公开(公告)号：US20130037714A1

公开(公告)日：2013-02-14

申请号：US13572206

申请日：2012-08-10

申请人： Faysal Boughorbel ,  Berend Helmerus Lich ,  Cornelis Sander Kooijman ,  Eric Gerardus Theodoor Bosch ,  Alan Frank de Jong

发明人： Faysal Boughorbel ,  Berend Helmerus Lich ,  Cornelis Sander Kooijman ,  Eric Gerardus Theodoor Bosch ,  Alan Frank de Jong

IPC分类号： H01J37/26

CPC分类号： H01J37/222 ,  G01N23/22 ,  G01N2223/423 ,  H01J37/28 ,  H01J2237/226

摘要： Charged-particle microscopy includes irradiating a sample in N measurement sessions, each having an associated beam parameter (P) value; Detecting radiation emitted during each measurement session, associating a measurand (M) with each measurement session, thus providing a data set (S) of data pairs {Pn, Mn}, where n is an integer in the range 1≦n≦N, and processing the set (S) by: Defining a Point Spread Function (K) having a kernel value Kn for each value of n; Defining a spatial variable (V); Defining an imaging quantity (Q) having for each value of n a value Qn that is a three-dimensional convolution of Kn and V, such that Qn=Kn*V; For each value of n, determining a minimum divergence min D(Mn∥Kn*V) between Mn and Qn, solving for V while applying constraints on the values Kn.

摘要翻译： 带电粒子显微术包括在N个测量会话中照射样品，每个测量会话具有相关的光束参数（P）值; 检测在每个测量会话期间发射的辐射，将被测量（M）与每个测量会话相关联，从而提供数据对{Pn，Mn}的数据集（S），其中n是范围1＆nlE; n＆nlE; N， 并通过以下方式处理集合（S）：定义每个n值具有内核值Kn的点扩展函数（K）; 定义空间变量（V）; 定义对于n的每个值具有作为Kn和V的三维卷积的值Qn的成像量（Q），使得Qn = Kn * V; 对于n的每个值，确定Mn和Qn之间的最小发散最小值D（Mn∥Kn* V），在对Kn进行约束的同时求解V。

公开(公告)号：US20110266440A1

公开(公告)日：2011-11-03

申请号：US13098300

申请日：2011-04-29

申请人： Faysal Boughorbel ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich ,  Eric Gerardus Theodoor Bosch

发明人： Faysal Boughorbel ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich ,  Eric Gerardus Theodoor Bosch

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/222 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2611

摘要： A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps: Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions; Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (Pi, Mi), where 1≦i≦N, wherein: A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Qk, Lk), in which an imaging quantity (Q) having value Qk is associated with a discrete depth level Lk referenced to the surface S.

摘要翻译： 一种使用扫描电子显微镜（SEM）研究样品的方法，包括以下步骤：在多个（N）个测量会话中使用探测电子束照射样品的表面（S），每个测量会话具有相关联的束 参数（P）值，其从这样的值的范围中选择并且在测量会话之间不同; 在每个测量会话期间检测由样本发射的受激辐射，将被测量（M）与其相关联并注意每个测量会话的该被测量的值，从而允许编辑数据对（Pi，Mi）的数据集（D） 其中：采用统计盲分离（BSS）技术来自动处理数据集（D），并将其空间解析为成像对（Qk，Lk）的结果集（R），其中 具有值Qk的成像量（Q）与参考表面S的离散深度级Lk相关联。

公开(公告)号：US08581189B2

公开(公告)日：2013-11-12

申请号：US13572206

申请日：2012-08-10

申请人： Faysal Boughorbel ,  Eric Gerardus Theodoor Bosch ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich ,  Alan Frank de Jong

发明人： Faysal Boughorbel ,  Eric Gerardus Theodoor Bosch ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich ,  Alan Frank de Jong

IPC分类号： H01J37/26

CPC分类号： H01J37/222 ,  G01N23/22 ,  G01N2223/423 ,  H01J37/28 ,  H01J2237/226

摘要： A charged-particle microscopy includes irradiating a sample in measurement sessions, each having an associated beam parameter (P) value detecting radiation emitted during each measurement session, associating a measurand (M) with each measurement session, thus providing a data set (S) of data pairs {Pn, Mn}, wherein an integer in the range of 1≦n≦N, and processing the set (S) by: defining a Point Spread Function (K) having a kernel value Kn for each value n; defining a spatial variable (V); defining an imaging quantity (Q) having fore each value of n a value Qn that is a three-dimensional convolution of Kn and V, such that Qn=Kn*V; for each value of n, determining a minimum divergence min D(Mn∥Kn*V) between Mn and Qn, solving V while applying constraints on the values Kn.

摘要翻译： 带电粒子显微术包括在测量会话中照射样本，每个测量会话具有检测在每个测量会话期间发射的辐射的相关联的波束参数（P）值，将被测量（M）与每个测量会话相关联，从而提供数据集（S） 数据对{Pn，Mn}，其中1 @ n @ N范围内的整数，并且通过以下方式来处理集合（S）：定义每个值n具有内核值Kn的点扩展函数（K） 定义空间变量（V）; 定义在每个值n之前具有作为Kn和V的三维卷积的值Qn的成像量（Q），使得Qn = Kn * V; 对于n的每个值，确定Mn和Qn之间的最小发散最小值D（Mn∥Kn* V），同时对值Kn施加约束来求解V。

公开(公告)号：US08232523B2

公开(公告)日：2012-07-31

申请号：US13098300

申请日：2011-04-29

申请人： Faysal Boughorbel ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich ,  Eric Gerardus Theodoor Bosch

发明人： Faysal Boughorbel ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich ,  Eric Gerardus Theodoor Bosch

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/222 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2611

摘要： A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps: Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions; Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (Pi, Mi), where 1≦i≦N, wherein: A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Qk, Lk), in which an imaging quantity (Q) having value Qk is associated with a discrete depth level Lk referenced to the surface S.

摘要翻译： 使用扫描电子显微镜（SEM）研究样品的方法，包括以下步骤：在多个（N）个测量会话中使用探测电子束照射样品的表面（S），每个测量会话具有相关联的束 参数（P）值，其从这样的值的范围中选择并且在测量会话之间不同; 在每个测量会话期间检测由样本发射的受激辐射，将被测量（M）与其相关联并注意每个测量会话的该被测量的值，从而允许编辑数据对（Pi，Mi）的数据集（D） 其中：采用统计盲分离（BSS）技术来自动处理数据集（D），并将其空间解析为成像对（Qk，Lk）的结果集（R），其中 具有值Qk的成像量（Q）与参考表面S的离散深度级Lk相关联。

公开(公告)号：US20130037715A1

公开(公告)日：2013-02-14

申请号：US13572449

申请日：2012-08-10

申请人： Faysal Boughorbel ,  Pavel Potocek ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich

发明人： Faysal Boughorbel ,  Pavel Potocek ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich

IPC分类号： H01J37/26

CPC分类号： H01J37/222 ,  G01N23/22 ,  G01N2223/423 ,  H01J37/28 ,  H01J2237/226

摘要： A method of examining a sample using a charged-particle microscope, comprising the following steps: Mounting the sample on a sample holder; Using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; Using a detector arrangement to detect at least a portion of said emitted radiation, which method comprises the following steps: Recording an output On of said detector arrangement as a function of emergence angle θn of said emitted radiation, measured relative to an axis normal to S, thus compiling a measurement set M={(On, θn)} for a plurality of values of θn; Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.

摘要翻译： 使用带电粒子显微镜检查样品的方法，包括以下步骤：将样品安装在样品架上; 使用粒子光学柱将至少一束颗粒辐射引导到样品的表面S上，从而产生引起发射的辐射从样品中发出的相互作用; 使用检测器装置来检测所述发射辐射的至少一部分，该方法包括以下步骤：根据出射角度和角度记录所述检测器装置的输出On;所发射的辐射的n相对于轴线正常测量 到S，从而针对多个值进行编译测量集M = {（On，＆thetas; n）}; n; 使用计算机处理装置自动地对测量集M进行解卷积并将其空间解析为结果集R = {（Vk，Lk）}，其中空间变量V表示以参考表面的相关离散深度级Lk的值Vk S，其中n和k是整数序列的成员，空间变量V表示作为其体积中的位置的函数的样本的物理性质。

公开(公告)号：US08586921B2

公开(公告)日：2013-11-19

申请号：US13572449

申请日：2012-08-10

申请人： Faysal Boughorbel ,  Pavel Potocek ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich

发明人： Faysal Boughorbel ,  Pavel Potocek ,  Cornelis Sander Kooijman ,  Berend Helmerus Lich

IPC分类号： H01J37/26

CPC分类号： H01J37/222 ,  G01N23/22 ,  G01N2223/423 ,  H01J37/28 ,  H01J2237/226

摘要： A method of charged-particle microscopy, comprising: irradiating a sample surface S to cause radiation to emanate from the sample; detecting at least a portion of said emitted radiation recording an output On of said detector arrangement as a function of emergence angle θn of said emitted radiation, measured relative to an axis normal to S thus compiling a measurement set M={(On, θn)} for a plurality of values of θn; automatically deconvolving the measurement set M and spatially resolve it into a result set R={(VK, Lk)},in which a spatial variable V demonstrates a value Vk at an associated discrete death level Lk referenced to the surface S, whereby n and K are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.

摘要翻译： 一种带电粒子显微镜的方法，包括：照射样品表面S以引起辐射从样品中发出; 检测所述发射辐射的至少一部分，记录所述检测器装置的输出On作为所述发射辐射的出射角度的函数，相对于垂直于S的轴测量，从而编译测量集M = {（On，thetan） }多个价值观; 自动去卷积测量集M，并将其空间解析为结果集R = {（VK，Lk）}，其中空间变量V表示参考表面S的相关离散死亡水平Lk的值Vk，由此n和 K是整数序列的成员，空间变量V表示作为其体积中的位置的函数的样本的物理性质。