公开(公告)号：US20210207722A1

公开(公告)日：2021-07-08

申请号：US17212406

申请日：2021-03-25

Applicant: FUJIKIN INCORPORATED

Inventor： Nobuo NAKAMURA ,  Kenta KONDO ,  Tomohiro NAKATA ,  Masahiko NAKAZAWA

IPC: F16K7/16 ,  F16K27/02

Abstract: A valve device includes: a valve device body including a valve seat; a diaphragm that is provided to cover a valve chamber; a stem; and a valve body portion that is inserted into a central portion of the diaphragm, and that is configured to open and close the fluid passage by approaching the valve seat and separating from the valve seat. The diaphragm includes a main diaphragm, and a support diaphragm positioned on an opposite side of the main diaphragm to the valve chamber side and provided in contact with the main diaphragm. A first terminal end portion on an inner peripheral side of the main diaphragm is fixed to the valve body portion. A second terminal end portion on an inner peripheral side of the support diaphragm is separated from the first terminal end portion on the inner peripheral side of the main diaphragm.

公开(公告)号：US20220196163A1

公开(公告)日：2022-06-23

申请号：US17425974

申请日：2020-01-17

Applicant: FUJIKIN INCORPORATED

Inventor： Daihi TSUCHIGUCHI ,  Toshihide YOSHIDA ,  Ryutaro TANNO ,  Yuya SUZUKI ,  Kenta KONDO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Masahiko TAKIMOTO

IPC: F16K7/16 ,  F16K31/122 ,  F16K37/00 ,  F16K31/00

Abstract: A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.

公开(公告)号：US20200370671A1

公开(公告)日：2020-11-26

申请号：US16763731

申请日：2018-11-12

Applicant: FUJIKIN INCORPORATED

Inventor： Masahiko TAKIMOTO ,  Toshihide YOSHIDA ,  Kenta KONDO ,  Ryousuke DOHI ,  Kouji NISHINO

IPC: F16K31/02 ,  F16K31/00

Abstract: A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.

公开(公告)号：US20210239222A1

公开(公告)日：2021-08-05

申请号：US17213882

申请日：2021-03-26

Applicant: FUJIKIN INCORPORATED

Inventor： Hidenobu SATO ,  Kenta KONDO ,  Tomohiro NAKATA ,  Masahiko NAKAZAWA ,  Nobuo NAKAMURA ,  Tomoko YUHARA

IPC: F16K7/16 ,  F16K1/04 ,  F16K43/00

Abstract: A valve body unit is configured to be disengaged from a stem by moving the stem and the valve body unit to a valve seat side in a state where a bonnet is separated from the valve seat, thereby pushing a replacement ring such that the replacement ring moves through the bonnet while decreasing in diameter and then drops down onto a ring dropping portion in the free state, then moving the stem, the valve body unit, and the replacement ring to an opposite side to the valve seat side such that a first surface comes into contact with a second surface and the ring dropping portion comes into contact with the replacement ring, and in this state, moving only the stem to the opposite side to the valve seat side such that the connection formed by a connecting mechanism between the stem connection portion and the stem is released.

公开(公告)号：US20220213965A1

公开(公告)日：2022-07-07

申请号：US17704564

申请日：2022-03-25

Applicant: FUJIKIN INCORPORATED

Inventor： Nobuo NAKAMURA ,  Kenta KONDO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: F16K7/17 ,  F16K7/16

Abstract: A valve device includes: a body formed with a valve chamber, a first inflow passage, a second inflow passage, an outflow passage, and an annular groove and provided with a valve seat; and a diaphragm configured to communicate with and interrupt the second inflow passage and the outflow passage. An end portion of the second inflow passage is open to the valve chamber. The valve seat is provided on a peripheral edge of a location where the valve chamber and the second inflow passage communicate with each other. The annular groove is open to the valve chamber and is formed around the second inflow passage. An end portion of the outflow passage is open to the annular groove. The first inflow passage has a plurality of flow passages including an inflow port and a plurality of outflow ports, and each outflow port is open to the annular groove.

公开(公告)号：US20220082176A1

公开(公告)日：2022-03-17

申请号：US17425448

申请日：2020-01-23

Applicant: FUJIKIN INCORPORATED

Inventor： Ryutaro TANNO ,  Toshihide YOSHIDA ,  Daihi TSUCHIGUCHI ,  Yuya SUZUKI ,  Kenta KONDO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Masahiko TAKIMOTO

IPC: F16K31/00 ,  F16K31/122 ,  F16K7/17 ,  F16K37/00

Abstract: A valve device with which a flow rate can be adjusted precisely includes: an operating member for operating a diaphragm provided in such a way as to be capable of moving between a closed position in which the diaphragm closes a flow path and an open position in which the diaphragm opens the flow path; a main actuator for moving the operating member to the open position or the closed position in response to the pressure of a supplied driving fluid; an adjustment actuator for adjusting the position of the operating member positioned in the open position; and a position detecting mechanism for detecting displacement of the operating member with respect to a valve body.

公开(公告)号：US20200149653A1

公开(公告)日：2020-05-14

申请号：US16733743

申请日：2020-01-03

Applicant: FUJIKIN INCORPORATED

Inventor： Takeru MIURA ,  Tsutomu SHINOHARA ,  Tomohiro NAKATA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Kenta KONDO ,  Hidenobu SATO ,  Tomoko YUHARA

IPC: F16K31/122 ,  F15B15/14

Abstract: An actuator includes a casing having a first annular groove formed in an inner peripheral portion thereof; a piston having a second annular groove formed in an outer peripheral portion thereof, provided in the casing to form a pressure chamber together with the casing, and driven by a drive fluid from an outside of the actuator; and an annular seal member having a first fitting portion to be fitted into the first annular groove and a second fitting portion to be fitted into the second annular groove to seal the pressure chamber.

公开(公告)号：US20200088307A1

公开(公告)日：2020-03-19

申请号：US16618912

申请日：2018-06-06

Applicant: FUJIKIN INCORPORATED

Inventor： Takeru MIURA ,  Tomohiro NAKATA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Kenta KONDO ,  Hidenobu SATO

IPC: F16K7/16 ,  F16K31/50

Abstract: A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.

公开(公告)号：US20210372532A1

公开(公告)日：2021-12-02

申请号：US17405588

申请日：2021-08-18

Applicant: FUJIKIN INCORPORATED

Inventor： Ryutaro TANNO ,  Tomohiro NAKATA ,  Toshihide YOSHIDA ,  Kenta KONDO ,  Yuya SUZUKI ,  Tsutomu SHINOHARA

IPC: F16K1/52 ,  F16K27/02 ,  F16K37/00

Abstract: A valve device includes: a body in which an in-flow path and an out-flow path are formed; a valve element that is configured to open and close the in-flow path and the out-flow path; a stem that is configured to move closer to and away from the body in order to cause the valve element to allow and block communication between the in-flow path and the out-flow path; a stroke adjustment portion that is configured to adjust an amount of stroke of the stem; and a displacement sensor that is configured to detect displacement of the stem.

公开(公告)号：US20210285552A1

公开(公告)日：2021-09-16

申请号：US17262984

申请日：2019-05-31

Applicant: FUJIKIN INCORPORATED

Inventor： Kenta KONDO ,  Tsutomu SHINOHARA ,  Tomohiro NAKATA ,  Hidenobu SATO

IPC: F16K7/16 ,  F16K25/00

Abstract: A valve device includes a valve body; a valve seat; an inner disk made of a metal alloy having an inner annular portion, outer annular portion and a connecting portion that connects the inner annular portion and the outer annular portion; a diaphragm made of a metal alloy covering the inner disk and the valve seat and moving between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat to enable and shuts off communication between the first flow path and the second flow paths; and a presser adapter that presses a peripheral edge portion of the diaphragm toward the outer annular portion; and the inner disk has a hardness higher than the valve seat and lower than both the valve body and the diaphragm.