公开(公告)号：US20200041007A1

公开(公告)日：2020-02-06

申请号：US16519389

申请日：2019-07-23

Applicant: FUJIKIN INCORPORATED

Inventor： Tomohiro NAKATA ,  Tatsuhiko SATO ,  Takeru MIURA

IPC: F16K1/52 ,  F16K31/122 ,  H01L21/67

Abstract: To provide a valve device capable of easily and precisely adjusting a flow rate of a flowing fluid, and an actuator used in the valve device. The problem is solved by an actuator including pistons housed in a housing, a supply port of compressed air provided to a casing constituting the housing, and an adjustment member that is provided to a position separated from the supply port and regulates an upper limit position of possible movement of the piston that comes into contact with the adjustment member. The piston comes into contact with the adjustment member and is positioned in the upper limit position when compressed air is supplied through the supply port. The adjustment member s provided so as to allow adjustment of the upper limit position from outside the housing.

公开(公告)号：US20210262577A1

公开(公告)日：2021-08-26

申请号：US17259329

申请日：2019-06-18

Applicant: FUJIKIN INCORPORATED

Inventor： Tatsuhiko SATO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Takeru MIURA

IPC: F16K7/16 ,  F16K27/02 ,  H01L21/67 ,  C23C16/455

Abstract: A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess 23 of the valve body 2, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.

公开(公告)号：US20200149653A1

公开(公告)日：2020-05-14

申请号：US16733743

申请日：2020-01-03

Applicant: FUJIKIN INCORPORATED

Inventor： Takeru MIURA ,  Tsutomu SHINOHARA ,  Tomohiro NAKATA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Kenta KONDO ,  Hidenobu SATO ,  Tomoko YUHARA

IPC: F16K31/122 ,  F15B15/14

Abstract: An actuator includes a casing having a first annular groove formed in an inner peripheral portion thereof; a piston having a second annular groove formed in an outer peripheral portion thereof, provided in the casing to form a pressure chamber together with the casing, and driven by a drive fluid from an outside of the actuator; and an annular seal member having a first fitting portion to be fitted into the first annular groove and a second fitting portion to be fitted into the second annular groove to seal the pressure chamber.

公开(公告)号：US20200088307A1

公开(公告)日：2020-03-19

申请号：US16618912

申请日：2018-06-06

Applicant: FUJIKIN INCORPORATED

Inventor： Takeru MIURA ,  Tomohiro NAKATA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Kenta KONDO ,  Hidenobu SATO

IPC: F16K7/16 ,  F16K31/50

Abstract: A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.