公开(公告)号：US20180052185A1

公开(公告)日：2018-02-22

申请号：US15243767

申请日：2016-08-22

Applicant: FREESCALE SEMICONDUCTOR INC.

Inventor： MARGARET LESLIE KNIFFIN ,  KEITH KRAVER

IPC: G01P21/00 ,  G01P15/125

CPC classification number: G01P21/00 ,  G01D18/008 ,  G01L27/002 ,  G01P15/125

Abstract: Devices, systems and methods are provided for calibrating a transducer. One exemplary method involves determining a transfer function for the transducer based on a measured response of the transducer to an applied electrical signal, determining a set of values for a plurality of response parameters associated with the transducer based on the transfer function, determining a calibration coefficient value associated with the transducer based at least in part on the set of values and a correlation between physical sensitivity and the plurality of response parameters, and storing the calibration coefficient value in association with the transducer.

公开(公告)号：US20170003315A1

公开(公告)日：2017-01-05

申请号：US14962328

申请日：2015-12-08

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： JEROME ROMAIN ENJALBERT ,  MARGARET LESLIE KNIFFIN ,  ANDREW C. MCNEIL

IPC: G01P21/00 ,  G01P15/125

CPC classification number: G01P21/00 ,  G01P15/125

Abstract: A micro-electro-mechanical system (MEMS) device comprises a micro-electro-mechanical system (MEMS) sensor; a detector circuit; a controller circuit coupled with the MEMS sensor; a first connection arranged between a first output of the MEMS sensor and a first input of the detector circuit; a second connection arranged between a second output of the MEMS sensor and a second input of the detector circuit; and a first switch arranged in the first connection. The controller circuit is configured to open the first switch during a first test mode so as to connect only a single input of the detector circuit with an output of the MEMS sensor. A further switch may be provided to connect two outputs of the MEMS sensor to a single input of the detector circuit.

Abstract translation: 微电子机械系统（MEMS）装置包括微机电系统（MEMS）传感器; 检测器电路; 与MEMS传感器耦合的控制器电路; 布置在所述MEMS传感器的第一输出端和所述检测器电路的第一输入端之间的第一连接; 布置在所述MEMS传感器的第二输出端和所述检测器电路的第二输入端之间的第二连接; 以及布置在第一连接中的第一开关。 控制器电路被配置为在第一测试模式期间打开第一开关，以便仅将检测器电路的单个输入与MEMS传感器的输出连接。 可以提供另一开关以将MEMS传感器的两个输出连接到检测器电路的单个输入。