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公开(公告)号:US07426420B2
公开(公告)日:2008-09-16
申请号:US11307288
申请日:2006-01-31
IPC分类号: G06F19/00
CPC分类号: G05B19/41865 , G05B2219/32247 , G05B2219/35532 , G05B2219/45031 , G07F17/32 , G07F17/3262 , G07F17/3295 , Y02P90/18 , Y02P90/20 , Y02P90/86 , Y10S707/99943
摘要: A system for dispatching a plurality of semiconductor lots among a plurality of tools is provided. The system includes a dispatch server manager and a dispatch integrator and display device. The dispatch integrator and display device conveys a dispatch request to the manager and receives a dispatch list from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code related to the processing status.
摘要翻译: 提供了一种用于在多个工具中调度多个半导体块的系统。 该系统包括调度服务器管理器和调度集成器和显示设备。 调度积分器和显示设备向管理者传送调度请求,并从管理器接收调度列表。 管理者查询多个半导体块的处理状态,并响应处理状态显示调度列表。 调度列表包括与处理状态相关的相关原因和/或代码。
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公开(公告)号:US20060282187A1
公开(公告)日:2006-12-14
申请号:US11307288
申请日:2006-01-31
申请人: Eric Dickstein , Alan Dziedzic , Richard Burda
发明人: Eric Dickstein , Alan Dziedzic , Richard Burda
IPC分类号: G06F19/00
CPC分类号: G05B19/41865 , G05B2219/32247 , G05B2219/35532 , G05B2219/45031 , G07F17/32 , G07F17/3262 , G07F17/3295 , Y02P90/18 , Y02P90/20 , Y02P90/86 , Y10S707/99943
摘要: A system for dispatching a plurality of semiconductor lots among a plurality of tools is provided. The system includes a dispatch server manager and a dispatch integrator and display device. The dispatch integrator and display device conveys a dispatch request to the manager and receives a dispatch list from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code related to the processing status.
摘要翻译: 提供了一种用于在多个工具中调度多个半导体块的系统。 该系统包括调度服务器管理器和调度集成器和显示设备。 调度积分器和显示设备向管理者传送调度请求,并从管理器接收调度列表。 管理者查询多个半导体块的处理状态,并响应处理状态显示调度列表。 调度列表包括与处理状态相关的相关原因和/或代码。
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