公开(公告)号：US20210199205A1

公开(公告)日：2021-07-01

申请号：US16757644

申请日：2018-10-22

申请人： FUJIKIN INCORPORATED

发明人： Kazunari WATANABE ,  Kohei SHIGYOU ,  Kenji AIKAWA ,  Tomohiro NAKATA ,  Takahiro MATSUDA ,  Tsutomu SHINOHARA

IPC分类号： F16K7/16 ,  F16K27/02 ,  H01L21/67

摘要： The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.

公开(公告)号：US20200325887A1

公开(公告)日：2020-10-15

申请号：US16757939

申请日：2018-10-22

申请人： FUJIKIN INCORPORATED

发明人： Kazunari WATANABE ,  Kohei SHIGYOU ,  Kenji AIKAWA ,  Tomohiro NAKATA ,  Takahiro MATSUDA ,  Tsutomu SHINOHARA

IPC分类号： F04B43/02

摘要： A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.

公开(公告)号：US20240242976A1

公开(公告)日：2024-07-18

申请号：US18279712

申请日：2022-03-04

申请人： Tokyo Electron Limited ,  FUJIKIN INCORPORATED

发明人： Jun HIROSE ,  Atsushi SAWACHI ,  Takahiro MATSUDA ,  Kazunari WATANABE ,  Kohei SHIGYOU ,  Taiki HOSHIKO

IPC分类号： H01L21/67

CPC分类号： H01L21/67017

摘要： A gas supply device capable of saving space and supplying a mixed gas having components with stable concentration to a processing chamber in a short time includes: a plurality of fluid control units each including a flow path through which gas flows, and fluid control devices provided in the middle of the flow path; a merging flow path including a plurality of connecting portions fluidly connected to the plurality of fluid control units and a single gas outlet portion which derives the gas introduced through the plurality of connecting portions; wherein a plurality of connecting portions is arranged symmetrically with respect to the gas outlet portion in the flow path direction of the merging flow path, and two or more fluid control units are fluidly connected to each of the plurality of connecting portions.

公开(公告)号：US20200248310A1

公开(公告)日：2020-08-06

申请号：US16635042

申请日：2018-08-17

申请人： FUJIKIN INCORPORATED

发明人： Kenji AIKAWA ,  Kazunari WATANABE ,  Toshiyuki INADA ,  Tsutomu SHINOHARA

IPC分类号： C23C16/455 ,  F16K27/00 ,  F16L55/11 ,  F16J13/06

摘要： A joint block includes a block body, a closing member mounted in a recessed part formed on the other end side of the block body, a seal mechanism that includes a circular projection formed on an opposing surface of the block body, and seals an area between the block body and the closing member by the circular projection biting into the other opposing surface around an opening of a first flow path, a swaging part that is formed on the block body and presses the closing member toward the opposing surface, and an engaging part formed by an inner peripheral part of the recessed part and an outer peripheral part of the closing member that engages with the inner peripheral part. A pressing force that presses the circular projection of the seal mechanism against the other opposing surface is shared by the swaging part and the engaging part.

公开(公告)号：US20200149653A1

公开(公告)日：2020-05-14

申请号：US16733743

申请日：2020-01-03

申请人： FUJIKIN INCORPORATED

发明人： Takeru MIURA ,  Tsutomu SHINOHARA ,  Tomohiro NAKATA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Kenta KONDO ,  Hidenobu SATO ,  Tomoko YUHARA

IPC分类号： F16K31/122 ,  F15B15/14

摘要： An actuator includes a casing having a first annular groove formed in an inner peripheral portion thereof; a piston having a second annular groove formed in an outer peripheral portion thereof, provided in the casing to form a pressure chamber together with the casing, and driven by a drive fluid from an outside of the actuator; and an annular seal member having a first fitting portion to be fitted into the first annular groove and a second fitting portion to be fitted into the second annular groove to seal the pressure chamber.

公开(公告)号：US20200088307A1

公开(公告)日：2020-03-19

申请号：US16618912

申请日：2018-06-06

申请人： FUJIKIN INCORPORATED

发明人： Takeru MIURA ,  Tomohiro NAKATA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Kenta KONDO ,  Hidenobu SATO

IPC分类号： F16K7/16 ,  F16K31/50

摘要： A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.

公开(公告)号：US20220186845A1

公开(公告)日：2022-06-16

申请号：US17425424

申请日：2020-01-21

申请人： FUJIKIN INCORPORATED

发明人： Toshiyuki INADA ,  Kazunari WATANABE ,  Kenji AIKAWA ,  Kohei SHIGYOU ,  Tomohiro NAKATA ,  Takahiro MATSUDA ,  Tsutomu SHINOHARA

IPC分类号： F16K7/16 ,  F16K27/02 ,  H01L21/67

摘要： A first flow path member has a first sealing surface for supporting one end surface, in a central axis direction, of an annular seal member, and a second flow path member has a second seal surface including a flat surface for supporting a surface of a plate-like member, and a third seal surface for supporting an outer peripheral surface of the annular seal member, wherein: in the annular seal member, an other end surface of the annular seal member is pressed against the back surface of the plate-like member, the one end surface of the annular seal member is pressed against the first seal surface of the first flow path member, and the outer peripheral surface of the annular seal member is pressed against the third seal surface of the second flow path member; and the plate-like member is pressed by the other end surface of the annular seal member.

公开(公告)号：US20200278049A1

公开(公告)日：2020-09-03

申请号：US16764134

申请日：2018-11-13

申请人： FUJIKIN INCORPORATED

发明人： Kazunari WATANABE ,  Kohei SHIGYOU ,  Kenji AIKAWA ,  Tomohiro NAKATA ,  Takahiro MATSUDA ,  Tsutomu SHINOHARA

IPC分类号： F16K39/02 ,  F16K7/16 ,  F16K27/02 ,  F16K11/22

摘要： A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.

公开(公告)号：US20200278046A1

公开(公告)日：2020-09-03

申请号：US16649847

申请日：2018-09-04

申请人： FUJIKIN INCORPORATED

发明人： Kazunari WATANABE ,  Tomohiro NAKATA ,  Toshiyuki INADA ,  Tsutomu SHINOHARA

IPC分类号： F16K31/524 ,  F16K35/02

摘要： To provide a manual valve device suitable for a miniaturized and integrated fluid control system, the manual valve device includes a casing having a tubular shape and incorporating a drive mechanism, an operation member for activating the drive mechanism, and a cam part that converts a force acting on the operation member into a driving force of the drive mechanism. The manual valve device further includes a protective cover provided on an upper end side of the casing and covering at least a portion of the operation member. The operation member includes an attaching part that allows removable attaching of an auxiliary tool for causing a force required for activation of the drive mechanism to act on the operation member. The protective cover is formed so as to allow access to the attaching part of the operation member by the auxiliary tool.

公开(公告)号：US20190009353A1

公开(公告)日：2019-01-10

申请号：US15752464

申请日：2016-07-14

申请人： FUJIKIN INCORPORATED

发明人： Kazunari WATANABE ,  Toshiyuki INADA ,  Tsutomu SHINOHARA ,  Tomohiro NAKATA

IPC分类号： B23K9/028 ,  F16L13/02 ,  H01L21/3065 ,  F16L55/11

摘要： A pipe joint includes a first member, a second member, a weld experiencing transverse contraction and joining a first outer cylindrical end portion and a second outer cylindrical end portion butted with their end faces meeting over the entire circumference, an annular sealed area produced by the transverse contraction of the weld causing a first pressing portion and a second pressing portion to be displaced toward each other, a heat transmission suppressing member arranged in a space delimited by a weld forming area and a to-be-sealed area, inside the first and second members assembled, to suppress transmission of heat applied in welding from the weld forming area to a to-be-sealed area, and a first stop ring fitted in an outer cylindrical surface of the heat transmission suppressing member to hold the heat transmission suppressing member against an inner surface of the first or the second member.