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公开(公告)号:US20120011624A1
公开(公告)日:2012-01-12
申请号:US13072343
申请日:2011-03-25
申请人: Erik J. LUBER , Colin OPHUS , David MITLIN , Brian OLSEN , Christopher HARROWER , Velimir RADMILOVIC
发明人: Erik J. LUBER , Colin OPHUS , David MITLIN , Brian OLSEN , Christopher HARROWER , Velimir RADMILOVIC
IPC分类号: G01Q60/38
CPC分类号: G01Q60/40
摘要: An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.
摘要翻译: 全金属微器件或纳米器件如原子力显微镜探针由具有x射线无定形微结构的铜 - 铪合金薄膜制成。
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公开(公告)号:US20080171219A1
公开(公告)日:2008-07-17
申请号:US11831434
申请日:2007-07-31
申请人: David MITLIN , Colin OPHUS , Stephane EVOY , Velimir RADMILOVIC , Reza MOHAMMADI , Ken WESTRA , Nathaniel NELSON-FITZPATRICK , Zonghoon LEE
发明人: David MITLIN , Colin OPHUS , Stephane EVOY , Velimir RADMILOVIC , Reza MOHAMMADI , Ken WESTRA , Nathaniel NELSON-FITZPATRICK , Zonghoon LEE
CPC分类号: C23C14/165 , B81B2203/0118 , B81C1/00666 , B81C1/00674 , B82Y30/00 , C23C14/025 , Y10S977/732 , Y10S977/81 , Y10T428/12431
摘要: A thin-film composition of nanocrystal molybdenum in an amorphous metallic matrix may be formed by co-sputtering Mo with aluminum or nickel. NEMS cantilevers may be formed from the film. The films exhibit high nanoindentation hardness and a reduction in roughness and intrinsic stress, while maintaining resistivity in the metallic range.
摘要翻译: 非晶金属基体中的纳米晶体钼的薄膜组成可以通过与铝或镍共溅射Mo来形成。 NEMS悬臂可以由膜形成。 该膜具有高的纳米压痕硬度和粗糙度和固有应力的降低,同时保持金属范围内的电阻率。
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