公开(公告)号：US09875879B2

公开(公告)日：2018-01-23

申请号：US15243753

申请日：2016-08-22

Applicant: FEI Company

Inventor： Jeroen De Boeij ,  Johannes Antonius Maria Van den Oetelaar ,  Albert Visscher

IPC: H01J37/26 ,  H01J37/24 ,  H01J37/20 ,  H01J37/244 ,  H01J37/22

CPC classification number: H01J37/24 ,  H01J37/20 ,  H01J37/226 ,  H01J37/244 ,  H01J37/265 ,  H01J37/268 ,  H01J2237/0216

Abstract: A method of using a Charged Particle Microscope comprising: A specimen holder, connected to a positioning stage, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation, comprising the following steps: Providing the microscope with an interferential optical position sensor for determining a position of said specimen holder relative to a reference; Providing an automatic controller with a time-dependent position signal from said optical position sensor; Invoking said controller to use said signal to produce a vibration profile for the microscope.

公开(公告)号：US20170125209A1

公开(公告)日：2017-05-04

申请号：US15243753

申请日：2016-08-22

Applicant: FEI Company

Inventor： Jeroen De Boeij ,  Johannes Antonius Maria Van den Oetelaar ,  Albert Visscher

IPC: H01J37/24 ,  H01J37/244 ,  H01J37/22 ,  H01J37/20

CPC classification number: H01J37/24 ,  H01J37/20 ,  H01J37/226 ,  H01J37/244 ,  H01J37/265 ,  H01J37/268 ,  H01J2237/0216

Abstract: A method of using a Charged Particle Microscope comprising: A specimen holder, connected to a positioning stage, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation, comprising the following steps: Providing the microscope with an interferential optical position sensor for determining a position of said specimen holder relative to a reference; Providing an automatic controller with a time-dependent position signal from said optical position sensor; Invoking said controller to use said signal to produce a vibration profile for the microscope.