Interferometer calibration methods and apparatus
    7.
    发明授权
    Interferometer calibration methods and apparatus 有权
    干涉仪校准方法和装置

    公开(公告)号:US07110122B2

    公开(公告)日:2006-09-19

    申请号:US10897238

    申请日:2004-07-21

    IPC分类号: G01B9/02 G02B27/00

    摘要: A method for calibrating an interferometer uses an actuator adapted to control an optical gap in response to application of an electrical signal. The interferometer is illuminated with a beam of light having a predetermined substantially monochromatic wavelength, oriented at a first predetermined angle of incidence, and light reflected from the interferometer at a second predetermined angle is detected while varying an electrical signal applied to the actuator, thereby establishing a calibrated relationship between the applied electrical signal and an optical path length of the interferometer.

    摘要翻译: 用于校准干涉仪的方法使用适于响应于电信号的应用来控制光学间隙的致动器。 用具有预定的基本单色波长的光束照射干涉仪,其以第一预定入射角定向,并且在改变施加到致动器的电信号的同时检测到以第二预定角度从干涉仪反射的光,从而建立 所施加的电信号和干涉仪的光路长度之间的校准关系。

    Method and apparatus for controlling a gap between conductors in an electro-mechanical device
    8.
    发明授权
    Method and apparatus for controlling a gap between conductors in an electro-mechanical device 失效
    用于控制机电装置中的导体之间的间隙的方法和装置

    公开(公告)号:US07656573B2

    公开(公告)日:2010-02-02

    申请号:US10782593

    申请日:2004-02-18

    IPC分类号: G02B26/00 G02B26/08 G02F1/29

    CPC分类号: G02B26/0808

    摘要: A method and apparatus for controlling a gap between conductors in an electro-mechanical device by controlled displacement of a displaceable conductor within the electro-mechanical device is provided. The apparatus includes a current controller configured to generate a controlled current output for the electro-mechanical device in response to a control signal, the current controller selectively routing a voltage to an array element including control circuitry and the electro-mechanical device.

    摘要翻译: 提供了一种用于通过控制机电装置内的位移导体的位移来控制机电装置中的导体之间的间隙的方法和装置。 该装置包括电流控制器,其被配置为响应于控制信号而产生用于机电装置的受控电流输出,电流控制器选择性地将电压路由到包括控制电路和机电装置的阵列元件。

    Electrostatic device
    9.
    发明授权
    Electrostatic device 失效
    静电装置

    公开(公告)号:US07486263B2

    公开(公告)日:2009-02-03

    申请号:US10794636

    申请日:2004-03-05

    IPC分类号: G09G3/34

    摘要: An electronic device includes a first member, and a second member which includes segments. At least one of the first member and the second member is movable relative to the other of the first member and the second member among a plurality of distinct positions as a result of differing voltage states of the segments.

    摘要翻译: 电子设备包括第一构件和包括段的第二构件。 作为段的不同电压状态的结果,第一构件和第二构件中的至少一个可相对于第一构件和第二构件中的另一个在多个不同位置之间移动。

    Selective update of micro-electromechanical device
    10.
    发明授权
    Selective update of micro-electromechanical device 失效
    微机电装置的选型更新

    公开(公告)号:US07358966B2

    公开(公告)日:2008-04-15

    申请号:US10428182

    申请日:2003-04-30

    IPC分类号: G02B26/00

    摘要: The present invention provides a data controller for controlling an electrostatically-controlled micro-electromechanical system (MEMS) device having a variable operating characteristic based on control data. The data controller comprises a data comparator and an update circuit. The data comparator is configured to receive control data of a present update cycle, to compare the control data of the present update cycle to control data of a previous update cycle on which the variable operating characteristic of the MEMS device is presently based, and to provide an update signal having a first state when the control data of the present update cycle is substantially equal to the control data of the previous update cycle. The update circuit is configured to receive the control data of the present update cycle, to receive the update signal, and to provide the control data of the present update cycle to the MEMS device, wherein the update circuit does not provide the control data of the present update cycle to the MEMS device when the update signal is in the first state.

    摘要翻译: 本发明提供了一种用于基于控制数据控制具有可变操作特性的静电控制微机电系统(MEMS)装置的数据控制器。 数据控制器包括数据比较器和更新电路。 数据比较器被配置为接收当前更新周期的控制数据,以将当前更新周期的控制数据与目前基于MEMS器件的可变工作特性的先前更新周期的控制数据进行比较,并且提供 当本更新周期的控制数据基本上等于先前更新周期的控制数据时具有第一状态的更新信号。 更新电路被配置为接收当前更新周期的控制数据,以接收更新信号,并且向MEMS设备提供当前更新周期的控制数据,其中更新电路不提供控制数据 当更新信号处于第一状态时,到MEMS器件的当前更新周期。