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1.发明授权公开(公告)号：US11874301B2
公开(公告)日：2024-01-16
申请号：US17078778
申请日：2020-10-23
Applicant: FormFactor, Inc.
Inventor： Kazuki Negishi , Yu-Wen Huang , Gerald Lee Gisler , Eric Robert Christenson , Michael E. Simmons
IPC: G01R1/07 , G01R31/308 , G01R31/319
CPC classification number: G01R1/07 , G01R31/308 , G01R31/31905
Abstract: Probe systems including imaging devices with objective lens isolators and related methods are disclosed herein. A probe system includes an enclosure with an enclosure volume for enclosing a substrate that includes one or more devices under test (DUTs), a testing assembly, and an imaging device. The imaging device includes an imaging device objective lens, an imaging device body, and an objective lens isolator. In examples, the probe system includes an electrical grounding assembly configured to restrict electromagnetic noise from entering the enclosure volume. In examples, methods of preparing the imaging device include assembling the imaging device such that the imaging device objective lens is at least partially electrically isolated from the imaging device body. In some examples, utilizing the probe system includes testing the one or more DUTs while restricting electrical noise from propagating from the imaging device to the substrate.
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公开(公告)号：US11454799B2
公开(公告)日：2022-09-27
申请号：US16752324
申请日：2020-01-24
Applicant: FormFactor, Inc.
Inventor： Gerald Lee Gisler , Sia Choon Beng , Anthony James Lord , Gavin Neil Fisher
Abstract: Microscopes with objective assembly crash detection and methods of utilizing the same are disclosed herein. For example, a microscope comprises a microscope body, an objective assembly comprising an objective lens, an objective assembly mount configured to separably attach the objective assembly to the microscope body, and an orientation detection circuit configured to indicate when a relative orientation between the microscope body and the objective assembly differs from a predetermined relative orientation.
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