公开(公告)号：US20170370799A1

公开(公告)日：2017-12-28

申请号：US15189892

申请日：2016-06-22

申请人： FREESCALE SEMICONDUCTOR INC.

发明人： PETER T. JONES ,  ARVIND SALIAN ,  WILLIAM D. MCWHORTER ,  CHAD KRUEGER ,  JOHN SHIPMAN ,  MICHAEL NAUMANN ,  LARRY D. METZLER ,  TRIPTI REGMI

IPC分类号： G01M7/08 ,  B81C99/00

CPC分类号： G01M7/08 ,  B81B2201/0235 ,  B81C99/0045 ,  B81C99/005

摘要： Methods and apparatuses are provided for evaluating or testing stiction in Microelectromechanical Systems (MEMS) devices utilizing a mechanized shock pulse generation approach. In one embodiment, the method includes the step or process of loading a MEMS device, such as a multi-axis MEMS accelerometer, into a socket provided on a Device-Under-Test (DUT) board. After loading the MEMS device into the socket, a series of controlled shock pulses is generated and transmitted through the MEMS device utilizing a mechanized test apparatus. The mechanized test apparatus may, for example, repeatedly move the DUT board over a predefined motion path to generate the controlled shock pulses. In certain cases, transverse vibrations may also be directed through the tested MEMS device in conjunction with the shock pulses. An output of the MEMS device is then monitored to determine whether stiction of the MEMS device occurs during each of the series of controlled shock pulses.