Bellows support structure and slide table device

    公开(公告)号:US10280976B2

    公开(公告)日:2019-05-07

    申请号:US15693993

    申请日:2017-09-01

    Abstract: A support structure for a bellows attached to a slide table, and which is capable of expanding and contracting in a movement direction of the slide table, includes support members that support the bellows, shafts disposed substantially in parallel with the movement direction of the slide table, and bushes that support the support member so as to be capable of moving in the movement direction of the slide table with respect to the shafts. Fluid bearings are formed by supplying a fluid between the bushes and the shafts.

    Air balance mechanism and method of adjusting posture of the air balance mechanism

    公开(公告)号:US10377006B2

    公开(公告)日:2019-08-13

    申请号:US15782823

    申请日:2017-10-12

    Inventor: Yuuta Hayakawa

    Abstract: An air balance mechanism includes a plate part, fixed shafts, and movable cylinders. A flange is provided at one end of each of the fixed shafts. The movable cylinders are movable relative to the fixed shafts. A space is formed below a lower surface of the flange. Further, the air balance mechanism includes fixing bolts and adjusting bolts. The fixing bolts fix the flange and a plate part at positions different from the space. The adjusting bolts are inserted into the plate part through the space for allowing the postures of the fixed shafts to be adjustable.

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