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    Forming A Funnel-Shaped Nozzle
    2.
    发明申请
    Forming A Funnel-Shaped Nozzle 审中-公开
    形成漏斗形喷嘴

    公开(公告)号：US20140022304A1

    公开(公告)日：2014-01-23

    申请号：US14033598

    申请日：2013-09-23

    Applicant: FUJIFILM Corporation

    Inventor： Gregory De Brabander ,  Mark Nepomnishy ,  John A. Higginson

    IPC: B41J2/14

    CPC classification number: B41J2/1433 ,  B41J2/14233 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2002/14475 ,  B41J2202/11

    Abstract: Techniques are provided for making a funnel-shaped nozzle in a semiconductor substrate. The funnel-shaped recess includes a straight-walled bottom portion and a curved top portion having a curved sidewall gradually converging toward and smoothly joined to the straight-walled bottom portion, and the curved top portion encloses a volume that is substantially greater than a volume enclosed by the straight-walled bottom portion.

    Abstract translation: 提供了在半导体衬底中制作漏斗形喷嘴的技术。 漏斗状凹部包括直壁的底部部分和弯曲的顶部部分，该弯曲的顶部部分具有朝向并顺利地连接到直壁底部的弯曲侧壁，并且弯曲的顶部部分包围大体积大于体积的体积 由直壁底部包围。

    Forming a membrane having curved features
    3.
    发明授权
    Forming a membrane having curved features 有权
    形成具有弯曲特征的膜

    公开(公告)号：US09159899B2

    公开(公告)日：2015-10-13

    申请号：US13892489

    申请日：2013-05-13

    Applicant: FUJIFILM Corporation

    Inventor： Gregory De Brabander ,  Mark Nepomnishy

    IPC: H01L41/053 ,  B41J2/14 ,  B41J2/16 ,  H01L29/06

    CPC classification number: H01L41/053 ,  B41J2/14209 ,  B41J2/14233 ,  B41J2/1609 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14266 ,  H01L29/06 ,  H01L41/098 ,  H01L41/331

    Abstract: Processes for making a membrane having a curved feature are disclosed. Recesses each in the shape of a reversed, truncated pyramid are formed in a planar substrate surface by KOH etching through a mask. An oxide layer is formed over the substrate surface. The oxide layer can be stripped leaving rounded corners between different facets of the recesses in the substrate surface, and the substrate surface can be used as a profile-transferring substrate surface for making a membrane having concave curved features. Alternatively, a handle layer is attached to the oxide layer and the substrate is removed until the backside of the oxide layer becomes exposed. The exposed backside of the oxide layer includes curved portions protruding away from the handle layer, and can provide a profile-transferring substrate surface for making a membrane having convex curved features.

    Abstract translation: 公开了制造具有弯曲特征的膜的方法。 通过通过掩模的KOH蚀刻，在平面基板表面中形成各自呈倒棱锥形的凹部。 在衬底表面上形成氧化物层。 可以剥离氧化物层，在衬底表面中的凹槽的不同面之间留下圆角，并且衬底表面可以用作用于制造具有凹曲面特征的膜的轮廓转移衬底表面。 或者，将手柄层附接到氧化物层，并且去除衬底直到氧化物层的背面露出。 氧化物层的暴露背面包括远离手柄层突出的弯曲部分，并且可以提供用于制造具有凸形弯曲特征的膜的轮廓转移衬底表面。

    Durable Non-Wetting Coating on Fluid Ejector
    5.
    发明申请
    Durable Non-Wetting Coating on Fluid Ejector 审中-公开
    流体喷射器上耐用的非润湿涂层

    公开(公告)号：US20130344630A1

    公开(公告)日：2013-12-26

    申请号：US13974794

    申请日：2013-08-23

    Applicant: FUJIFILM Corporation

    Inventor： Mark Nepomnishy ,  Gregory De Brabander ,  Andreas Bibl

    IPC: H01L29/66

    CPC classification number: H01L29/66007 ,  B41J2/1606 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642

    Abstract: A method of forming a nozzle plate of a fluid ejection device includes etching a bore in the first side of the multi-layer substrate, depositing a liner in the bore, removing a layer from a second side of the multi-layer substrate, wherein the removing exposes a closed end of the liner, applying a non-wetting coating to the closed end of the liner and an area surrounding the closed end of the liner, and removing the closed end of the liner, wherein removing the closed end of the liner opens a nozzle.

    Abstract translation: 形成流体喷射装置的喷嘴板的方法包括蚀刻多层基板的第一侧中的孔，在孔中沉积衬垫，从多层衬底的第二侧移除层，其中 去除暴露衬套的封闭端，将不湿润涂层施加到衬垫的封闭端和围绕衬套封闭端的区域，以及去除衬套的封闭端，其中移除衬套的封闭端 打开一个喷嘴。

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