound wave signals the volumetric flow rate of fluid through the volumetric flow sensor can be calculated. At least one temperature sensor is also placed on the volumetric flow sensor to correct for any thermal expansion of an inner diameter of the volumetric flow sensor and for final mass flow calculation. The density and temperature information from the densiometer and the volumetric flow and temperature information from the volumetric flow sensor are used to determine the density of the fuel at the volumetric flow sensor. By using the density calculated at the volumetric flow sensor and using the volumetric flow information an accurate mass flow rate of the fuel at the volumetric flow sensor can be calculated.

    摘要翻译： 燃料输送系统使用体积流量传感器和密度计来测量燃料的质量流量。 密度计可以是蚀刻到小电路芯片中的科里奥利质量流量传感器。 当燃料流过密度计时，确定燃料的密度和作为温度的函数的特征斜率。 至少一个温度传感器也位于电路芯片上，以提供燃料的精确温度以对应于燃料密度读数。 体积流量传感器中的压电晶体产生并接收声波。 通过分析声波信号，可以计算通过体积流量传感器的流体的体积流量。 至少一个温度传感器也放置在体积流量传感器上，以校正体积流量传感器内径的任何热膨胀，并进行最终的质量流量计算。 来自密度计的密度和温度信息以及来自体积流量传感器的体积流量和温度信息用于确定体积流量传感器处的燃料密度。 通过使用在体积流量传感器处计算的密度并使用体积流量信息，可以计算体积流量传感器处的燃料的精确质量流量。

    Fluid system and method of assessing a property of a fluid flowing therein
    6.
    发明授权
    Fluid system and method of assessing a property of a fluid flowing therein 有权
    流体系统和评估其中流动的流体的性质的方法

    公开(公告)号：US07263882B2

    公开(公告)日：2007-09-04

    申请号：US11420491

    申请日：2006-05-26

    申请人： Douglas Ray Sparks ,  Nader Najafi

    发明人： Douglas Ray Sparks ,  Nader Najafi

    IPC分类号： G01F1/68

    CPC分类号： B60T17/18 ,  G01F1/8445 ,  G01F1/8472 ,  Y10T137/0324

    摘要： A fluid system installed on a vehicle and a method for assessing a property of a fluid flowing in the fluid system. The fluid system and method entail flowing at least a portion of the fluid through a passage within a freestanding portion of a micromachined tube supported above a substrate so as to define a gap therebetween, vibrating the freestanding portion of the micromachined tube at a resonant frequency thereof, sensing the movement of the freestanding portion of the micromachined tube so as to measure at least one of the vibration frequency and deflection of the freestanding portion relative to the substrate and produce therefrom at least one output corresponding to at least one of the mass flow rate, specific gravity, and density of the portion of the fluid flowing through the passage, and then using the output to compute the property of the fluid.

    摘要翻译： 安装在车辆上的流体系统和用于评估在流体系统中流动的流体的性质的方法。 流体系统和方法需要使流体的至少一部分流过支撑在基底上的微加工管的独立部分内的通道，以便在其间形成间隙，使微机械管的独立部分以共振频率振动 感测所述微加工管的所述独立部分的运动，以便测量所述独立部分相对于所述基板的振动频率和偏转中的至少一个，并从其产生至少一个对应于质量流率 ，比重和密度，然后使用输出来计算流体的性质。

    FLUID SENSING DEVICE WITH INTEGRATED BYPASS AND PROCESS THEREFOR
    7.
    发明申请
    FLUID SENSING DEVICE WITH INTEGRATED BYPASS AND PROCESS THEREFOR 有权
    具有集成旁路的流体感应装置及其过程

    公开(公告)号：US20060169038A1

    公开(公告)日：2006-08-03

    申请号：US11164374

    申请日：2005-11-21

    申请人： Douglas Sparks ,  Nader Najafi

    发明人： Douglas Sparks ,  Nader Najafi

    IPC分类号： G01F5/00

    CPC分类号： G01F1/8472 ,  G01F1/8413 ,  G01F1/8445 ,  G01N9/002 ,  G01N2009/006

    摘要： A micromachined fluid sensing device and a method for its fabrication. The sensing device incorporates a bypass passage, preferably an integral bypass passage within the device, that enables a volume of fluid to be delivered to the device, with a limited portion of the fluid passing through a passage within the device in which one or more properties of the fluid are sensed, such as but not limited to density, specific gravity, and chemical concentrations. The device is suitable for monitoring the fuel concentration in a fuel mixture for a fuel cell.

    摘要翻译： 一种微机械流体感测装置及其制造方法。 感测装置包括旁路通道，优选地在装置内的整体旁路通道，其使得能够将体积的流体输送到装置，流体的有限部分通过装置内的通道，其中一个或多个特性 的液体，例如但不限于密度，比重和化学浓度。 该装置适用于监测用于燃料电池的燃料混合物中的燃料浓度。

    Integrated microtube sensing device
    8.
    发明授权
    Integrated microtube sensing device 有权

    公开(公告)号：US06647778B2

    公开(公告)日：2003-11-18

    申请号：US10064190

    申请日：2002-06-20

    申请人： Douglas Ray Sparks

    发明人： Douglas Ray Sparks

    IPC分类号： G01F168

    CPC分类号： G01F1/8445 ,  G01N2009/006

    摘要： A sensing device that comprises a micromachined tube on a substrate for resonant sensing of mass flow and density of a fluid flowing through the tube. The sensing device further incorporates on the same substrate at least a second micromachined tube configured for sensing another property of the fluid, such as pressure, viscosity and/or temperature.

    Coriolis effect transducer
    9.
    发明申请
    Coriolis effect transducer 有权
    科里奥利效应传感器

    公开(公告)号：US20020083757A1

    公开(公告)日：2002-07-04

    申请号：US10032640

    申请日：2001-12-28

    申请人： Entire Interest

    发明人： John Albert Geen

    IPC分类号： G01P021/00

    CPC分类号： G01F1/8445 ,  G01C19/5719 ,  G01C25/005 ,  G01F25/0007

    摘要： A method for testing a Coriolis transducer having a mass adapted vibrate along a vibratory direction in a resonant structure and undergo a displacement along a sensitive axis, perpendicular to the vibration, in response to an angular rate about a mutually perpendicular rate sensing axis. In the absence of an angular rate about the rate sensing axis, forces, FTEST VIBRATORY and FTEST SENSITIVE, are applied on the mass along the direction of vibration and along the sensitive axis, respectively, in a predetermined ratio, N. The output VOUT TEST of the transducer is measured in response to the forces, FTEST VIBRATORY and FTEST SENSITIVE. With such method, a known test input angular rate nullIN TEST SIM is simulated, such rate, nullIN TEST SIM, being a known function of a measured characteristic frequency, for example the resonant bandwidth, BW, of the resonant structure. Thus, the proportionality constant KnullVOUT/nullINnullVOUT TEST/nullIN TEST SIM can be calculated without expensive rate table testing. Further, because the test can be performed with a transducer prior to packaging, electronics integrally formed on the same semiconductor wafer of the mechanical transduction structure may be easily trimmed to provide a desired proportionality constant K. The transducer is micromachined with the mechanism used to apply the force, FTEST VIBRATORY, and the mechanism used to apply the force, FTEST SENSITIVE, in proximate regions of the transducer so that they have matched physical and electrical characteristics. Thus, manufacturing variations incurred in the formation of one of the force mechanisms occur to the other one of the force mechanisms with their size ratio being independent of such variations.

    摘要翻译： 一种用于测试质心的科里奥利换能器的方法，所述科里奥利换能器响应于围绕相互垂直的速率感测轴线的角速率，沿着振动方向在谐振结构中振动并且沿垂直于振动的敏感轴进行位移。 在没有关于速率感测轴的角速率的情况下，力FTEST VIBRATORY和FTEST SENSITIVE分别沿着振动方向和沿着敏感轴分别以预定比率N施加在质量上。输出VOUT TEST 的传感器响应于FTEST VIBRATORY和FTEST SENSITIVE的力量来测量。 利用这种方法，模拟已知的测试输入角速度OMEGAIN TEST SIM，这样的速率OMEGAIN TEST SIM是测量的特征频率的已知函数，例如谐振结构的谐振带宽BW。 因此，可以在没有昂贵的速率表测试的情况下计算比例常数K = VOUT / OMEGAIN = VOUT TEST / OMEGAIN TEST SIM。 此外，由于可以在封装之前用换能器进行测试，所以可以容易地修整在机械转导结构的相同半导体晶片上整体形成的电子线以提供期望的比例常数K.换能器用用于应用的机构进行微加工 力，FTEST振动和用于在传感器的邻近区域施加力FTEST SENSITIVE的机制，使其具有匹配的物理和电气特性。 因此，在其中一个力机构的形成中产生的制造变化发生在另一个力机构上，其尺寸比不依赖于这种变化。